Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, K.K. (F15)
Date of Manufacture:
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Hiroshima, Japan
Available date: 9/2/2022
|Tool Model||Exelan FlexEX|
|Software Version (include revision #)||1.7.4_SP1-HF3-Release|
|System Power Rating||200 AC 3-Phase|
|Loading Configuration||3 load ports|
|Vendor Chm Model||Chemicals / Gases Used (not to use Micron Proprietary names)|
|Chm/Unit Position 1||FlexEX||C4F8,CF4,O2,Ar,CO,CH3F,CHF3,Xe,C4F6,CH2F2,N2,COS|
|Chm/Unit Position 2||FlexEX||C4F8,CF4,O2,Ar,CO,CH3F,CHF3,Xe,C4F6,CH2F2,N2,COS|
|Chm/Unit Position 3||FlexEX||C4F8,CF4,O2,Ar,CO,CH3F,CHF3,Xe,C4F6,CH2F2,N2,COS|
|Chm/Unit Position 4||FlexEX||C4F8,CF4,O2,Ar,CO,CH3F,CHF3,Xe,C4F6,CH2F2,N2,COS|
DEFECTIVE PARTS: one PM3:ESCPowerSupplyBoard and one PM3:RF coaxial cable.
Fab15 confirmed there were no missing parts.
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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