Macquarie Semiconductor and Technology on behalf of Micron Technology, Inc. (Boise)
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Dainippon Screen Mfg. Co. (DNS)
Date of Manufacture: August 2014
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Boise, United States
Available date: Currently Available
3 storage numbers:
56053 - Front end
56054 - Control box
56049 - Body
| System Power Rating | 208 AC 3-Phase 60 Hz | ||
| Loading Configuration | 4 Load Ports | ||
| Description | Chemicals / Gases Used | ||
| Unit Position 1 | Unit 9 | NH4OH, H2O2, 0.063% TMAH | |
| Unit Position 2 | Unit 10 | NH4OH, H2O2, 0.063% TMAH | |
| Unit Position 3 | Unit 11 | NH4OH, H2O2, 0.063% TMAH | |
| Unit Position 4 | Unit 12 | NH4OH, H2O2, 0.063% TMAH | |
| Unit Position 5 | Unit 13 | NH4OH, H2O2, 0.063% TMAH | |
| Unit Position 6 | Unit 14 | NH4OH, H2O2, 0.063% TMAH | |
| Unit Position 7 | Unit 15 | NH4OH, H2O2, 0.063% TMAH | |
| Unit Position 8 | Unit 16 | NH4OH, H2O2, 0.063% TMAH | |
| Description | |||
| Tool Frame with 8x chambers, | |||
| Section 5. Missing/Defective Parts | |||
| Description | Missing (Qty) | Defective (Qty) | |
| DIW Filters | 0 | 8 | |
| MHU Tabs and plungers | 0 | All | |
| IHU Tabs and plungers | 0 | All | |
| Chuck Pins | 0 | All | |
| Front Display GUI | 0 | 1 | |
| DIW E-flow dissolution module | 0 | 2 | |
| TMAH Filters | 0 | 8 | |
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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