Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Dainippon Screen Mfg. Co. (DNS) SU-3200

Asset ID: 211002

Print spec sheet

Dainippon Screen Mfg. Co. (DNS)

SU-3200

Single Wafer Processing

Etch/Clean - Wet Processing

Equipment details:

Date of Manufacture: 2017

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

Tool config is based on original PO, please verify tool details at tool inspection


Process CHX

Software Version V2.614STD01

System Power Rating 280V AC 3-Phase

Loading Configuration 4 Loadport


Indexer- load port and IR; Chemicals / Gases Used: N/A

Process unit- process modules; Chemicals / Gases Used: N2, NH4OH, H2O2, DHF, CHX

E-flow- resistivity; Chemicals / Gases Used: CO2 , H2O

Equipment cabinet- chemical pre-mixing unit; Chemicals / Gases Used: HF

Equipment cabinet- chemical pre-mixing unit; Chemicals / Gases Used: CHX

Equipment cabinet- chemical pre-mixing unit; Chemicals / Gases Used: IPA


EC-CHX F

EC-CHX R

EC-DHF F

EC-DHF R

HDIW UNIT


Damage/Missing parts list

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sale

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Product Images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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