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CLEAN TRACK LITHIUS MULTI BLOCK
Multi Block (Resist Coater/Developer)
Date of Manufacture: 2004-01-01
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Singapore, Singapore
Available date: Currently Available
Inspect to confirm configuration and condition.
Units are store in separate location.
Equipment configuration ：
(1) CSB (2) T-Block1 (3) T-Block2 (4) HP Tower1
(5) HP Tower2 (6) HP Tower3 (7) IRAM (8) IRAS
(9) COT Cabinet (10) DEV Cabinet (11) CUP THC (12) AC power box
Model: LITHIUS
Condition: In Storage ( In Fab, In Storage)
(1) Serial number: G240125
(2) Main Controller type: LITHIUS EC
Software version: 300.0.37.5
(4) MC configuration (#COT/#DEV): 3 COT+2BCT+5DEV
(5) Stepper/Scanner interface: TEL/ASML
(6) Wafer Direction (R to L) or (L to R): R to L
Accessory
1) AC Power Box: Yes
- AC Power Cable: 3 Phase
2) TCU: Yes
3) T & H: Yes
-Model/Make: Asahi
4)Chemical Cabinet: COT+DEV
(7) Coater Units
1) Unit
2) 2-2 Unit
3) 2-3 Unit
(8) Develop Unit
1) 3-1 Unit
2) 3-3 Unit
3) 3-4 Unit
(9) All Units Qty
System is Missing parts
Please inspect tool to reconfirm
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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