Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, G.K. (F15)

Applied Materials (AMAT) Centura AP AdvantEdge G5 Metal

Asset ID: 209805

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Applied Materials (AMAT)

Centura AP AdvantEdge G5 Metal

Metal Etch

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture: 2/10

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: Currently Available

Software Version (include revision #) AMS 2.8_82  
System Power Rating  208VAC 3-Phase  
Loading Configuration  2 Carrier Stage  
   Vendor Chm Model  
Chm/Unit Position   1  Centura G5 'BCL3/CL2/O2/N2/SF6/CHF3/CF4/AR/FC3283/FC43
Chm/Unit Position   2  Centura G5 'BCL3/CL2/O2/N2/SF6/CHF3/CF4/AR/FC3283/FC43
Chm/Unit Position   3  Centura AspCF4/O2/N2 
Chm/Unit Position   4  Centura AspCF4/O2/N2 
Process Unit:Advantedge G5  Model:CenturaRemark 
Controller:     
MFC/Pressure Unit: MILLIPORE IntelliFlow(DeviceNet)   
Drive Mechanisms:GUI PC     
FOUP Opener: ADO     
Gas System:Device Net     
Exhuast System:TMP/Pump     
*All OEM cable connecting between FAB to SubFab are require to be list out (Include length in mm)  
Main AC Rack     
Secondary AC Rack     
IPUP     
WFIB     
Endpoint stand     
Monitor stand     
Side strage Left     
Side strage Right     
Main frame     
DPS G5     
Asp     
FI     


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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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