Macquarie Semiconductor and Technology on behalf of Macquarie Semiconductor and Technology Inc. (MSTI)
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Date of Manufacture:
Currently Configured for: 200mm
Current Equipment Status: Available
Location of Equipment: Austin, United States
Available date: Currently Available
Test wafer clean & Production BOE Etch in Tank B
Software: MCS 1.1-75
Bath A: Good HF & QDR baths
Bath B: Good BOE & QDR baths
Bath C: Good PIR & QDR baths
Bath B Module (BOE & QDR) has a Auto Transfer System Upgrade to make tank SECS/GEM Capable. The upgrade includes a Windows 8 touchscreen interface to contol the tanks.
Teflon Cassette
Bulk Chemical Fill
Robot Type: SCP
Pumps: 2 IWAKI MD-100LFY pumps
Chillers: 2 NesLab CFT-75 Chillers. One of them is unplugged, condition unknown.
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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