Macquarie Semiconductor and Technology on behalf of Macquarie (Asia) Pte Ltd. - UMC
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Date of Manufacture: 2004 March
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Singapore, Singapore
Available date: Currently Available
| EQUIPMENT ID | TINOX-01 | |||
| AUDIT DATE | JAN. 13, 2022 | |||
| SERIAL NUMBER | P000002Z5076 | |||
| ORIGINAL SHIP DATE | SEPT. 2005 | |||
| SOFTWARE VERSION | TELFORMULA-2 VERSION 1.41 REV. R009 (F007FF-00000) SOFTWARE NOT INCLUDED | |||
| SYSTEM CONTROLLER | TEL WAVES | |||
| DATE OF LAST PM | AUG. 2021 | |||
| SYSTEM ONLINE | YES | |||
| CAN PRODUCE WAFERS AS IS | YES |  | ||
| KNOWN FIELD MODS | YES | |||
| ALL CABLES PRESENT | YES | |||
| TEL MODEL NUMBER | FORMULA REV 0 | |||
| TEL PROCESS NAME | THERMAL | |||
| CUSTOMER PROCESS NAME | THINOX | |||
| TEMP RANGE | 0-1000C | |||
| HEATER ELEMENT MODEL | MID-TEMP VCM-50-003L | |||
| PROCESS CONDITION | LP | |||
| FORCE AIR COOLING | YES | |||
| SIDE MAINTENANCE | YES | |||
| N2 BOAT SHOWER WAFER COOLING | YES | |||
| FURNACE TEMP CONTROLLER | YES | |||
| AUTO SHUTTER | YES | |||
| WAFER TYPE | 300MM SI SEMI STD NOTCH | |||
| CARRIER TYPE | ASYST TYPE G4 | |||
| CARRIER STAGE CAPACITY | 4 | |||
| WTU TYPE | TEL | |||
| QTY OF PRODUCTION WAFERS | 50 | |||
| BOAT OPERATION | SINGLE | |||
| MFC OEM | HORIBA | |||
| PRESSURE TRANSDUCER | NAGANO KEIKI ZT15-Z20-17110(-0.1-0.5MPA) | |||
| GAS | MFC MODEL | LINE | MFC SIZE | |
| N2 | F750BMOA1-800A-UC | NX | 50SLM | |
| N2 | F740BMOA1-800A-UC | N1 | 5SLM | |
| N2 | F730MOA1-800A-UC | N2 | 1SLM | |
| N2 | F730MOA1-800A-UC | N3 | 1SLM | |
| H2 | F730MCA1-800A-UC | H1 | 1SLM | |
| H2 | F740MCA1-800A-UC | H2 | 5SLM | |
| H2 | F730MCA1-800A-UC | H3 | 2SLM | |
| H2 | F730MCA1-800A-UC | H4 | 2SLM | |
| O2 | F730MOA1-800A-UC | O1 | 1SLM | |
| O2 | F740BMOA1-800A-UC | O2 | 5SLM | |
| O2 | F740BMOA1-800A-UC | O4 | 5SLM | |
| O2 | F730MOA1-800A | O3 | 50SCCM | |
| NO | F730MOA1-800A-UC | XN1 | 2SLM | |
| N2O | F740BMOA1-800A-UC | J1 | 10SLM | |
| MID-TEMP HEATER | S00166690 | ALLOY | ||
| VACUUM PUMP INCLUDED | YES | |||
| OEM | EDWARDS | |||
| MODEL | IH1000 | |||
| N2 BALLAST PRESSURE CONTROL | NO | |||
| VACUUM GAGES | ||||
| 2T | 1 | |||
| 10T | 1 | |||
| 100T | N | |||
| 1000T | 1 | |||
| LOW VAUUM VALVE | YES | |||
| MAIN VALVE | YES | |||
| ELCTRICAL REQUIREMENTS | 400V | |||
| OPERATING SOFTWARE | WAVES | |||
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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