Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, K.K. (F15)
Varian Semiconductor Equipment Associates (VSEA)
Date of Manufacture: JULY-2005
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Hiroshima, Japan
Available date: 12/25/2022
| OEM | Applied Material | ||
| Tool Model | VSTHC_HC | ||
| Process | IMPLANT | ||
| Software Version (include revision #) | VCS07.55.3354 SP22 | ||
| System Power Rating | 208VAC 3-Phase | ||
| Loading Configuration | 1 Process Chambers | ||
| Vendor Chm Model | Chemicals / Gases Used (not to use Micron Proprietary names) | ||||
| Chm/Unit Position 1 | _Process Chambers _____ | _BF3/PH3/AsH3____________________ | |||
| Process Unit: | Model: | Remark | QTY | |
| 1 | Source Head | Advance 54mm | Conversion Tool from 200mm to 300mm | |
| 2 | ESC (Platen) | COMPⅡ | ||
| 3 | Tilter Assembly | Roplat | ||
| 4 | Process Endstation Type | UES2 | ||
| 5 | Load-Loadlocks | Dual, 25wafer capacity, polished integrated loadlocks with self aligning atmospheric doors. Includes 4 wafer walkout sensors in pass through cassette with through-beam wafer mapping sensor. | ||
| 5 | Buffer Robot | Brooks DBM-2076V2 | ||
| Controller: | ||||
| 1 | ESC Controller | PN: E19283790 | ||
| 2 | UPS | Not | ||
| MFC/Pressure Unit: | ||||
| 1 | 1. MFC System | Argon | ||
| 2 | 2. MFC System | BF3 | ||
| 3 | 3. MFC System | AsH3 | ||
| 4 | 4. MFC System | PH3 | ||
| Drive Mechanisms: | ||||
| 1 | Orientor Assembly | E11320430 | ||
| 2 | IN VAC ARMS | VAC-407 | ||
| FOUP Opener: | ||||
| 1 | Foups/Load-Ports | 4 FOUP - Complies with SEMI E47.1 (25 wafers) | ||
| Gas System: | ||||
| 1 | Gas System | Position 1 Stick : Argon | ||
| 2 | Gas System | Position 2 Stick : BF3 | ||
| 3 | Gas System | Position 3 Stick : AsH3 | ||
| 4 | Gas System | Position 4 Stick : PH3 | ||
| Exhaust/Pump System: | ||||
| 1 | Source Turbo Pump | BOC Edward STP-A2203C2 | DG Parts Items Not Going to Shipout with Tool | |
| 2 | Beamline Turbo Pump | BOC Edward STP-A2203C2 | ||
| 3 | Source Rough Pump | EBARA A10S | ||
| 4 | Endstation Rough Pump | EBARA A10S | ||
| 5 | Cryo Pumps | Brooks OBIS320FE | ||
| 6 | Load-Locks Turbo Pump | TC750 | ||
| Software System : | ||||
| 1 | VCS Software Version | V80 07 67 186 | Software Upgrade Not Applicable as per VSEA | |
| 2 | NCS Computer | Dual 2GHz | Computer hardware obseleted as per VSEA. If there's any failure, will need to manual rebuilt failed hardware components. ETA will be long according to them. | |
| 3 | IAN Computer | VSEA-1 (PN:E19287562) | ||
| Safety : | ||||
| 1 | VESDA Smoke Detector | EMO Interlocked Vesda smoke detection system | ||
Fab15 confirmed there were no missing or damaged parts.
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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