Tokyo Electron Ltd. (TEL) NS 300

Equipment details:

Date of Manufacture: 2006

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan City, Taiwan

Available date: Currently Available

Process: SCRUB

Tool config is based on original PO, please verify tool details at tool inspection

Base System

Wafer Size: Comply with SEMI M1.15 300mm

Material: Silicon

Utility Outlet: Vertical downward

Chemical: None

Carrier Station Block

Carrier Stage Height: 900 mm (Comply with SEMI E15.1)

Wafer Transport Method: Robotics transport method (X, Y, Z, Theta)

Sensor Placement Sensor: Monitoring carrier to be set correctly.

Presence Sensor: Monitoring presence/absence of carrier on load port.

Mapping Sensor: Checking wafers position in carrier.

Wafer Out Sensor: Detecting wafers out from carrier.

Wafer Sensor: Detecting presence/absence of wafer on fork and also wafers out from fork.

Load Port Specifications: BOLTS/Light (Comply with SEMI E92)

Loader: FOUP-capable

Loadport Lockout Pin (SEMI E1.9): FEOL

Loadport Indicator: LED for displaying conditions installed for each load port. (Comply with customer request about Color/Location.)

Operator Access Switch: Operator access switch installed for each load port.

FOUP Type: 25 Wafers

Kinematic Coupling Pin (SEMI E57): TEL standard specification.

Independent Clamp: Carrier Fixing at Undock Position

Keyboard / Trackball: None

Fan Filter Unit (FFU): Fan filter unit is installed.

AMHS: OHT

OHT Type: SHINKO Electric (ASYST SHINKO)

SEMI E84 Photo I/O Sensor: TEL provides connection ports for Photo I/O Sensor on the top of CSB. Customer provides Photo I/O Sensor.

ES Switch Terminal Block: Refer to Customer Special Specifications

Curtain Sensor: None

Carrier ID Reader: Capable of Carrier ID Reader

Preparation of ID Reader: Refer to Customer Special Specifications

Scrubber Process Station

Mechanical Chuck

*Wafer holdong method : 6 pins edge contact method

*Wafer fixing method : 3 points grip method

*Wafer sensor : Transmission sensor detects a wafer on the chuck and checks if the wafer is held horizontally.

*Backside liquid contact prevention : N2 purge on back side.

Rotation Speed: CH2-1,CH2-2 0, 10 to 3,000 rpm (1 rpm Increment) , CH2-3,CH2-4 0, 10 to 4,000 rpm (1 rpm Increment) 

Acceleration: 100 to 1,000 rpm (100 rpm/sec Increment)

Dual Band Monitoring for Rotation Rate:

Double Monitoring Function for Rotation Rate (Set in Recipe)

*Alarm rpm Bandwidth (Alarm Only) and Stop rpm Bandwidth (Station Process Stop)

*Alarm/Stop rpm Setting Range : +/- 0 to 1,000 rpm "

Process Recipes: 1000 Recipes (Total of spin stations)

Recipe Steps: 100 Steps

Process Time Setting: 0 to 999.9 sec/step (0.1 sec Increment)

Arm1: Brush (Automatic Brush Pressure Controller Function)

Arm2: Spray

Brush Type: PVA + PP

Rotation Speed: In process: 100rpm, Standby: 70rpm ,Spin direction control: None

Spray Nozzle Type: AS? (Atomized Spray ?)

Flow Ranges (N2): 20 ? 100 L/min(nor) (Recipe Control by MFC)

Basic Setting (D.I.W.): 0.2 L/min

Back Rinse Nozzle: None

Side Rinse Nozzle: 2 Nozzles

D.I.W. Retention Prevention: Slow leak in each nozzle standby

D.I.W. Filter: ABUZ0LEM1(0.05?m), Entegris

Rinse Nozzle Purge Method: Slow Leak Method

ULPA Filter: Installed onto the outlet air comes out.

AC POWER BOX

Customer Power Supply Voltage: 208V

Type of Terminal for Main Breaker: round shape terminal

Cable Outlet (Primary-side): Rear

Cable Outlet (Secondary-side): Rear

Alarm Lamp

ALarm Lamp/Location: Present (1 piece: Location - Upper part of Carrier Station)

Lamp Type 1st one (From the top): Red

Lamp Type 2st one (From the top): Blue

Lamp Type 3st one (From the top): yellow

Lamp Type 4st one (From the top): Green

SoftWare

Online: Present

Online Communication Method: HSMS

Option

CCD Camera: Present

Spinner Internal Lighting: Present

Drain: Direct Drain

Exhaust Monitor: Digital Manometer (0 ? 500 Pa)

Damage/Missing parts list

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales