Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Tokyo Electron Ltd. (TEL) TELFORMULA ALD High-K

Asset ID: 18421

Print spec sheet

Tokyo Electron Ltd. (TEL)

TELFORMULA ALD High-K

Vertical Furnace

Furnaces/Diffusion Systems

Equipment details:

Date of Manufacture: 2015

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: 12/24/2021


2.2- General Specification
Safety Specification - S2-0703 - PartQty1
Heater Model - Mid-Temp. VCM-50-012L - PartQty1
Compatible with Atmoshpheric Process - None - PartQty0
Maximum Operating Temperature (C) - 300 - PartQty1
ART Control - Yes - PartQty1"
N2 Load Lock - Yes - PartQty1"
Wafer Type - 300mm-Si SEMI STD-Notch - PartQty1"
Qty. of Production Wafers - 50 - PartQty1"
Software Version (WAVES) - Ver.2.12 R006 - PartQty1"
Seismic Isolation Configuration - None - PartQty0"

3.1.1- Furnace Spec, Furnace
Dewpoint Meter for N2 LL - None - PartQty0"
Loading Area Light - White (LED) - PartQty1"
RCU Duct Length FNC - RCU - 20m - PartQty0"
Ionizer (maker/model) - None - PartQty0"
Chemical PreFilter-Acid - None - PartQty0"
Chemical PreFilter-Alkali - None - PartQty0"
Chemical PreFilter-Hydrocarbon - Yes - PartQty0"
Chemical PreFilter-Location - FNC Top - PartQty0"
Side Maintenance - None - PartQty0"

3.1.2- Furnace Spec, Wafer/Carrier Handling
Carrier Type - FOUP/25slots, SEMI STD - PartQty1"
FOUP Maker/Model - Entegris / A300 - PartQty1"
Carrier Stage Capacity - 10 - PartQty1"
Info Pad A,B - Pin - PartQty0"
Info Pad C,D - Pin - PartQty0"
Fork Material - Al2O3 - PartQty1"

3.1.3- Furnace Spec, Furnace Facilities
Furnace Exhaust Connection Point - Top Connection - PartQty1"
Cooling Water Connection Point - Bottom Connection - PartQty1"
Electric Fan Exhaust Facility Connection - Not Installed - PartQty0"
Air Intake Point - Top - PartQty1"

3.2.1- Gas Spec,  Gas Distribution System
IGS Type - IGS 1.5""W-Seal rail-mount - PartQty1"
IGS Maker - Fujikin - PartQty1"
Tubing Bends - Bend (Less than 90deg) - PartQty1"
IGS Final Filter - N2 50L line:Entegris(Ni), The other N2 line and Process gas line:PALL(SUS) - PartQty1"
IGS Regulator - CKD - PartQty1"
IGS MFC (Maker/Type) - HORIBA STEC / Digital - PartQty1"
IGS MFC for low flow N2 purge when cleaning - HORIBA STEC / SEC-G111 - PartQty1"
IGS Press. Transducer - Nagano - PartQty1"
Liquid Source Vapor System Maker / Model - For TMA HORIBA STEC / LSC-F530
For ZAC(OCTANE)  STEC / TL-2013 - PartQty1"
Auto-Refill System- TMA - Air Liquid / CANDI - PartQty1 - Model : CALEN - Japan Air Gases"
Auto Refill System- ZAC - Air Liquid / CANDI - PartQty1 - Model : AQUARIUS - Japan Air Gases"
Ozone Delivery System - Toshiba Mitsubishi / OP-500H-RE1 - PartQty1"
Water Vapor Generator (WVG) - None - PartQty0"

3.2.2- Gas Spec,  Gas Facilities
Incoming Gas Connection Point - Bottom Connection - PartQty1"
Gas VENT Connection Point - Bottom Connection - PartQty1"
Exhaust VENT Connection Point - Bottom Connection - PartQty1"
Gas Unit Exh Connection Point - Bottom Connection - PartQty1"

3.3.1- Exhaust Specificationbution
Vacuum Gage - Press Ctrl - MKS (Hot) Capacitance Manometer - PartQty1"
Vacuum Gage - Press Monitor (133kPa) - MKS (Hot) Capacitance Manometer - PartQty1"
Vacuum Gage - Pump Monitor - MKS (Hot) Capacitance Manometer - PartQty1"
Main Valve - CKD-VEC 3"" - PartQty1"
Pump Maker/Model - EDWARDS / iXH1820 - PartQty1"
Abatement System Type - Burning Type - PartQty1"
Abatement System (Maker/Model) - EDWARDS / Atlas-TPU2 - PartQty1"
N2 Dilution Unit Provided by - No NDU - PartQty0"
Pump Control Unit Setting Location - None - PartQty1"

3.3.1- Exhaust Specification
Exhaust Pressure Control (AP) - N/A - PartQty0"
Exhaust Pressure Controller (AP) Maker / Model - N/A - PartQty0"
Exhaust Box - Wide Type (1200mmW) - PartQty1"

3.4.1- Reactor Specification
Quartz Material Requirement - Electric Fused - PartQty0"
Quartz Vendor Requirement - None - PartQty0"
Quartz Stamp - None - PartQty0"
Boat Type - 61 slots Ladder - PartQty0"
Cap Type - Quartz - PartQty1"
Cap Heater - Yes - PartQty1"
Switch Valve for Cap Cooling Water - None - PartQty1"
Cooling Water for Cap Rotation - Yes - PartQty1"
Heat Shield Type - HS Plate - PartQty1"
Heat Shield Plate Provided by - TEL - PartQty0"

3.5.1- Power Specification, Power dist System
Voltage 3phase - 480VAC - 200VAC is Ozonizer power - PartQty1"
3phase connection type - Star Connection - PartQty1"
Voltage Single-phase - 200VAC - 200VAC is Ozonizer power - PartQty0"
Single-phase connection type - N/A - PartQty0"
Frequency - 60Hz - PartQty1"
Wattmeter - None - PartQty0"
Control Power UPS provided by - N/A - OPT: Ordering Fab must verify facility requirements and note any special requirements within the PO. - PartQty1"
Control Power UPS type - N/A - OPT: Ordering Fab must verify facility requirements and note any special requirements within the PO. - PartQty0"
UPS Input/Output Voltage - N/A - OPT: Ordering Fab must verify facility requirements and note any special requirements within the PO. - PartQty0"

3.5.2- Power Specification, Cable Length
Power Cable Input Entrance Loc - Power Box Top - OPT: Ordering Fab must verify facility requirements and note any special requirements within the PO. - PartQty1"
Other power requirement - None - PartQty0"
FNC - Power Box - 30m - OPT: Ordering Fab must verify facility requirements and note any special requirements within the PO. - PartQty1"
FNC - RCU - 30m - OPT: Ordering Fab must verify facility requirements and note any special requirements within the PO. - PartQty1"
Power Box - Pump Unit - 30m - OPT: Ordering Fab must verify facility requirements and note any special requirements within the PO. - PartQty1"
Power Box - Refill System - 30m - OPT: Ordering Fab must verify facility requirements and note any special requirements within the PO. - PartQty1"
Power Box - WVG CTRL Unit (if used) - N/A - PartQty0"
Power Box - Abatement System (if used) - N/A - OPT: Ordering Fab must verify facility requirements and note any special requirements within the PO. - PartQty1"
Gas Detector Box - FNC (if used) - N/A - PartQty0"
Gas Detector Box - Power Box (if used) - N/A - PartQty0"
Option Box - FNC (if used) - N/A - PartQty0"
Option Box - Power Box (if used) - N/A - PartQty0"
Power Box - Ozonizer - 20m - PartQty1"
Ozonizer control rack - Ozonizer - 20m - PartQty1"
Ozonizer control rack - Power Box - 20m - PartQty1"
Ozonizer conrol rack - RCU - 20m - PartQty1"
Ozonizer control rack - Floor Box - 20m - PartQty1"

3.6.1- Interface Specification, Factory Automation System
Host Communications - Comply with GJG - PartQty1"
Equipment Host I/F Connection - Power Box Top HSMS (10Base-T/100Base-TX) - OPT: Ordering Fab to verify  connection point as follows:  QTY=1 is Top connection, QTY=2 is Bottom connection,  Default = 1, and note any special requirements within the PO. - PartQty1"
Ingenio - Yes - OPT: Ordering Fab must specify Ingenio included or not, default is Yes (QTY=1). Set QTY=0 if excluded - PartQty1"
OHT Capability - Yes - PartQty1"
AGV Capability - None - PartQty1"
RGV Capability - None - PartQty0"
PGV Capability - None - PartQty0"
Load Port Operation - Lower + Upper - PartQty1"
PIO I/F Location - FNC Top - PartQty1"

3.6.1- Interface Specification, Factory
PIO Provided by - TEL - PartQty0"
PIO Maker/Model - Hokuyo / DMS-HB1-Z - PartQty0"
Carrier ID Reader Writer Type - RF - PartQty1"
CIDRW Lower L/P - Read - PartQty1"
CIDRW Upper L/P - Read - PartQty1"
CIDRW FIMS - Read/Write - PartQty1"
CIDRW Maker/Model - HOKUYO DMS-HB1-Z series (Head-On) - OPT: Ordering Fab must verify if Write or Read Write. Write only QTY= 1.
Read/Write QTY= 2. 
Default = 1 . Note any special requirements within the PO. - PartQty0"
CIDRW Provided by - TEL - PartQty0"
CIDRW Tag Orientation - Vertical - PartQty0"
EEC (Equipment Engineering Cap - Interface A - OPT: Ordering Fab must specify if FDC is included or not, Include = QTY=1,  Set QTY= 0 if excluded.
Default = 1 - PartQty0"
Customized Management Signals - PT / WATER - PartQty0"

3.6.2- Interface Specification, User Interface
Signal Tower Model - LCE Series - PartQty1"
Signal Tower Colors - RED / BLUE / YELLOW GREEN - OPT: Ordering Fab to verify signal tower as follows:  QTY=1 is Red/Yellow/Green Defualt = 1 and note any special requirements within the PO. - PartQty1"
Signal Tower Location - Front for 10 Stocker (Left) - PartQty1"
Front Operation Panel - Yes - PartQty1"
MMI and Gas FlowChart - Gas Box & Front Operation Panel Installed - PartQty1"
Light Curtain - None - PartQty1"
Indicator Type - Selete - PartQty1"
Operator Switch - Operator Access / White Cover with Orange Light - PartQty1"
Pressure Display Unit - MPa / Torr - PartQty1"
Cabinet Exh Pressure Display - Pa - PartQty1"
Warning Label - Traditional Chinese / English(first priority) - PartQty1"

3.7.1- Other Specification, Unit Location
Furnace (Exh/Box,Gas/Box inclu - Main-Fab - PartQty1"
Power Box - Sub-Fab - PartQty1"
Pump - Sub-Fab - PartQty1"
RCU - Sub-Fab - PartQty0"
Step Up Transformer - N/A - PartQty0"
Step Down Transformer - N/A - PartQty0"
Ozone Delivery System - Sub-Fab - PartQty1"
WVG Controller - N/A - PartQty0"
Auto-Refill System - Sub-Fab - PartQty1"
UPS - None - OPT: Ordering Fab must verify facility requirements and note any special requirements within the PO. - PartQty0"
Gas Detector Box - G/Box and Scaverger- PartQty0"
Other Unit Location - N/A - PartQty0"

3.7.2 -  Other Specification, Gas Leak Detector
Gas Leak Detector - YES - PartQty1"
Gas Leak Detector Provided By - TEL - OPT: Ordering Fab must verify if Supplier is to provide,  if so QTY= 1. If Customer to provide then set QTY=0, Default = 0 note any special requirements within the PO. - PartQty0"
Gas Leak Detector Maker - Maker: Riken
Use gas/Detector type: O3 / GD-K77D-A O3 ZAC / GD-K7D-A (C2H5)2NH OCTANE / GD-K77D-A OCTANE - OPT: Ordering Fab must verify if Supplier is to provide,  if so QTY= 1. If Customer to provide then set QTY=0, Default = 0 note any special requirements within the PO. - PartQty0"
Detected Gas 1 / Location - Detected Gas 1 / Location - Gas box - PartQty1"
Detected Gas 2 / Location - Detected Gas 2 / Location - Gas box - PartQty1"
Detected Gas 3 / Location - Detected Gas 3 / Location - N/A - PartQty0"
Detected Gas 4 / Location - Detected Gas 4 / Location - Gas box - PartQty1"
Detected Gas 5 / Location - Detected Gas 5 / Location - N/A - PartQty0"
Detected Gas 6 / Location - Detected Gas 6 / Location - N/A - PartQty0"
Detected Gas 7 / Location - Detected Gas 7 / Location - N/A - PartQty0"
Gas Box Detection Port - 8 point (4pairs) - OPT: Ordering Fab must verify Port number,
8 Port (4 Pair) = 1, 10 Port (5 Pair ) = 2, Default = 1 note any special requirements within the PO. - PartQty2"

4.0.1- Fixture List, Furnace
TUBE CART - 1 - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - PartQty0"
TEMPLATE - 1 - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - PartQty1"
MAINTENANCE PLATFORM - 0 - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - PartQty0"
HEATRE JACK UP BOLT - 1 - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - PartQty0"

4.0.3 - Fixture List, Gas
CKD VEC MAINTENANCE FIXTURE - 1 - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - PartQty0"
IGS MAINTENANCE JIG - 1 - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - PartQty0"
VACUUM GAUGE (HANDY PIRANI) - 0 - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - PartQty0"

4.04 - Fixture List Reactor
THERMOPROBE T/C - 1 - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - PartQty0"
QUARTS CAP SET FIXTURE - 1 - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - PartQty0"
B/E ROTATION ALIGNMENT FIXTURE - 1 - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - PartQty0"
QUARTZ TABLE CLEANING FIXTURE - 1 - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - PartQty0"
B/E CAP PROTECTION COVER - 1 - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - PartQty0"
BOTTOM T CLEANING FIXTURE - 0 - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - PartQty0"
INJECTOR SET FIXTURE - 1 - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - PartQty0"
CLEARANCE CHECK FIXTURE - 1 - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - PartQty0"

4.04 - Fixture List Interface Tool
HCT - 1 - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - PartQty0"
HANDY MMI - 0 - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - PartQty0"

4.0.4 - Fixture List, Interface Tool
INTERCOM (INTERPHONE) - 0 - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - PartQty0"
COMPACT FLASH MEMORY - 2 - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - PartQty0"
COMPACT FLASH READER - 2 - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - PartQty0"
RF RADIATION METER FIXTURE - 0 - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - PartQty0"

7.0- Attached List
Facility List - Rev.1 - PartQty1"
191. 7.0- Attached List - System layout drawing - 3892-128274-11 - PartQty1 - 3892-128274011"
192. 7.0- Attached List - Electrical System Diagram - Design in progress - PartQty1 - 3892-128213-11"
193. 7.0- Attached List - Cooling Water System Diagram - Design in progress - PartQty1 - 3893-C20822-13"
Conducting (Wire-Way) Work Among Boxes - Design in progress - PartQty1"
195. 7.0- Attached List - Gas System Diagram - 3892-226546-11 - GFC - PartQty1 - 3892-226398-11"
196. 7.0- Attached List - Gas Parts List - 3898-B22513-12 - GPL - PartQty1 - 3898-B22513-12"
Valve Interlock - Design in progress - PartQty1"
Safety Interlock - Rev.1 - PartQty1"
External Input / Output Table - Rev.1 - PartQty1"
Signal Tower Special Sequence - Rev.1 - PartQty1"
Quartzware List - Rev.1 - PartQty1"

7.11.1- Quartz List, Process Fixtur
QUARTZ TUBE - QUARTZ TUBE - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - PartQty1 - 3805-120034-B4"
QUARTZ INJECTOR - QUARTZ INJECTOR - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - PartQty1 - 3805-320109-B1 - L-84-45 (TMA)"
QUARTZ INJECTOR - QUARTZ INJECTOR - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - PartQty1 - 3805-321496-B1 - L-82-748 (ZAC/OCTANE)"
QUARTZ INJECTOR - QUARTZ INJECTOR - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - PartQty1 - 3805-321497-B1 - L-82-748 (O3)"
QUARTZ SOFT BACKFILL - 3805-321488-91 - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - PartQty1 - 3805-320013-11 - L-92-50"
QUARTZ PLUG - 3805-320013-92 - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - PartQty4 - 3805-320072-B1"

7.11.1- Quartz List, Loading Fixtur
QUARTZ BOAT - 3805-120042-91 - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - PartQty1 - 3805-120042-B1"
QUARTZ HOUSING - 3805-120179-91 - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - PartQty1 - 3805-120179-B1"
QUARTZ COVER,SCREW - 3805-320066-91 - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - PartQty2 - 3805-320066-B1"
QUARTZ TABLE - 3805-320165-91 - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - PartQty1 - 3805-320165-B1"
QUARTZ GUIDE - 3805-420016-91 - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - PartQty1 - 3805-420016-B1"
QUARTZ PLUG, PRO T/C - 3805-420027-91 - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - PartQty1 - 3805-420027-B2"
QUARTZ PIN, CTR - 3805-420031-91 - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - PartQty1 - 3805-420031-B2"
QUARTZ PIN, ROT - 3805-420030-91 - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - PartQty1 - 3805-420030-B1"
QUARTZ CAP - 3805-120137-91 - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - PartQty1 - 3805-120137-B2"
QUARTZ PLATE,HEAT SHIELD - 3805-221222-91 - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - PartQty1 - 3805-221222-B1"
QUARTZ PLATE(2) - 3805-320107-91 - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - PartQty1 - 3805-320107-11"
QUARTZ PLUG, TP POWER - 3805-421093-91 - OPT: Ordering Fab must verify Quantity, and capture within the PO if needed - PartQty1 - 3805-421093-B1"

Gas Layout Drawing Parts List
HAND VALVE - NX1,KE11,FB11 - PartQty3 - FDDFL-21-6. 35UGF-APD - FUJIKIN"
HAND VALVE - XZ11 - PartQty1 - FUNDL-21G-6.35UGF-ST-PA - FUJIKIN"
NX1 - PartQty1 - BF-1.5U-DF(1MICRON) 1/4""VCR - NIPPON SEISEN"
FILTER - NX2 - PartQty1 - WG3SS2WW2 - ENTERIS"
FILTER - N12,N22,N32,N42,N62,N82 - PartQty6 - GTMF3201F4A - PALL"
FILTER - XZ14 - PartQty1 - CNF1004USG4 - PALL"
REGULATOR - NX - PartQty1 - PGM-H-60-4-1 - CKD"
REGULATOR - NY - PartQty1 - PGM-50-4-1  - CKD"
PRESSURE TRANSMITTER - NX,NY,N1,XZ4, N5,N7,N8 - PartQty6 - ZT15-Z20-17110(-0.1-0.5MPA) - NAGANO KEIKI"
MASS FLOW CONTROLLER - NX - PartQty1 - Z522MGXC-24W2 N2 50SLM - STEC"
MASS FLOW CONTROLLER - NY,N1 - PartQty2 - Z512MGXC-24W2 N2 500SCCM - STEC"
MASS FLOW CONTROLLER - N2,N4,N7 - PartQty3 - Z512MGXC-24W2 N2 5SLM - STEC"
MASS FLOW CONTROLLER - N3,N6 - PartQty2 - Z522MGXC-24W2 N2 20SLM - STEC"
MASS FLOW CONTROLLER - N5,N8 - PartQty2 - Z522MGXC-24W2 N2 3SLM - STEC"
MASS FLOW CONTROLLER - NXZ2 - PartQty1 - Z522MGXC-24W2 N2 30SLM - STEC"
MASS FLOW CONTROLLER - NXZ1 - PartQty1 - G111AMC-4CR-SUC N2 500SCCM - STEC"
AIR OPERATE VALVE - NX1,NXZ21 - PartQty2 - FPR-UDDFA-21-6.35UGF-APD#B - FUJIKIN"
AIR OPERATE VALVE - NXZ11 - PartQty1 - FPR-UDDFA-21-6.35UGF-ST-PA-APD#A - FUJIKIN"
AIR OPERATE VALVE - NY1,N11,N21,N31,N41,N51,N61,NXZ11 - PartQty8 - FPR-UDDFA-21-6.35UGF-ST-PA-APD#A - FUJIKIN"
AIR OPERATE VALVE - N82 - PartQty1 - FPR-UDDFA-21-6.35UGF-ST-PA-APD#B - FUJIKIN"
AIR OPERATE VALVE - N72 - PartQty1 - FPR-UDDFA-21RS-6.35UGF-ST-PA-APD#B - FUJIKIN"
AIR OPERATE VALVE - XZ12-14 - PartQty1 - FBSDAL-RS20-6.35UGF-2B3-ST-PA-DVD - FUJIKIN"
AIR OPERATE VALVE - XZ11 - PartQty - FPR-UDDFA-21-6.35UGF-ST-PA-APD#B - FUJIKIN"
AIR OPERATE VALVE - FB19 - PartQty1 - FBSDAL-6.35UGF-1B3-DVD#B - FUJIKIN"
AIR OPERATE VALVE - XZ13,15 - PartQty2 - FBSDAL-6.35UGF-1B3-ST-PA-DVD - FUJIKIN"
AIR OPERATE VALVE - KE11-13,FB11-13 - PartQty2 - FBSDAL-RS22-6.35UGF-2B3-DVD#A - FUJIKIN"
AIR OPERATE VALVE - FB1B-FB1C - PartQty1 - FBSDAL-6.35UGF-2B3-DVD#B - FUJIKIN"
AIR OPERATE VALVE
AIR OPERATE VALVE
CHECK VALVE - XZ14 - PartQty1 - FUCL-21-6.35UGF6.35JR-0.023-KA-APD - FUJIKIN"
CHECK VALVE - NXZ13,NXZ23 - PartQty2 - FUCL-21-6.35UGF6.35JR-0.023-KA-APD - FUJIKIN"
CHECK VALVE
BAKING UNIT - FSC-F730 - PartQty1 - FSC-F730 - STEC"
PRESSURE GAUGE - FB1 - PartQty1 - EMD7D3P1D100 - YAMAMOTO"
SPEED CONTROLLER - FB1 - PartQty1 - AS1002F-06 - SMC"
OZONIZER - OZONIZER - PartQty1 - OP-500H-RE1 - TMEIC"
OZONIZER DESTRUCTOR - OZONIZER DESTRUCTOR - PartQty1 - G-03T - SUD-CHEMIE"
AIR OPERATE VALVE - NG1-IP1-NP1 - PartQty1 - FBNHDL-FS202-9.52X6.35-3B4-PA-NFQ - FUJIKIN"
AIR OPERATE VALVE - NG2 - PartQty1 - FPR-UDDF-81-9.52X6.35-2-NL-PA-DYL#A-UP - FUJIKIN"
AIR OPERATE VALVE - NG3-IP3 - PartQty1 - FBDV-6.35-2B3-ST-PA-LUA-UP - FUJIKIN"
AIR OPERATE VALVE - NG4-IP4 - PartQty1 - FBDV-9.52X6.35-2B3-PA-LDT#AUP - FUJIKIN"
AIR OPERATE VALVE - NP3 - PartQty1 - FPR-SDT-71RSB2-6.35-3-ST-PA-DZH - FUJIKIN"
AIR OPERATE VALVE - NP4 - PartQty1 - FPR-SDT-71RSB2-9.52X6.35-3-PA-DZH#A - FUJIKIN"
AIR OPERATE VALVE - Z19 - PartQty1 - HBV-8VF-NC-BA-R-PEEK - IHARA"
AIR OPERATE VALVE - KE19 - PartQty1 - FPR-SD-71-6.35UG-PA - FUJIKIN"
AIR OPERATE VALVE - KE1A - PartQty1 - FPR-SDT-71-6.35UGSX6.35-3-PA-LHD - FUJIKIN"
AIR OPERATE VALVE - Z16,Z26 - PartQty2 - FPR-SDT-71RSB2-6.35UGSX6.35-3-PA-LHD - FUJIKIN"
AIR OPERATE VALVE - N83 - PartQty1 - FPR-SD-71RSB2-6.35-2-PA - FUJIKIN"
HAND VALVE - NG2 - PartQty1 - FUDDFL-71-6.35-UP - FUJIKIN"
HAND VALVE - NG3 - PartQty1 - FUDDFL-71-6.35-ST-PA-UP - FUJIKIN"
HAND VALVE - NG4 - PartQty1 - FUDDFL-71-9.52-NL-PA-UP - FUJIKIN"
FILTER - Z11,12 - PartQty2 - CNF1004UPSG6 - PALL"
VAPORIZER SYSTEM - TL-2013 - PartQty1 - TL-2013L-06U-00-E - STEC"
MASS FLOW CONTROLLER - NR1,2 - PartQty2 - G111AMC-4CR-SUC N2 500SCCM - STEC"
FILTER - NR1,2 - PartQty2 - GSG-V4-1-N - MOTT"
AIR OPERATE VALVE - NR11,12-1,12-2 - PartQty3 - FPR-SD-71-6.35#A - FUJIKIN"
HAND VALVE - HV1 - PartQty1 - FUBFL-71-9.52-2-PA-BR - FUJIKIN"
HAND VALVE - HV2 - PartQty1 - HBV-8VF-BA-R-PEEK - IHARA"
HAND VALVE - HV3,4 - PartQty2 - FUBFL-71-9.52-PA - FUJIKIN"
AIR OPERATE VALVE - IV1 - PartQty1 - FPR-71RS1-9.52-PA#A - FUJIKIN"
AIR OPERATE VALVE - IV7 - PartQty1 - FPR-71RS1-9.52-2-PA-BR#A - FUJIKIN"
AIR OPERATE VALVE - IV8 - PartQty1 - HBV-8VF-NC-BA-R-PEEK - IHARA"
AIR OPERATE VALVE - IV2 - PartQty1 - FP-71RS1-9.52-2-PA-BR#A - FUJIKIN"
AIR OPERATE VALVE - VV1,VV2 - PartQty2 - FPR-71-9.52-2-PA-BR#A - FUJIKIN"
AIR OPERATE VALVE - SSV1 - PartQty1 - FPR-71-6.35-2-PA-BR#A - FUJIKIN"
NEEDLE VALVE - NV1 - PartQty1 - FUBFN-71-6.35-DFZ - FUJIKIN"
CHECK VALVE - CV1 - PartQty1 - IC8-1/3-VUA-48 - KITZ"
CYLINDER VALVE - MV - PartQty1 - VEC-VH8-X0110/VEC-CA9-X0302 - CKD"
CAPACITANCE MANOMETER - VG1 - PartQty1 - 631D02T8FHBB - MKS"
CAPACITANCE MANOMETER - VG2,P.SW21 - PartQty2 - 631D13T8FHBB - MKS"
CAPACITANCE MANOMETER - VG3 - PartQty1 - 631D11T8FHBB - MKS"
CAPACITANCE MANOMETER - VG4 - PartQty1 - 631D11T8FHBB - MKS"
PRESSURE SWITCH - ATM-P.SW11-1,2 - PartQty2 - 223B-22809 - MKS"
DRY PUMP UNIT - M.B.P/D.P - PartQty1 - IXH1820 - EDWARDS"
BALL VALVE - BV21,22 - PartQty2 - G-353011 - IHARA"
FILTER - F21,F22 - PartQty2 - GF-D50L - NIPPON SEISEN"
REGULATOR - RG21,22 - PartQty2 - RC2000-X0005 - CKD"
PRESSURE GAUGE - PG21,22 - PartQty2 - G49D-6-P10-P9 - CKD"
FLOW CONTROL SYSTEM - FCNL1-LA1,LA2 - PartQty1 - KHT-X0038-FL326735 - CKD"
FLOW METER - NFA,NFB - PartQty2 - KHT-X0033-FL326730 - CKD"
AIR OPERATE VALVE - PB1-NVNFA
PB2-NVNFB - PartQty2 - AGD21V-6RJ-FC - CKD"
FILTER - FNL12 - PartQty1 - N-400 PTFE 1/2""VCR L74 - NIPPON SEISEN"
STOP VALVE - BV23,24,25 - PartQty3 - 3QV-06-06 - CKD"
REGULATOR - RG23-24-25 - PartQty1 - MNRB500B-SLC6-3-D - CKD"
PRESSURE SWITCH - P.SW1,P.SW2 - PartQty2 - PPX-R10P-6M - CKD"
FLOW METER - NFZ - PartQty1 - XP-G5-U0 - TOKYO KEISO"

Missing/Damaged Parts List
None report, please inspect tool to reconfirm

 

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