Macquarie Semiconductor and Technology on behalf of Micron Memory Taiwan Co., Ltd. (F16)

Tokyo Electron Ltd. (TEL) P-12XLn+


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Asset ID: 210283

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Tokyo Electron Ltd. (TEL)


Production Wafer Prober

Wafer Prober

Equipment details:

Date of Manufacture: 2008-01-01

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taichung City, Taiwan

Available date: Currently Available

Tool config is based on original PO, please verify tool details at tool inspection

Loader Type : FOUP

Chuck Material: TRX,200C,INLINE,AU

Chuck Temp: Hot

12" Gold plate chuck: NO

Temp control with Chiller: NO

Temp range: Room~+150C: YES

Auto wafer ID reader: insight OCR 1742: COGNEX 1742

Auto card change: YES

Auto Needle Alignment: YES

Auto Wafer Alignment: YES

Needle Cleaning for stage:: YES

GPIB interface: YES


Insight OCR 1721: Insight OCR


Black Brush: YES

Chuck Blow: YES

Touch Pen: NO

Color CCD alignment Camera: NO

3 EYES alignment Camera: NO

Optical system: ASU/BCU-II: YES

Needle mark inspection: YES

Single loader: YES

Color LCD Display: YES

Operation Software:: NA

connect Tester:KEYSIGHT 4073

====================== OEM Feature for reference =========================

Precio™ series is a fully automatic wafer-probing platform. Due to process miniaturization, higher device functionality, and package variety, demand for probing technology in the test process is becoming increasingly diversified. The Precio™ series not only has XY accuracy to realize more reliable contacts but also has greater Z-axis control, which is important for soft contact. Optimum temperature control during test, and increased of parallel die testing are achieved with the Precio™ prober series. TEL provides a series of reliable solutions to the increasing number of probing demands.

Feature :

XY probing accuracy (μm) : ±1.8

Z probing accuracy (μm) : ±5.0

Probing force (kg) : 100

Optical system : ASU/BCU-Ⅰ

Product images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.

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