Kokusai Quixace Ultimate ALD SiN

Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

DIFFUSION 11-3HIKE_QAU_ALDNIT_01 HIKE QUIXAULT ALDSIN

Tool config is based on original PO, please verify tool details at tool inspection

General Specification

Model: Quixace Ultimate

Wafer Size: 300mm

Layout Drawing: D5CS29487

Footprint Drawing: D2CP18963

Facility Drawing: D5CP10900-2/2

Tool cable drawing: D1EF62988

Process: ALD Nitride

Gas Pattern Drawing: D7CS29874

Supporting Remote Units (Reference ONLY)

Dry Pump: iXH3030T

Abatement System Type: TBD

Abatement System Provided By: Customer

Abatement System Maker/Model: TCS

HardWare Configuration, Options

Cartridge heater: Cartridge heater RHC-2= D4EX31754

TC, Heater Control: TC for heater control

TC, Over-temperature: TC for over-temperature protection

5-P T/C, Cascade: 5-P T/C for Cascade Control

1-P T/C, Profile: 1-P T/C for Profile Control (Please refer Maintenance Items section)

Thyristor: Thyristor Unit for Heater Control

Clean Module Unit1: Clean Module Unit

Clean Module Unit2: Clean Module Unit

Clean Module Unit3: Clean Module Unit

Clean Module Unit4: Clean Module Unit

Rapid Cooling Unit 

Controller 

I/O SHUTTER: I/O SHUTTER

STAGE: AGV/PGV/OHT STAGE

FOUP LOADER: FOUP LOADER

FOUP STORAGE: ROTATION FOUP STORAGE

FOUP OPENER: FOUP OPENER

WAFER DETECTION: WAFER DETECTION

WAFER TRANSFER: WAFER TRANSFER

WAFER PITCH CONVERTER: VARIABLE WAFER PITCH CONVERTER

BOAT ELEVATOR: BOAT ELEVATOR

BOAT CHANGER: BOAT CHANGER

FURNACE PORT SHUTTER: FURNACE PORT SHUTTER

BOAT ROTATION: BOAT ROTATION 

AWTC Port: D5CP18377

FLANGE-Upper

FLANGE-Lower

HardWare Configuration, Process Kit1

Kit 1 Selection: This kit is all quartz design WITHOUT injection

Boat:boat 

Reactor Tube : Quartz Outer Tube

Inner Tube: N/A

Adiabatic Plate: SiC Adiabatic Plate

Nozzle: Gas Nozzle

DIFFERENTIATING PIN: DIFFERENTIATING PIN

Seal Cap Plate: Quartz Seal Cap Plate

Boat Base: Quartz Boat Fixing Ring

Quartz Shutter Plate: Quartz Shutter Plate

HardWare Configuration, Process Kit2

Kit 2 Selection: This kit is all quartz design WITH injection

HardWare Configuration, Gas System

Gas Unit (IGS): D7VX49878

Tape Heater, Gas Pipe1: 

Mass Flow Controller: SEC-Z500 series

Pressure Gauge W/SWITCH: PG/PS 1~7

Regulator: MP1,5

Regulator: MP2~4,7

Filter: F1,5,6

Filter: F2~4,7~10,12~14

Gasket filter: GF1~7

Hand valve: HV1~5,7

Hand valve: HV6

Hand valve: HV10

Needle Valve: NV1~3

Check valve: CV1,5

Check valve: CV2,3

Check valve: CV4

Air Valve: AV1,2,4,5

Air Valve: AV3,6,10,24

"Air Valve(2-3B): AV7-8,9-11,12-13,14-15,16-17,18-19,25-26,27-28

"

Air Valve(2-3B): AV20-21,22-23

HardWare Configuration, Gas System MFC

MASS Flow Controller: MFC1, N2 ,3Slm

MASS Flow Controller: MFC2, N2 ,10Slm

MASS Flow Controller: MFC3,4 , N2 ,10Slm

MASS Flow Controller: MFC5, SiH2Cl2 ,3Slm

MASS Flow Controller: MFC6.7,NH3 ,10Slm

MASS Flow Controller: MFC8, 20%F2/N2 ,20Slm

MASS Flow Controller: MFC9 , N2 ,1Slm

MASS Flow Controller: MFC10 , N2 ,5Slm

HardWare Configuration, Exhaust System

Vacuum Sensor : 1000Torr

Vacuum Sensor : 10Torr

Vacuum Sensor : 10Torr

ATM pressure sensor: PA830 102G-VCR

Main Valve: Controller

Main Valve: Valve

Exhaust Piping: D5CS11556

Exhaust Dilution Line: D5CS11558

Reactor Tube Press Leak Line: D5CS11557

"Background line: D5CS01761

NH3,DCS,%F2/N2,Gas1"

Tape Heater, Exhaust Line: N/A

Jacket Heater, Exhaust Pipe: Jacket Heater, Exhaust Pipe 

Seal cap heater: Seal cap heater1

Seal cap heater: Seal cap heater2

Inlet Flange Tube Heater: D7EX40413

Inlet Flange Heater: D7EX47555

Inlet port heater: D7EX47556

Cold Trap

HardWare Configuration, Facility Interface

POWER: See Layout drawing D5CS00118-2/2, BOTTOM

GASES: See Layout drawing D5CS00118-2/2, BOTTOM

Exhaust (to duct/House): See Layout drawing D5CS00118-2/2, BOTTOM

Exhaust (to Pump): See Layout drawing D5CS00118-2/2, BOTTOM

Process Cooling Water: See Layout drawing D5CS00118-2/2, BOTTOM

UPS Requirement: Yes. Electrical connection point to main controller to tie facility supplied UPS

HardWare Configuration, LoadLock Requirements

O2 Monitor: O2 Monitor / Detector

FOUP Opener, System: FOUP Opener N2 Purge System

Load Area MFC: Loading Area MFC

Load Area N2 Purge: Loading Area N2 Purge Line

FOUP Opener, Line: FOUP Opener N2 Purge Line

Wafer Cooling N2: Wafer Cooling N2 Purge Line= N/A

Furnace Port N2: Furnace Port N2 Purge Line

Radiator: Radiator (Heat exchanger)

Filter, carbon/chemical1: Filters (carbon/chemical filter)

Filter, carbon/chemical2: Filters (carbon/chemical filter)

Filter, carbon/chemical3: Filters (ULPA filter)

Controller Interface, System

Main Operation Controller: CX5000

Main Operation Controller: CX5000

EDA Controller: SW: 01.24.00

Controller Interface, Factory

Interface-A: YES

Controller Interface, System SubComponents

Sub Operation Controller: No SW Rev

DDC Temperature Controller: SW Rev 06.03.00

Process Module Controller: SW Rev 01.12.01

MFC/Pressure Controller: No SW Rev

Gate Drive Unit: No SW Rev

Wafer Handling Controller: SW Rev 02.12.00

Valve/Interlock Control Unit: No SW Rev

Signal Tower (Front): No SW Rev

Signal Tower (Rear): No SW Rev

Transformer (Heater): No SW Rev

Transformer (Controller): No SW Rev

Transformer (Clean Unit): No SW Rev

Safety/Interlock Control Unit: N/A

Controller Interface, Factory

FOUP I/O: QTY=2

FOUP ID READER: RFID on both ports

WAFER MAPPING SENSOR: F3M-S1225

FOUP PRESENCE SENSOR: E3T-ST11

AMHS: N/A

MMHS: N/A

SECS/GEM COMMUNICATION: SW Rev 06.01.02

Damage/Missing parts list

Please inspect tool to reconfirm

System HDD, Dry pumps and customer provided items not included on sales