Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
Date of Manufacture:
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: Currently Available
Tool config is based on original PO, please verify tool details at tool inspection
Tool Model: NS300
Process: SCRUB_DS
Software Version: 3.04.082S
System Power Rating: 208AC 3-phase
Loading Configuration: 4 load ports
unit 2-1 machinery chuck: Process Modules, N2 , H2O
unit 2-2 machinery chuck: Process Modules, N2 , H2O
unit 2-3 VAC CHUCK: Process Modules, N2 , H2O
unit 2-4 VAC CHUCK: Process Modules, N2 , H2O
e-flow: resistivity, CO2 , H2O
Process Modules wafer clean system
Loadport: FOUP load/unload system
CRA transfer: wafer transfer system
PRA transfer: wafer transfer system
e-flow: DIW resistivity mixing system
AC power box
Damage/Missing parts list
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sales
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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