Ebara FREX300S Tungsten

Equipment details:

Date of Manufacture: 2005

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

Tool config is based on original PO, please verify tool details at tool inspection

Software

HMI: 11.5

PLC 1: 7.22

PLC 2: 7.73

PLC 3: 71.77

PLC 4: 10.4

PLC 5: 7.61

PLC 6: 7.61

PLC 7: 7.61

PLC 8: 7.61

ME-20: ME-20 Ver. 2.4.30.3

NOVA Interface software: none

Block Controller: No BC

Interface requirements

HMI USB Ports: HMI USB Ports

Factory Interface

Frame Configuration: NONE

WIP Delivery Type: OHT or manual

E84 PI O Sensors and Cables: UPPER E84 Sensors & Cables

Load Port Types: ASYST Iso port

Platen A

Platen Type: ceramic 10-150rpm

Platen End point: RECM & TCM

Slurry Delivery: Asahi

Platen Cooling Flow Monitor: yes

Platen Cooling Temp Monitor: yes

Platen B

Platen Type: ceramic 10-150rpm

Platen End point: RECM & TCM

Slurry Delivery: Asahi

Platen Cooling Flow Monitor: yes

Platen Cooling Temp Monitor: yes

Platen C

Platen Type: ceramic 10-150rpm

Platen End point: RECM & TCM

Slurry Delivery: Asahi

Platen Cooling Flow Monitor: yes

Platen Cooling Temp Monitor: yes

Platen D

Platen Type: ceramic 10-150rpm

Platen End point: RECM & TCM

Slurry Delivery: Asahi

Platen Cooling Flow Monitor: yes

Platen Cooling Temp Monitor: yes

Polisher

Polishing Head: 300MM AI Head Generation II

Pad Wafer Loss Sensor: Laser type

Atomizer/Spray Bar: Atomizer

Cleaner Module

Special Chemical: yes

Cleaner Module 1

Roll Roll Cleaner Type: Roll Brush

Chemical 1 Upper Control Valve: CLC

Chemical 1 Lower Control Valve: CLC

Chemical 1 Upper Flow Meter: CLC

Chemical 1 Lower Flow Meter: CLC

Special Chemical Upper: yes

Special Chemical Lower: yes

Special Chemical Upper: yes

Special Chemical Lower: yes

Megasonic: Nozzle

Bevel Edge Cleaning: yes

Cleaner Module 2

Roll Roll Cleaner Type: Roll Brush

Chemical 2 Upper Control Valve: CLC

Chemical 2 Lower Control Valve: CLC

Chemical 2 Upper Flow Meter: CLC

Chemical 2 Lower Flow Meter: CLC

Special Chemical Upper: yes

Special Chemical Lower: yes

Special Chemical Upper: yes

Special Chemical Lower: yes

Megasonic: N/A

Bevel Edge Cleaning: N/A

Cleaner Module 3

Roll Roll Cleaner Type: Roll Brush

Chemical 1 Upper Control Valve: CLC

Chemical 1 Lower Control Valve: CLC

Chemical 1 Upper Flow Meter: CLC

Chemical 1 Lower Flow Meter: CLC

Special Chemical Upper: yes

Special Chemical Lower: yes

Special Chemical Upper: yes

Special Chemical Lower: yes

Megasonic: N/A

Bevel Edge Cleaning: N/A

SRD

Spin Rinse Dryer: yes

Facilities

Chemical Connection: Bottom

Exhaust Connection: Top

Gas Connection: Bottom

Drain Connection: Bottom

Chiller: Communication interface

Damage/Missing parts list

Missing- T/O COVER (X-0001-473-1101): Qty 1

Missing- TOP CORNER COVER(2)(C)(C-3112-107-0001) CHC: Qty 1

Missing- TOP CORNER COVER(2)(B)(C-3112-105-0001) CHB: Qty 1

Missing- BRACKET（B) (CHB&CHD atomizer) X-0001-561-3011: Qty 2

Missing- COVER(1) Chemical box cover C-3112-003-0001: Qty 3

Missing- COVER(2) Utility box cover C-3112-002-0001: Qty 3

Missing- COVER　PLATE (CHB atomizer box) C-3537-973-0001: Qty 1

Missing- COVER　PLATE (CHC atomizer box) C-3537-973-0001: Qty 1

Missing- DIW GUN CASE (R SIDE) C-3131-165-0001: Qty 2

Missing- DIW GUN CASE (L SIDE) C-3131-110-0001: Qty 2

Missing- COVER (CHA/C slurry box) C-3111-950-0001: Qty 2

Missing- COVER (CHA slurry box) C-3111-947-0001: Qty 1

Missing- COVER (CHB/D slurry box) C-3111-951-0001: Qty2

Missing- Chiller(ATS SX21E)

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales