Macquarie Semiconductor and Technology on behalf of Macquarie (Asia) Pte Ltd. - UMC

P.S.K. Tech Inc. FUTAS


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Asset ID: 210190

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P.S.K. Tech Inc.



Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture: 2011-02-14

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Singapore, Singapore

Available date: Currently Available

Inspect to confirm configuration and condition.

General System Info

Date of Audit: 2022/2/14

Fab Equipment ID: CUSTRIP-15

Manufacturer (Make): PSK

Model: FUTAS

Serial Number: PAK10002

Wafer Size (inches): 12

Install Type: TTW

OEM MFG Date: 2011/2/14

Install Date: 2012/03

Date of Last PM: NA

Is System On-Line? No

Off-Line Date (if applicable): 2018

Can Produce Wafers As-Is? No

CE Mark Certified? Yes

Are any Manuals included? Std / CR

OEM Audit Available? Yes

3rd Party Audit Available? Yes

Decontamination Report Exists? Yes

Overall Tool Condition

Any Field Modifications? Yes

All Cables present? Yes

Any Corrosion visible on modules? Yes

Any Missing / Damaged Parts? Yes

Shipping Brackets Included? Yes

Wafer Handler: Yes

# of Cassette / FOUP Loaders: 3

Robot Type: RORZE

End-Effecter Type: CLAMP

Pre-Aligner? No

Mini-Environment: Yes

Handler Options? No


System Software

System SW (OS) version: Windows XP

System SW (App) version: PAK10002

Log-In Username: PSK

Log-In Password: PSK

Any SW Options? NA

SEMI Std Options: E84


Supporting Equipment

Power Supply: 208V 3P4W

AC Dist Box: 3

Ext Transformer: NA


Heat Exchanger / Chiller: NA

Backing Pump(s): 3


Facility Requirements

CDA: 7-8 Kg/cm2


Vacuum: -80Kpa

Gas: N2 / H2/ 5%H2He

Power: 208V 3P4W

Damage/Missing parts list

Please inspect tool to reconfirm

Product images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.

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