Macquarie Semiconductor and Technology on behalf of Macquarie (Asia) Pte Ltd. - UMC

Novellus Systems Inc. Concept Three Speed

Asset ID: 210194

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Novellus Systems Inc.

Concept Three Speed

HDP CVD (Chemical Vapor Deposition)

Deposition Equipment

Equipment details:

Date of Manufacture: 2003

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Singapore, Singapore

Available date: Currently Available



Equipment IDHDPCVD-01
Date of Audit17-Feb-22
Electrical RequirementsAC 208V
Original Ship Date from Novellus27-Nov-03
QNX Platform Version1
Software Version5.1
Date of Last PMJun-21
Is System On-Line?No
Off-Line Date (if applicable)Jun-21
CE Mark Certified?Yes 
OEM Audit Available?Yes  
Decontamination Report Exists?Yes  
Can Produce Wafers AS IS?Yes  
Any Known Field Modifications?Yes  
All Cables Present?Yes  
 Serial Number 
WTS9 
Module A2 
Module B8 
Module C7 
Module AC3 
Module BC3 
Module CC3 
Speed, Speed xT, Speed NEXT, Speed MAXSTI, IMD
Front-End Interface3 LPs
FOUP RF ID ReaderYes
Signal Lamp TowerYes
Factory AutomationOHT
ATM Robot TypeBrooks
Vacuum Robot TypeBrooks/Magnatran 7
TM Turbo PumpYes
     Make/ModelPFEIFFER/TC750-E74
UPSNA
SECS/GEMYes
Facilities LocationBottom
Remote Interconnect Cable Length10m
WTS Vacuum PEC LocationPEC Station
Primary User Interface Loc.Right  /  Left
     Nanofill 1Yes
RF Match TypeENI MWH-100
Heated ForelineNo
Active Temperature ControlNo
ESC TypeHEX
Gate Valve Mfg & ModelVAT
Pedestal Lift TypeDual Position
Temp MonitoringNTM 500C
Remote CleanNo
RPCNo
RF Generator RackYes 
SSDNo
Chamber PositionTurbo Mfgr.Turbo Model
Module ALeybold VacuumMag2000C
Module BLeybold VacuumMag2000C
Module CLeybold VacuumMag2000C
Module A AEAE 
Module A ENIENI8000
Module B AEAE 
Module B ENIENI8000
Module C AEAE 
Module CENIENI8000
ManufacturerEdwards
ModelIH1000
Quantity Required3
Included With SystemYes  
ManufacturerEdwards
ModelIH80
Included With SystemYes
Gas Box Part Number79-264173-00
Maximum # of Lines8
Gas Line #GasFlow (sccm)MFC Mfgr.MFC Model
1N2 purgeNANANA
2O2500AERAFC-7800CD
3NF32000AERAFC-7800CD
4HE2000AERAFC-7800CD
5AR500AERAFC-7800CD
6H22000AERAFC-7800CD
7SiH4200AERAFC-7800CD
8N2 purgeNANANA
Notes:
Nanofill 1:  Toggle Clean, Pfeiffer 2100 TMP, AE Match at Pedestal box
Nanofill 2:  Multi-position Pedestal, Manual Tune Match at Top, Nanofill Two dome.
Speed NeXT:  Two sections on top of the RF Enclosure, RPC on the side


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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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