Macquarie Equipment Trading on behalf of Macquarie (Asia) Pte Ltd. Taiwan Branch

Kokusai Electric Co., Ltd Quixace II Doped Poly

Asset ID: 30188

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Kokusai Electric Co., Ltd

Quixace II Doped Poly

Vertical Furnace

Furnaces/Diffusion Systems

Equipment details:

Date of Manufacture: 2006

Currently Configured for: 300mm

Current Equipment Status: Available

Location of Equipment: Taoyuan City, Taiwan

Available date: Currently Available

Tool is in HK Schenker warehouse.


Process: POLY

From original tool PO, please inspect to verify

3-1 Furnace Unit
1. Cartridge Heater D4EX28804 1
2. T/C for Heater Control D4EX24431 5
3. T/C for Over temperature Protection D4EX15442 5
4. L type T/C for Cascade Control D4EX26037 1
5. 5Point T/C for Profile Control D4EX26038 1 OPTION
6. 1Point T/C for Profile Control D4EX29533 1 OPTION
7. Thyristor Unit for Control SKKT106L5Z2WHDK 1 Water cooling type
8. Heat Exchanger 1
9. Diffuser D4CX32625 1 Material : Ni

3-2 Clean Unit
1. Clean Module Unit BV-R15TU1G7N 1 Wafer transfer area (Z axis side)
2. Clean Module Unit FU37050KE 1 Rotation cassette Storage (Upper)
3. Clean Module Unit FU37096KE 1 Rotation cassette Storage (Lower)
4. Chemical Filter CBM3-C-1099600CF068 1 for wafer transfer area
5. Chemical Filter F-6000-053-0001 1 Intake for wafer transfer area

3-3 Controllers
1. Main / Operation Controller CX3010 1
2. Operation Controller CX3002P 1 ※1
3. DDC Temperature Controller CQ1700 1
4. MFC / Pressure Controller CX3202 1
5. Gate Drive Unit DN-150V-T5 1
6. Mechanism Controller Unit Robo5000 1
7. Valve / Interlock Control Unit CS1 1 Made By OMRON
8. Signal Tower (Front) WEP-402-RCGB 1 Red, White, Green, Blue
9. Signal Tower (Rear) MES-402A-RCGB 1 Red, White, Green, Blue
10. Relay chassis ----- 1
11. Gas Pattern Panel D4EX31991 2 Front, Rear
12. LON Adapter Control Unit CX2403 3 For CQ1700, Robo5000, AUX I/O
13. Uninterruptible power supply DBK05D-01A 1 For CX3010 Hard Disc

3-4 Drive Mechanisms
1. I/O Shutter ----- 1
2. AGV/PGV Stage ----- 1
3. FOUP Loader ----- 1
4. Rotation FOUP Storage ----- 1 FOUP receipt number : 16
5. FOUP Opener ----- 1
6. Wafer Detection ----- 1 25 in one lot.
7. Wafer Transfer ----- 1 Lift Transfer
8. Variable Pitch Wafer Converter ----- 1
9. Boat Elevator ----- 1
10. Boat Rotation ----- 1 OPTION
11. Notch Aligner ----- 1 OPTION

3-5 Quartz ware
Tweezer D2CN95780 5

3-6 Gas System
1. Gas Unit ----- 1 N2, SiH4, 1%PH3/Ar 1%O2/Ar, ClF3 Made by Fujikin
2. Mass Flow Controller SEC-Z500 series 1 Made by STEC

3-7 Exhaust System
?. Dry Pump/Booster Pump IH1800SC (BOC EDWARDS)
1 Supplied by Customer
2. Diaphragm Sensor (1000 Torr) 623A13TBE 1 Made by MKS
3. Diaphragm Sensor (10 Torr) 626A11TBE 1 Made by MKS
4. Differential Diaphragm Sensor (100 Torr) 223BD-00100 1 Made by MKS
5. Pirani Sensor PSG050 (Sensor) 1 Made by INFICON PSG051 (Sensor) 2 Made
by INFICON VGC-012 (Controller) 2 Made by INFICON
6. APC Valve VEC-S8-X0301 1 Made by CKD
7. APC Controller VEC-CA8-X0301 1 Made by CKD
8. Exhaust Piping ----- 1
9. Exhaust Dilution Line ----- 1
10. Reactor Tube Press Leak Line ----- 1
11. ATM Sensor PA830-102G-VCR 2 Made by Copal
12. ATM Gauge PZ200 2 Made by Copal
13. ATM Sensor (Double O-ring) PA830-102V-VCR 1 Made by Copal
14. ATM Gauge (Double O-ring) PZ200 1 Made by Copal

3-8 Load Lock Chamber
1. Furnace port ----- 1
2. Load Lock Chamber ----- 1
3. Gas Inlet ----- 1
4. Door Valve ----- 1
5. Furnace Port Gate Valve ----- 1
6. Gas Control For N2 Purge ----- 1
7. Exhaust Piping ----- 1

3-9 Special specification
3-9-1 Safety
1. Water leak detector (Detector) K7L-AT50 2 Made by OMRON
2. Water leak detector (Sensor) F03-16PE 3 Made by OMRON
3. O2 Detector DTF-201 1 Made by Enegy Support
4. Smoke Detector (Reception) CPC-2 1 Made by Nittan
5. Smoke Detector OIB 2 Made by Nittan
6. Light Curtain System SL-C32H 1 Made by KEYENCE SL-C20H 1 Made by
KEYENCE

3-9-2 Furnace
1. Bar Code Reader (Sensor) BL-601HASO(7099) 2 Made by KEYENCE
2. Bar Code Reader (Power) BL-U2 2 Made by KEYENCE

3-9-3 Other
1. Pressure Sensor E8Y-AR2Y-5 5 Made by OMRON
2. Gas Pressure Sensor HYPSMV-ND420 (MPA) 6 Made by TEMTECH
3. Cooling Water Flux Meter KSL-5L-24V 5 Made by REGAL JOINT
4. Cooling Water Flux Meter KSL-30L-24V 1 Made by REGAL JOINT
5. Cooling Water Pressure Gauge PA-858-103G-R2 1 Made by COPAL
6. Cooling Water Flow Meater DFM2-1000 1 Made by PURERON JAPAN
7. Cooling Water Flow Switch DFS3-2000 1 Made by PURERON JAPAN

4. SPECIFICATIONS
4-1 Resistance Heating Cartridge Heater
1) Number of control zone : 5 zones
2) Effective heater inner diameter :φ470mm
3) Heater element diameter : t1mm approx
4) Heater element material : KANTHAL APM
5) Heater length : 1445.5mm
6) Maximum heating temperature range : 1050℃ (in Furnace)
7) Flat zone length : 800mm (±2.5℃ at 400℃)
8) Maximum Power Consumption :≦90kW
9) Power consumption in stable condition :≦10kW (at 600℃)

4-2 Clean Unit
1) Dust collection ratio : ≧99.9999% (> 0.1μm)
2) Filter Materials : PTFE
3) Check method : Anhydrous silica method
4-3 Controllers
5-3-1 Main / Operation Controller (CX3010)
(1) Main Control
(a) Hardware
- CPU : PentiumⅢ (850MHz)
- Memory : 256Mbyte DRAM ,160kbyte ROM BIOS
- HDD : 20G byte (2.5 inch), RAID1 (Mirror Disk)
- FDD : 3.5 inch (1.44Mbyte / 720kbyte)

(b) Software
? Recipe
- Process recipe : 100 Files, 100 steps/recipe
- System recipe : 100 Files, 20 steps/recipe, 20 recipes/File
- Process parameter : 20
? Interlock
- Alert function : Temperature, Pressure, Gas flow setting can be Hi /
Low (Buzzer Processing)
- Alarm function : Temperature, Pressure, Gas flow setting can be Hi /
Low (Alarm Table Processing)

? Error Information
- Product information : 200 Record / File Manual backup : 10 Files/HDD
- Alarm information : 200 Record / File Auto backup : 500 Files/HDD (Only
20G byte Type)
- Maintenance information : 10 types
- Main Alarm ingormation : 200 Record / File Auto backup : 500 Files/HDD
(Only 20G byte Type)
- Trace logging : Temperature, Gas flow, Pressure
For each 1500 points graph and numeric data

(2) Main operation
- Display : 10.4 inch TFT color LCD, 256 Colors
- Resolution : 640×480 dot
- Operation key : Touch panel
- Back light control : Auto back light off

4-3-2 Temperature Controller (CQ1700)
(1) Temperature Control
- Temperature setting range : 200~1200℃
- Temperature detection : R type thermocouples
- Setting resolution : 0.1℃
- Control accuracy : ≦±0.5℃ (at 400~1200℃)
: ≦±1.0℃ (at 200~400℃)
- Output : Pulse output for Thyristor gate control
- Output control : Power proportional phase control
- Input for control : 5 points
- Calibration Input : 5 points
- Control period : 0.5 sec/loop
- Control mode : Programmable P.I.D.
P (proportional) : 0.1~200%
I (Integral) : 0.01~100.00 min
D (Differential) : 0.00~10.00 min
- Zero point Compensation : IC Temperature Sensor

(2) Over Temperature Protect
- Input for Control : 5 points
- Control Period : 0.5 sec/loop
- Temperature detection : R Type thermocouples
- Temperature Setting Range : 400~1350℃

4-3-3 MFC / Pressure Controller (CX3202)
(1) MFC Control
- Object of control : Mass Flow Controller
- Control Mode : Direct control, Ramping control, Soft start control
- No. of channel : Max. 16Ch.
- Input range for full scale : 0~99.999SLM
- Input range : 0~F.S.
- Resolution : 1/32768 F.S.R.
- Control accuracy :±2 % of full scale
- Control range : 2~100 % of full scale
- Ramping rate : 0.001~99.999SLM
- Soft start setting : Max. 16 pattern
- Soft start time : 0~99 sec.
- Error detectable deviation flow : 0~99 sec. (1 point per channel)
- Error detectable time : 0~255 sec.
(2) Pressure Control
- Controlled object : Conductance valve for Pressure control
- Input : Diaphragm Sensor
- Accuracy : ±5.0% of Set Point (at approx.50Pa)

4-3-4 Valve / Interlock Control (CS1)
(1) Valve Control
- Object of control : Solenoid valve
- Output voltage : DC 24V
- No. of channel : Max. 64Ch. (Max. 56ch when hard gas pattern panel is
used)
(2) Interlock Control
- No. of channel : Max. 64Ch.

Tool Damage/Missing Parts: 
Please inspect tool to reconfirm
Dry pumps not included
 

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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