Macquarie Equipment Trading on behalf of Micron Technology Taiwan, Inc. (F11)

Edwards iH80

Asset ID: 207282

Print spec sheet

Edwards

iH80

Dry Pump

Support Equipment (Fab)

Equipment details:

Date of Manufacture:

Currently Configured for: N/A

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

Qty 1- Not overhaul (pump controller is not included)


Asset descriptionFixed Asset NumberS/Nlocation
80 -3333A52BE050200037911098A22.5-2.5



Technical data :

60 Hz Peak speed (m3 /h) : 103

60 Hz Ultimate vacuum (torr) : 7.5 x 10-3

50 Hz Peak speed (m3 /h) : 86

50 Hz Ultimate pressure (torr) : 2.3 x 10-2

Typical shaft seal nitrogen flow (slm) : 4

Cooling typical water flow at 15psi drop: 2 l/mn

Oil capacity : 0.7 l

Inlet connection : ISO63

Outlet connection : NW40

Noise Level : <69 dB(A)

Weight : 240 kg

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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