Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
Dainippon Screen Mfg. Co. (DNS)
Date of Manufacture: 2017
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: Currently Available
Tool config is based on original PO, please verify tool details at tool inspection
Process CHX
Software Version V2.614STD01
System Power Rating 280V AC 3-Phase
Loading Configuration 4 Loadport
Indexer- load port and IR; Chemicals / Gases Used: N/A
Process unit- process modules; Chemicals / Gases Used: N2, NH4OH, H2O2, DHF, CHX
E-flow- resistivity; Chemicals / Gases Used: CO2 , H2O
Equipment cabinet- chemical pre-mixing unit; Chemicals / Gases Used: HF
Equipment cabinet- chemical pre-mixing unit; Chemicals / Gases Used: CHX
Equipment cabinet- chemical pre-mixing unit; Chemicals / Gases Used: IPA
EC-CHX F
EC-CHX R
EC-DHF F
EC-DHF R
HDIW UNIT
Damage/Missing parts list
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sale
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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