Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
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Etch/Ash/Clean - Plasma Processing
Date of Manufacture: 2007-01-01
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: Currently Available
Tool config is based on original PO, please verify tool details at tool inspection
Process: Asher strip
Software Version: 1.91
System Power Rating: 208V 3-Phase
Loading Configuration: 3 load position
Chm/Unit Position 1- 2 stage / chamber; Chemicals / Gases Used: PO2/PN2/4%H2N2
Chm/Unit Position 2- 2 stage / chamber; Chemicals / Gases Used: PO2/PN2/4%H2N2
Main Body
Load Port: Fixed Buffer
System wide corrosion free: Yes(SUS304)
Wafer Breakage Detection
LCD Monitor: VX1500M-T
System Controller
CPU
Hard disk
1st data back-up
2nd data back-up
Operation Monitor- 15" LCD
Signal Tower- 4 color Dual Polemount Type
R.C.S(Remote Control System)
Utility
Circuit Break Type: MCCB Type
UPS Power: 1ψ 208VAC 60HZ 63A
Power Vaccine: 1sec
Electric & signal cable Length: 20M
UPS Battery: YES
Circuit Break Type: MCCB Type
Water Manifold valve: Shut off v/v
All Utility Feed Direction: Bottom-up feed
Transfer module
TM ROBOT Body
TM ROBOT Controller
TM ROBOT Power box
EFEM ROBOT
Chamber 1
Dry Pump
APC valve
APC Controller
Baratron Sensor
Pressure Transducer (pirani)
EPD Controller
Heater Module
FCIP-Generator
Gas Box- IGS Type
Pressure Control- Throttle Valve
Chamber 1 process gas line
GAS #1(O2): 20slm
GAS #2(N2): 3slm
GAS #4(H2N2): 5slm
GAS #6(CHF3): 500sccm
Purity: 10RA
MFC Signal: Digital
Gas Line Polishing: Electrical Polished
Regulator
Air Operated Valve
Filter
Pressure Transducer
Chamber 2
Dry Pump
APC valve
APC Controller
Baratron Sensor
Pressure Transducer (pirani)
EPD Controller
Heater Module
FCIP-Generator
Gas Box- IGS Type
Pressure Control- Throttle Valve
Chamber 2 process gas line
GAS #1(O2): 20slm
GAS #2(N2): 3slm
GAS #4(H2N2): 5slm
GAS #6(CHF3): 500sccm
Purity: 10RA
MFC Signal: Digital
Gas Line Polishing: Electrical Polished
Regulator
Air Operated Valve
Filter
Pressure Transducer
Process chamber
EFEM
transfer module
AC power box
Damage/Missing parts list
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sales
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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