Macquarie Semiconductor and Technology on behalf of Micron Memory Taiwan Co., Ltd. (F16)

KLA-Tencor Corp. Puma 9120


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Asset ID: 185493

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KLA-Tencor Corp.

Puma 9120

Darkfield Inspection

Metrology Equipment

Equipment details:

Date of Manufacture: 2007

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taichung City, Taiwan

Available date: Currently Available

Process: DFLD

Tool config is based on original PO, please verify tool details at tool inspection

Loading Configuration:FOUP

Number of Cassette/FOUP Positions: 2

User Interface Software Version 9.3.309.2.8

Date of Last PM: 2020/06/18

Electrical Requirements: 208VAC 60HZ 83 Amps

User Interface Details

Operating System Version: Microsoft Windows 2000 5.00.2195 Service Pack 4

PC Processor Type: x86 Family 15 Model 4 Stepping 10 GenuineIntel ~3391 Mhz


Number of Inspection Pixel Models:3

Pixel Sizes (sLXX) installed or available:sL5, sL8,sL20

Software Options

Array Mode Algorithm: Yes

Sizing: Yes

9.1 Simulator: Yes

RICO Capable: No

Damage/Missing parts list

FEM not included. (Load Port)

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales

Product images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.

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