Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Applied Materials (AMAT) Reflexion LK Oxide

Asset ID: 41511

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Applied Materials (AMAT)

Reflexion LK Oxide

Dielectric CMP

CMP Equipment

Equipment details:

Date of Manufacture: 2010

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: 11/12/2021


Process: CELLOX


Tool config is based on original PO, please verify tool details at tool inspection


Base System

Reflexion LK: 4 head, 3 platen polishing system. Dry in Dry out.

Polisher Skins: Dark P1, P2, P3, and P4: 4910 compliant.

Gap Wash: 120 degree nozzles

Load Cup Wafer Exchanger: Enhanced counter balance springs

Nova 3090 Ready: Nova 3090next

Monitor 1 Location: Cart

Monitor 2 Location: Ergo Arm type

Light Tower: Factory Interface and Polisher Sides


Software

LK Software: lp3B4.9_118

Factory Interface: fb4.9_14 Beta

ISRM / RTPC: isB3.3_28

RTPC: N/A

Interface "A": N/A

Nova 3090: v4.5R6b69

Wafer to Wafer iAPC: N/A

Within Wafer iAPC: B3.0 Beta


Factory Interface

WIP Delivery Type: N/A

FOUP: N/A

OHT Light Curtain: N/A

E84 PI O Sensors and Cables: N/A

E99 Carrier ID: N/A

Docked E99 Reading Capability: N/A

Docking Flange Shield: N/A

Frame Configuration: N/A

Load Ports: N/A

Load Port Operator Interface: N/A

Load Port Types: N/A

Operator Access Switch: N/A


Platen 1

Platen Type: STANDARD (<= 200 RPM)

Endpoint: Full Scan Optical ISRM

Endpoint: Motor Torque

High Pressure Rinse Flow Meter: 1350-00195(4.6 l/min) 

Rinse Arms: High Pressure/Flow

Flow Meter: 50-500 ml/min

Temperature Control: Platen Cooling Water


Platen 2

Platen Type: STANDARD (<= 200 RPM)

Endpoint: Full Scan Optical ISRM

Endpoint: Motor Torque

High Pressure Rinse Flow Meter: 1350-00195(4.6 l/min)

Rinse Arms: High Pressure/Flow

Flow Meter: 50-500 ml/min

Temperature Control: Platen Cooling Water


Platen 3

Platen Type: STANDARD (<= 200 RPM)

Endpoint: Full Scan Optical ISRM

Endpoint: Motor Torque

High Pressure Rinse Flow Meter: 1350-00195(4.6 l/min) 

Rinse Arms: High Pressure/Flow

Flow Meter: 50-500 ml/min

Temperature Control: Platen Cooling Water


Polisher

Polisher Technology: SLURRY AND PAD

Polishing Head: CONTOUR GEN III (0.5 TO 5.0 PSI)

Cross Break: N/A

Pad Wafer Loss Sensor: DARK PAD SENSOR

InterPlaten Clean: No

ISRM Laser Key Switch: N/A

Slurry Delivery System: 50-500 ml/min CLC 3

Head 1 Power Cable: 0150-16277 CABLE ASSY, HR1, DRIVER-MOTOR POWER, REF

Head 2 Power Cable: 0150-16278 CABLE ASSY, HR2, DRIVER-MOTOR POWER, REF

Head 3 Power Cable: 0150-16279 CABLE ASSY, HR3, DRIVER-MOTOR POWER, REF

Head 4 Power Cable: 0150-16280 CABLE ASSY, HR4, DRIVER-MOTOR POWER, REF

Head 1 Encoder Cable: 0150-16281 CABLE ASSY, 300MM, HR1, DRIVER-RESOLVER

Head 2 Encoder Cable: 0150-16282 CABLE ASSY, 300MM, HR2, DRIVER-RESOLVER

Head 3 Encoder Cable: 0150-16283 CABLE ASSY, 300MM, HR3, DRIVER-RESOLVER

Head 4 Encoder Cable: 0150-16284 CABLE ASSY, 300MM, HR4, DRIVER-RESOLVER

SMC UPA: SMC UPA

SMC UPA: SMC UPA


Cleaner Meg

MEGASONICS: N/A

Transducer: N/A

Chemical 1: CBrush LDM Type: TwoChemInLineMixed

Chemical 1: CLC 1250 ml/min


Brush Box 1

Brush LDM Type: TwoChemInLineMixed

Chemical 1: CLC 1250 ml/min

Brush Box Level Spacer: N/A

Brush Box Shaft: N/A

Toe In: N/A

Slow drain: N/A


Brush Box 2

Brush LDM Type: TwoChemInLineMixed

Chemical 1: 0-1250ml/min

Brush Box Level Spacer: N/A

Brush Box Shaft: N/A

Toe In: N/A

Slow drain: N/A


Dryer Module

Dryer Type: VAPOR DRYER

Recovery Module: N/A

Output Station Dampner: Cap is Delrin and shaft is Stainless


Damage/Missing parts list

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales





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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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