Macquarie Semiconductor and Technology on behalf of Micron Technology, Inc. (VA)

Tokyo Electron Ltd. (TEL) TELINDY Anneal

Asset ID: 17676

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Tokyo Electron Ltd. (TEL)

TELINDY Anneal

Vertical Furnace

Furnaces/Diffusion Systems

Equipment details:

Date of Manufacture: Nov 2007

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Manassas, United States

Available date: Currently Available

Tool has been deinstalled and currently stored in warehouse.
Inspect to confirm configuration and condition.

Model: TELINDY-B
Process: Cu-Alloy
Software version: V6.07
System power rating: 480 AC 3-Phase    
6 Loaders

System Configuration
Description Furnace Unit:
1. Cartridge Heater X 1
2. T/C for Heater Control X 1
3. T/C for Over temperature Protection X 1
4. 5-P T/C for Cascade Control X 1

Controller:
1   Main Controller X 1
2   Temperature Controller X1
3   Interface card X 1
4   Gas controller X 1
5   Exhaust Controller X 2
6   O2/H2 ration interlock board X 1
7   KHI Controller X 1
8   Valve/Interlock Control Unit X 1
9   Signal Tower (Front) X 1
10   Gas Flow Pattern Panel X 2

Drive Mechanisms:
1   Load port X 2
2   Buffer stage X 16
3   FIM stage X 1
4   Wafer transfer Arm X 1
5   Carrier Transfer arm X 1
6   Boat Transfer arm X 1
7   Boat Elevator X 1
8   Auto shutter X 1

Gas System:
1   Gas Box X 1
2   Gas control panel X 2

Exhaust System:
1   Exhaust Control X 1

Safety:
1   Light Curtain sensor X 1
2   H2 leak detector X 1
3   HCL leak detector X 1

Other:
1   OHT I/F Unit X 2
2   RF ID Reader X 2
3   RCU X 2
 

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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