Macquarie Semiconductor and Technology on behalf of Macquarie (Asia) Pte Ltd. - UMC
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Date of Manufacture: 2004 Feb
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Singapore, Singapore
Available date: Currently Available
General System Info
Equipment ID: CUALLOY-02
Date of Audit: 13/01/2022
Serial Number: P00000315020
Software Version: TELFORMULA-2 Version 1.41 Rev.R008 [F001FF-00000]
System Controller: TEL Waves
Date of Last PM: 2020.5
Is System On-Line?: No
Off-Line Date (if applicable): 2020.5
SECS/GEM: No
OEM Audit Available?: No
Decontamination Report Exists?: No
Can Produce Wafers AS-IS?: No
Any Known Field Modifications?: No
All Cables Present?: No
Platform Type: TELFORMULA
System
TEL Model Number: TEL FORMULA Rev.0
TEL Process Name: Anneal
Customer Process Name: CUALLOY
Temperature Range: 0~450 C
General Configuration
Heater Element Model: Low- Temp VCL-40-001L
Process Condition: LP
N2 Load Lock: Yes
Loading Area Light: No
Force Air Cooling System: Yes
Side Maintenance: Yes
O2 Density Control: Yes
N2 Boat Shower Wafer Cooling: Yes
Furnace Temperature Controller: Yes
Boat Rotation: No
Auto Shutter: Yes
CD-ROM Manuals: No
Wafer Handling
Wafer Type: 300mm-Si SEMI STD-Notch (STD)
Carrier Type: Maker: Asyst Type: G-4
Carrier Stage Capacity: 4
WTU Type: TEL
Qty of Production Wafers: 50
Boat Operation: Single Boat
Gas Panel Configuration
MFC Make: Horiba
Pressure Transducer Make/Model: NAGANO KEIKI ZT15-Z20-17110(-0.1-0.5MPA)
Vaporizer Make/Model: NA
Ozonizer Make/Model: NA
Vacuum System
Vacuum Pump Included: Yes
Make: EDWARDS
Model: IH80
N2 Ballast Pressure Control: No
Low Vacuum Valve: Yes
Trap: No
Main Valve: Yes
Facilities
Electrical Requirements: 400V
User Interface: TEL
Operation Panel: TEL
Indicator Type: TEL
Operation Software Type: TEL Waves
Gas Leak Detector Type: TEL
TEL Process Names: Anneal, TEOS, HTO, Nitride, Poly, Doped Poly, LPRO
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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