Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan City, Taiwan

Available date: Currently Available

Process: PEALDOX

Tool config is based on original PO, please verify tool details at tool inspection

Safety Specification: SEMI S2-0709

Heater Model: None

Process Condition: LP

Process Temperature (C): Room Temp

ART Control: None

N2 Load Lock: Yes

Wafer Type: 300mm-Si SEMI STD-Notch

Qty. of Production Wafers: 100wfr

Boat Operation: 1 Boat Type

Software Version (WAVES): Ver. 6.08

Seismic Isolation Configuration: None

Dewpoint Meter for N2 LL: None

Loading Area Light: White (LED)

RCU Duct Length FNC - RCU: N/A

Ionizer (maker/model): None

Chemical PreFilter-Acid: None

Chemical PreFilter-Alkali: None

Chemical PreFilter-Hydrocarb: Yes

Chemical PreFilter-Location: Side FFU

Side Maintenance: None

O2 Density Control for N2 LL: Yes

"O2 ANALYZER: Maker: NGK, Model: SH-304 STANDARD 

(New CIP item: Remove O2 detector and FIMS sampling function)"

N2 Boat Shower Wafer Cooling: None

Furnace Temperature Controller: None

Carrier Type: FOUP/25slots, SEMI STD

FOUP Maker/Model: Entegris/A300

Carrier Stage Capacity: 18 FOUP

Info Pad A,B: Pin

Info Pad C,D: Pin

Fork Material: Al2O3+PEEK

W/T Type: 1+4 Edge Grip

W/T Type A/T: Yes

Furnace Exhaust Connection Point: Top Connection

Cooling Water Connection Point: None

RCU DUCT Connection Point: N/A

IGS Type: IGS 1.125"W-seal rail-mount

IGS Maker: Fujikin

Tubing Bends: Bend(Less than 90deg.)

IGS Final Filter: Entegris

IGS Regulator: CKD

IGS MFC (Maker/Type): HORIBA STEC/Digital

Water Vapor Generator(WVG): N/A

IGS Press. Transducer: Nagano

Liquid Source Delivery- LTO520: HORIBA STEC / LSC-F550 Series

Auto Refill System- LTO520: IMI: Schumacher CGII-300T 

Auto Refill System Provider: Provided by customer

Refill System Tubing interconn: Provided by customer

Ozone Delivery System: None

Ozone Delivery System Provider: N/A

Incoming Gas Connection Point: Bottom Connection

Exhaust VENT Connection Point: Bottom Connection

Gas Unit Exh Connection Point: Bottom Connection

Vacuum Gage - Press Ctrl: MKS (Hot) Capacitance Manometer

Vacuum Gage - Press Monitor (133kPa): MKS (Hot) Capacitance Manometer

Vacuum Gage - Pump Monitor: MKS (Hot) Capacitance Manometer

Main Valve: CKD-VEC

Pump Maker/Model: Edward 3030T

Pump Provided by: Provided by customer

Abatement System Type: Burning Type

Abatement System (Maker/Model): EBARA / VIPS

Abatement System Provider: Customer

N2 Dilution Unit Provided by: No NDU

Pump Power: Customer's Facility Provided

Pump Control Unit Setting Location: None

Pump-FNC Vacuum Piping Provide: Customer's Facility Provided

Exhaust Pressure Control (AP): N/A

Exhaust Pressure Controller (AP): N/A

Vacuum Exhaust System: 3inch Pipe

Trap: None

Vacuum Pressure Controller: CKD-VEC

Burn Out Unit: None

Condenser: N/A

Quartz Material Requirement: Electric Fused

Quartz Provided by: Costumer

Quartz Vendor Requirement: None

SiC Provided by: N/A

SiC Vendor Requirement: N/A

Process tube: Quartz IRad Tube

Inner T/C: None

Tube Sealing: The sealing material for CAP is Q-ring(DU353)

Soft Backfill Injector: None

Boat Type: 117 slots Ladder (8mm pitch)

Boat Material: Quartz

Boat Rotation: Yes

Pedestal Type: Quartz

Cap Heater: None

Auto Shutter: Shutter Purge Type

Earthquake Countermeasure: Yes

Voltage 3phase: 208VAC

3phase connection type: Star Connection

Voltage Single-phase: None

Single-phase connection type: N/A

Frequency: 60Hz

Wattmeter: None

RF Power Unit / Max Rating Power: 0.5kW (Max)

RF Power Unit / Max Operable Power: 0.5kW (Max)

RF Power Unit / Frequency: 13.56MHz

Control Power UPS provided by: Customer

Control Power UPS type: Fab-wide system

UPS Input/Output Voltage: N/A

Power Cable Input Entrance Loc: Furnace Unit Bottom

FNC - Pump: 30m

FNC -Refill System : 30m

FNC - UPS (if used): N/A

Wiring by: Customer

Conduit/Raceways provided by: Customer

Host Communications: Comply with GJG

Equipment Host I/F Connection: Gas Box TOP HSMS (10Base-T/100Base-TX)

Ingenio: Yes

Group Controller Connection: Yes

OHT Capability: Yes

AGV Capability: None

RGV Capability: None

PGV Capability: None

Load Port Operation: Upper

PIO I/F Location: FNC Top

PIO Provided by: TEL

PIO Maker/Model: Hokuyo / DMS-HB1-Z

Carrier ID Reader Writer Type: RF

CIDRW Lower Load Port: Read

CIDRW Upper Load Port: Read

CIDRW FIMS: Read/Write

CIDRW Maker/Model: Maker:Omron amp unit: V640-HAM11-V3, CID RW Controller: V700-L22

CIDRW Provided by: TEL

EEC (Equipment Engineering Capability): None

"Customized Management Signals: (PT/WATER and blow two item will be added)

1.Valve voltage of MFC is output to Waves and Ingenio

 The object of MFC:NX,NY,N1,N2,N3,N4,O1,XF1,NXF1,GG1

2.The differential pressure of N2 L/L will be asked to get SVID and show in waves."

"Signal Tower Model: Front operation panel top:LOUGWB-24-3 LOUGWB-24-4

Gas box rear:LOULWB-24-3 "

Signal Tower Colors: Red/Blue/Yellow/Green

Signal Tower Location: Front 

Front Operation Panel: Yes

MMI and Gas FlowChart: Gas Box & Front Operation Panel Installed

Indicator Type: TEL provided new indicator type

Operator Switch: Operator Access/White Cover with Orange Light

Pressure Display Unit: MPa/Torr 

Cabinet Exh Pressure Display: Pa

Warning Label: Traditional Chinese/English (English will be first priority where can stick only label)

Furnace (Exh/Box,Gas/Box inclu: Main-Fab

Power Box: N/A

Pump: Sub-Fab

RCU: N/A

Step Up Transformer: N/A

Step Down Transformer: N/A

Ozone Delivery System: N/A

WVG Controller: N/A

Auto-Refill System: Sub-Fab

UPS: None

Gas Leak Detector: YES

Gas Leak Detector Provided By: TEL

Gas Leak Detector Maker: Optional Riken

Gas Detector Power: Tool provided

Detected Gas 1 / Location: HF/Gas box

Detected Gas 2 / Location: LTO520/Gas box

Detected Gas 3 / Location: LTO520/Scavenger exhaust

Detected Gas 4 / Location: N/A

Detected Gas 5 / Location: N/A

Detected Gas 6 / Location: N/A

Detected Gas 7 / Location: N/A

Furnace Detection Port: 2 points (1 pair)

Gas Box Detection Port: 4 points (2 pairs)

Damage/Missing parts list

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales