Macquarie Equipment Trading on behalf of Micron Technology, Inc. (VA)
Date of Manufacture: 2010
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Manassas, United States
Available date: Currently Available
Configuration. Audit to verify.
Vertical ALD MD-ZrOx Furnace
TELINDY-PLUS for 300mm Wafers
------------------------
I. Base Unit for MDZrOx Process
a. Cabinets / units / Controllers
b. FOUP and Wafer Handling Automation
(18 FOUP Stocker)
c. Low Temp Heater : VMM-56-201
d. Integrated Gas System for MD ZrOx
- 2nd Gas Box (Bubbler unit for Zr precursor & TMA)
- 3rd Gas Box
(Bubbler Unit for Ti precursor)
- Ozonizer Interface box
(For MKS O3 Gen P/N AX8575-29)
- Purge N2
- Vaporizer unit for 3DMAS
-
e. Vacuum Foreline Configuration
including High Speed VEC
f. US Safety
-
II Per System Options
a. N2 Load Lock System
b. Dual Boat operation
c. Chemical Filter
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
Get in touch
Ask about our equipment solutions, ranging from Macquarie equipment inventory sales, sourcing programs, surplus disposition options, and direct equipment purchases.