Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Ebara AA100W

Asset ID: 209422

Print spec sheet

Ebara

AA100W

Dry Pump

Support Equipment (Fab)

Equipment details:

Date of Manufacture:

Currently Configured for: N/A

Current Equipment Status: Available

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

Qty 8- Not overhaul (pump controller is not included)


AreaAsset descriptionoverhaulFixed Asset No.S/NLocationFAB
FSAA100WNN3D52EB020700DCN00028A6.5-9.5FAB B
FSAA100WNN3D52EB021300EWC0082DA6.5-4.5FAB B
FSAA100WNN3D52EB020600DCN00037A6.5-4.5FAB B
FSAA100WNN3D52EB020500DCN00036A6.5-4.5FAB B
FSAA100WNN3D52EB020300DCN00033A7.5-4FAB B
FSAA100WNN3D52EB020400DCN00035A7.5-4FAB B
FSAA100WNN3D52EB021000DCN00069A8-5FAB B
FSAA100WNN3D52EB020900DCN00068A8-5FAB B


Specification AA100W

Pumping speed (N2) l/min. 10,000

Pumping speed (N2) m3 /h 600

Ultimate pressure mbar 1x10-3

Ultimate pressure Pa 0.13

Water Consumption l/min 3.5-8

Nitrogen Consumption SLM 11-13

Nitrogen Consumption Pa m3 /sec 19-22

Voltages ranges V 200-220/380-415

Motor power, installed kW 5.5

Weight, approx. kg 270

Sizes (LxWxH) mm 865x400x760

Inlet flange size DN 100 ISO-K

Outlet flange size DN 40 K

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