Macquarie Equipment Trading on behalf of Micron Technology Taiwan, Inc. (F11)

Applied Materials (AMAT) Producer GT Eterna FCVD

Asset ID: 19631

Print spec sheet

Applied Materials (AMAT)

Producer GT Eterna FCVD

PECVD (Chemical Vapor Deposition)

Deposition Equipment

Equipment details:

Date of Manufacture: TBD

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: 12/3/2021


Basic System : F11  SAXC003
Technology: DCVD
Platform Type: Producer GT

System Software: 
System software: B5.4_135
FiCGUI: fB5.20_11
GP: 8.10.21.2
DTauMacros: 9.2.44.0

Mainframe Configuration: 
Robot type: 0190-37624
Robot Blades: 0200-08347
LL preheater: 0090-05793
slit valve door: 3870-05037
MF pump: GX600N(EDWARDS)
LL pump: EPX180L(EDWARDS)
Diffucer: 0190-37371

FCVD Chamber Configuration: 
Chamber Type: FCVD CHA/C
Blocker: N/A
Liner: 1 Piece
Pedestal: 0010-42919
Slit Valve: 3870-05037(KALREZ 9100)
Filter: N/A
Foreline: 6in
Foreline TV: 3870-06440
Foreline ISO: 3870-06045
Gas box: N/A
Dome: 0041-26595
Baffle : 0021-84368
FACEPLATE: 0041-35370
BLOCKER(gas feed block): 0041-07625
PUMPING LINER: 0021-64960
LINER CERAMIC TOP: 0021-82788
LINER CERAMIC MIDDLE: N/A
LINER CERAMIC BOTTOM(edge ring): 0021-85102
CERAMIC ISOLATOR: N/A
LIFT PINS, FLOATING: 0200-08020
LIFT HOOP: 0200-08334
RPS: 0190-40602
Gas Pallet Type: ETERNA FCVD GT Twin Pallet

Gas Box Configuration: 
Line 1: N2 PURGE
Line 2: NF3 - 10.0SLM
Line 3: AR - 10.0SLM
Line 4: O2 - 250SCCM
Line 5: O2 - 2.5SLM
Line 6: N2 PURGE
Line 7: TSA - 1.0SLM
Line 8: HE - 5.0SLM
Line 9: EMPTY
Line 10: N2 PURGE
Line 11: NH3 - 700SCCM
Line 12: NH3 - 700SCCM
Line 13: EMPTY
Line 14: H2O - 1.0G
Line 15: AR - 5.0SLM
Line 16: EMPTY
Line 17: EMPTY
Line 18: EMPTY
Line 19: EMPTY
Line 20: EMPTY
Line 21: EMPTY
Line 22: N2 PURGE

UV Chamber Configuration: 
Chamber Type: UV Hybrid
LAMPHEAD ASSEMBLY (DUAL): 0190-46008
INNER PRIMARY REFLECTORS (x2): 0200-09730
OUTER PRIMARY REFLECTORS (x2): 0200-09728
UV BULBS (MERCURY BULB x2): 0195-04092
LAMPHEAD ENCLOSURE SEAL: 0021-28691
LAMPHEAD TRAY: 0021-44280
LAMPHEAD TRAY MOUNTING SEAL: 0021-32043
PULLEY ASSEMBLY (ROTATING WHEEL): 0010-44199
LOWER DYNAMIC SEAL: 0190-31840
LOWER CLAMP RING: 0021-33232
SECONDARY REFLECTOR ASSEMBLY: 0041-43990
HOME SENSOR (SIDE 1 ONLY): 0150-18683
HOUSING: 0041-08307
UPPER WINDOW CLAMP SIDE 1: 0041-44565
UPPER WINDOW CLAMP SIDE 2: 0041-44968
QUARTZ WINDOW:  0200-05371 Hereaus (CIP Quartz)
LOWER WINDOW CLAMP: 0041-44966
UPPER SHOWER HEAD: 0200-13516 Hereaus (CIP Quartz)
INTERMEDIATE SHOWER HEAD CLAMP: 0041-44967
LOWER SHOWER HEAD: 0200-13481 Hereaus (CIP Quartz)
LOWER SHOWER HEAD CLAMP: 0021-94083
RF DETECTOR: 0195-06361
LAMPHEAD ROTATOR: 3970-00044
CERAMIC TOP LINER : 0200-10913
INNER PUMPING LINER : 0200-10914
OUTER PUMPING LINER: 0200-10912
ALUMINUM FILLER: 0021-84795
CERAMIC MIDDLE LINER : 0200-13152
CERAMIC BOTTOM LINER : 0200-10944
LIFT PIN (Big foot): 0200-06110
WEIGHT (Big foot): 0200-05795
Ceramic Cap: 0200-05307
WASHER, WAVE, HAYNES: 0021-27777
EQUALIZATION PORT LINER: 0021-94377
PUMPING CHANNEL HUB: 0041-36422
PEDASTAL: 0041-33505
SLIT VALVE DOOR: 0246-18185(Chemraz XPE)
RPS: 0190-40602
UV POWER SUPPER: 0190-44835
Foreline pipeing size: 4''
Foreline TV / ISO COMBO VALVE: 0190-42409
Gas Pallet Type: BIMINI, YAD4, 7STK, REG, PROD GT

Gas Box Configuration: 
Line 1: Purge N2
Line 2: NF3, 5slm
Line 3: AR_CLN, 5slm
Line 4: NA
Line 5: AR_TOP, 35slm
Line 6: NA
Line 7: NA
Line 8: NA
Line 9: O3 DIVERT
Line 10: O3, 30slm
Line 11: AR_BTM, 10slm
Line 12: AR_SH, 2slm
Line 13: NA
Line 14: NA
Line 15: NA
Line 16: NA
Line 17: NA
Line 18: NA
Line 19: NA
Line 20: NA
Line 21: NA
Line 22: NA

Heat exchanger: 
Heat exchanger 1: 0190-27732
Heat exchanger 2: 0190-27732
Heat exchanger 3 (For UV): 0190-32036

Ozone system: 
O3 Generator: 0190-44053
O3 Controller: 0195-08806
Process Pump/Abatement: 
Pump CHA/C: iXH4550HT
Pump CHB: iXH1820
Scrubber: DAS ESCAPE DUO

Missing/Damaged Parts List:
None report, please inspect tool to reconfirm

Enquire about this product

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.

Product Images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


Related products

No results message:
Displayed when filters returns no results.

We couldn't find any items that match your criteria.

Please try a different keyword.

Service unavailable:
Displayed when filter service cannot be reached.

Sorry, this service is currently unavailable.

Please try again later.

Get in touch

Have a question for our team?

Ask about our equipment solutions, ranging from Macquarie equipment inventory sales, sourcing programs, surplus disposition options, and direct equipment purchases.

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.