Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Applied Materials (AMAT) Endura II Aluminum Interconnect

Asset ID: 69485

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Applied Materials (AMAT)

Endura II Aluminum Interconnect

PVD (Physical Vapor Deposition)

Deposition Equipment

Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: 12/30/2021


Process: REFLOWSPUT


Tool config is based on original PO, please verify tool details at tool inspection


Chamber Position C- Process Type Reactive PC

Chamber Position 1 & 5 - Process Type SIP Ti

Chamber Position 2 - Process Type ALPS

Chamber Position 3 & 4 - HT Al

Chamber Position D - RT DSTTN


Process Type: Reactive PC

Chamber position: C

Shutter option: none

chamber body (Al or SST): Al

chamber body part number: 0040-76718

Slit valve seal (bonded or o-ring): Bonded

Slit Valve door part number: 0040-84391

Target vendor: n/a

Target No.: n/a

Bakeout/idle power (%): n/a

E-Mag Power Supply: n/a

E-Mag Supply Vendor/Type: n/a

OEM Part Number: n/a

DC Power supply(AE-MDX????): n/a

AMAT Part number Master: n/a

OEM Part Number Master: n/a

AMAT Part number Slave: n/a

OEM Part Number Slave: n/a

Generator Size : n/a

Total DC (12 kwh,24kwh, etc): n/a

Bias Generator : n/a

AMAT Part number : n/a

OEM Part Number: n/a

Bias Generator Size: n/a

Bias Generator Frequency: 13.56MHz and 2MHz(in one generator)

Rf coil generator: COMDEL CDX-2000

Rf Match Box: 0010-21748/0010-52033

AMAT Part number : 0190-23308

OEM Part Number: n/a

DC Coil Power Supply: n/a

AMAT Part Number: n/a

OEM Part Number: n/a

Magnet rotation speed (rpm): n/a

Magnet shim thickness: n/a

Magnet type: n/a

Magnet part number: n/a

Magnet Serial Number (man. Date): n/a

Target to magnet spacing(mm): n/a

adaptor p/n: 0041-02659

Kit spacer upper p/n: n/a

Kit spacer lower p/n: n/a

upper shield p/n: Belljar 0040-55456

Treatment (Arc spray/Bead Blast): AL2O3

Treatment roughness (RA): n/a

lower shield p/n: 0040-86514

Treatment (Arc spray/Bead Blast): Bead Blast

Treatment roughness (RA): n/a

inner(or mid) shield p/n: 0021-19342

Treatment (Arc spray/Bead Blast): Bead Blast

Treatment roughness (RA): n/a

shield clamp p/n: 0020-19258

Treatment (Arc spray/Bead Blast): n/a

Treatment roughness (RA): n/a

inner(or mid) shield clamp p/n: Insulator 0200-01903

Treatment (Arc spray/Bead Blast): n/a

Treatment roughness (RA): n/a

lower shield clamp p/n: n/a

Treatment (Arc spray/Bead Blast): n/a

Treatment roughness (RA): n/a

pedestal cover p/n: n/a

Treatment (Arc spray/Bead Blast): n/a

Treatment roughness (RA): n/a

dep ring p/n: n/a

Treatment (Arc spray/Bead Blast): n/a

Treatment roughness (RA): n/a

cover ring p/n: n/a

Treatment (Arc spray/Bead Blast): n/a

Treatment roughness (RA): n/a

insulator bushing p/n: n/a

Treatment (Arc spray/Bead Blast): n/a

Treatment roughness (RA): n/a

Shutter: n/a

Treatment (Arc spray/Bead Blast): n/a

Treatment roughness (RA): n/a

pedestal type: n/a

pedestal p/n: n/a

heater spacing in mm: n/a

heater spacing in steps: n/a

min heater spacing in mm: n/a

min heater spacing in steps: n/a

max heater spacing in mm: n/a

max heater spacing in steps: n/a

Lift fingers p/n: n/a

Lift hoop p/n: n/a

Cryo restrictor(Y/N): n/a

Cryo restrictor Part Number: n/a

Max Cryo regen gas load (L): n/a

Cryo gate valve (2/3 pos): Pendulum

MFC 1 Gas: He

MFC 1 Cal Factor: 1

MFC 1 Size: 300

MFC 1 Type: He

MFC 1 Part Number: 0010-44160

MFC 2 Gas: Ar2

MFC 2 Cal Factor: 1

MFC 2 Size: 200

MFC 2 Type: Ar

MFC 2 Part Number: 3030-13113

MFC 3 Gas: Ar

MFC 3 Cal Factor: 1

MFC 3 Size: 20

MFC 3 Type: Ar

MFC 3 Part Number: 3030-13116

MFC 4 Gas: (MFC6) H2

MFC 4 Cal Factor: (MFC6) 1

MFC 4 Size: (MFC6) 100

MFC 4 Type: (MFC6) H2

MFC 4 Part Number: (MFC6) 0015-02990

Chamber base pressure (T): 0.0000002

Chamber Rate-of-Rise(nTorr/min): 15000

Press. and ROR at Startup: not necessary

Pressure Rise 1 min: not necessary

Pressure Rise 5 min: not necessary

Pressure Rise 10 min: not necessary

Pressure vs. Gas Flow table: not necessary

Process Ar Supply Pressure: 34.7

Process N2 Supply Pressure: 33.9

Cryo Regen N2 pressure: na

Vent Ar pressure: 47.7

Optional Gas (He): 30.1

O2 (Ch. F): n/a

H2(Ch. E): n/a

H2(Ch. C): n/a

CDA: 95.7

SLIT VALVE CDA: 85

Cooling Water Flow (GPM): 0.8


Process Type: SIP Ti

Chamber position: 1,5

Shutter option: yes

chamber body (Al or SST): SST

chamber body part number: 0040-98657

Slit valve seal (bonded or o-ring): Bonded

Slit Valve door part number: 0040-84391

Target vendor: Nikko/Tosoh

Target No.: TAG73

Bakeout/idle power (%): 0.4

E-Mag Power Supply: n/a

E-Mag Supply Vendor/Type: n/a

OEM Part Number: n/a

DC Power supply(AE-MDX????): AE-Pinnacle

AMAT Part number Master: 0190-08122

OEM Part Number Master: n/a

AMAT Part number Slave: 0190-08122

OEM Part Number Slave: n/a

Generator Size : 20kw

Total DC (12 kwh,24kwh, etc): 40kw

Bias Generator : ENI - GHW12Z

AMAT Part number : 0190-25529

OEM Part Number: n/a

Bias Generator Size: 1.25KW

Bias Generator Frequency: 13.56MHZ,

Rf coil generator: n/a

Rf Match Box: 0010-02372/0010-52034

AMAT Part number : n/a

OEM Part Number: n/a

DC Coil Power Supply: n/a

AMAT Part Number: n/a

OEM Part Number: n/a

Magnet rotation speed (rpm): 65

Magnet shim thickness: Ch1:1.25mm Ch5:1.0mm

Magnet type: LP-3.7.4

Magnet part number: 0010-11228

Magnet Serial Number (man. Date): no need

Target to magnet spacing(mm): 1.5±0.6

adaptor p/n: 0040-82921

Kit spacer upper p/n: 0040-76943

Kit spacer lower p/n: 0040-62877

upper shield p/n: 0020-23549

Treatment (Arc spray/Bead Blast): Arc Spray

Treatment roughness (RA): n/a

lower shield p/n: 0020-02344

Treatment (Arc spray/Bead Blast): Arc Spray

Treatment roughness (RA): n/a

inner(or mid) shield p/n: 0020-54777

Treatment (Arc spray/Bead Blast): Bead Blast

Treatment roughness (RA): n/a

shield clamp p/n: n/a

Treatment (Arc spray/Bead Blast): n/a

Treatment roughness (RA): n/a

inner(or mid) shield clamp p/n: 0020-08299

Treatment (Arc spray/Bead Blast): Arc Spray

Treatment roughness (RA): n/a

lower shield clamp p/n: 0020-02348

Treatment (Arc spray/Bead Blast): Arc Spray

Treatment roughness (RA): n/a

pedestal cover p/n: n/a

Treatment (Arc spray/Bead Blast): n/a

Treatment roughness (RA): n/a

dep ring p/n: 0200-08301

Treatment (Arc spray/Bead Blast): n/a

Treatment roughness (RA): n/a

cover ring p/n: 0021-17770

Treatment (Arc spray/Bead Blast): Arc Spray

Treatment roughness (RA): n/a

insulator bushing p/n: 0200-00590

Treatment (Arc spray/Bead Blast): n/a

Treatment roughness (RA): n/a

Shutter: 0021-25014

Treatment (Arc spray/Bead Blast): Bead Blast

Treatment roughness (RA): n/a

pedestal type: SLT FDR ECHUCK

pedestal p/n: 0010-22985

heater spacing in mm: no concern

heater spacing in steps: -55050

min heater spacing in mm: No Data

min heater spacing in steps: No Data

max heater spacing in mm: No Data

max heater spacing in steps: No Data

Lift fingers p/n: no concern

Lift hoop p/n: no concern

Cryo restrictor(Y/N): n/a

Cryo restrictor Part Number: n/a

Max Cryo regen gas load (L): 400

Cryo gate valve (2/3 pos): 3 Position

MFC 1 Gas: N2

MFC 1 Cal Factor: n/a

MFC 1 Size: 200

MFC 1 Type: N2

MFC 1 Part Number: na

MFC 2 Gas: na

MFC 2 Cal Factor: n/a

MFC 2 Size: na

MFC 2 Type: na

MFC 2 Part Number: na

MFC 3 Gas: Ar

MFC 3 Cal Factor: n/a

MFC 3 Size: 50

MFC 3 Type: Ar

MFC 3 Part Number: na

MFC 4 Gas: ArH

MFC 4 Cal Factor: n/a

MFC 4 Size: 20

MFC 4 Type: n/a

MFC 4 Part Number: n/a

Chamber base pressure (T): 2.0 e-8

Chamber Rate-of-Rise(nTorr/min): 522

Press. and ROR at Startup: no concern

Pressure Rise 1 min: not necessary

Pressure Rise 5 min: not necessary

Pressure Rise 10 min: not necessary

Pressure vs. Gas Flow table: not necessary

Process Ar Supply Pressure: 30psi

Process N2 Supply Pressure: 30psi

Cryo Regen N2 pressure: 90

Vent Ar pressure: 40

Optional Gas (He): n/a

O2 (Ch. F): n/a

H2(Ch. E): n/a

H2(Ch. C): n/a

CDA: 88

SLIT VALVE CDA: 82

Cooling Water Flow (GPM): 8.9


Process Type: ALPS

Chamber position: 2

Shutter option: yes

chamber body (Al or SST): SST

chamber body part number: 0040-98657

Slit valve seal (bonded or o-ring): bonded

Slit Valve door part number: 0040-84391

Target vendor: Nikko

Target No.: TAG86

Bakeout/idle power (%): n/a

E-Mag Power Supply: n/a

E-Mag Supply Vendor/Type: n/a

OEM Part Number: n/a

DC Power supply(AE-MDX????): MKS DCG-200Z OPTIMA

"AMAT Part number Master: 0190-22932-002 (40kw)

-> 0190-26920 (20kw)"

OEM Part Number Master: n/a

"AMAT Part number Slave: 0190-22918-002

->0190-28664 (20kw)"

OEM Part Number Slave: n/a

Generator Size : 20kw

Total DC (12 kwh,24kwh, etc): 40kw

Bias Generator : ENI GHW-12Z

AMAT Part number : 0190-25529

OEM Part Number: na

Bias Generator Size: 1250w

Bias Generator Frequency: 13.56 Mhz

Rf coil generator: n/a

Rf Match Box: n/a

AMAT Part number : n/a

OEM Part Number: n/a

DC Coil Power Supply: n/a

AMAT Part Number: n/a

OEM Part Number: n/a

Magnet rotation speed (rpm): 65

Magnet shim thickness: na

Magnet type: LP3.2.0

Magnet part number: 0010-26093

Magnet Serial Number (man. Date): no need

Target to magnet spacing(mm): 1.5mm

adaptor p/n: no data

Kit spacer upper p/n: n/a

Kit spacer lower p/n: n/a

upper shield p/n: Dark Space Shield 0020-41709

Treatment (Arc spray/Bead Blast): AS

Treatment roughness (RA): n/a

lower shield p/n: 0021-07952

Treatment (Arc spray/Bead Blast): Bead Blast

Treatment roughness (RA): n/a

inner(or mid) shield p/n: n/a

Treatment (Arc spray/Bead Blast): n/a

Treatment roughness (RA): n/a

shield clamp p/n: na

Treatment (Arc spray/Bead Blast): n/a

Treatment roughness (RA): n/a

inner(or mid) shield clamp p/n: n/a

Treatment (Arc spray/Bead Blast): n/a

Treatment roughness (RA): n/a

lower shield clamp p/n: 0020-83315

Treatment (Arc spray/Bead Blast): 0200-06863

Treatment roughness (RA): 0200-06864

pedestal cover p/n: n/a

Treatment (Arc spray/Bead Blast): n/a

Treatment roughness (RA): n/a

dep ring p/n: 0200-06863

Treatment (Arc spray/Bead Blast): n/a

Treatment roughness (RA): n/a

cover ring p/n: 0200-06864

Treatment (Arc spray/Bead Blast): n/a

Treatment roughness (RA): n/a

insulator bushing p/n: n/a

Treatment (Arc spray/Bead Blast): n/a

Treatment roughness (RA): n/a

Shutter: 0021-26565

Treatment (Arc spray/Bead Blast): AS

Treatment roughness (RA): n/a

pedestal type: SLT ESC

pedestal p/n: 0010-22985

heater spacing in mm: no data

heater spacing in steps: -55050

min heater spacing in mm: No Data

min heater spacing in steps: No Data

max heater spacing in mm: No Data

max heater spacing in steps: No Data

Lift fingers p/n: no data

Lift hoop p/n: no data

Cryo restrictor(Y/N): n/a

Cryo restrictor Part Number: n/a

Max Cryo regen gas load (L): na

Cryo gate valve (2/3 pos): 3 Position

MFC 1 Gas: AR

MFC 1 Cal Factor: n/a

MFC 1 Size: 100

MFC 1 Type: AR

MFC 1 Part Number: na

MFC 2 Gas: na

MFC 2 Cal Factor: n/a

MFC 2 Size: na

MFC 2 Type: na

MFC 2 Part Number: na

MFC 3 Gas: ArH

MFC 3 Cal Factor: n/a

MFC 3 Size: 20

MFC 3 Type: n/a

MFC 3 Part Number: n/a

MFC 4 Gas: n/a

MFC 4 Cal Factor: n/a

MFC 4 Size: n/a

MFC 4 Type: n/a

MFC 4 Part Number: n/a

Chamber base pressure (T): 2.0 e-8

Chamber Rate-of-Rise(nTorr/min): 522

Press. and ROR at Startup: no concern

Pressure Rise 1 min: not necessary

Pressure Rise 5 min: not necessary

Pressure Rise 10 min: not necessary

Pressure vs. Gas Flow table: not necessary

Process Ar Supply Pressure: 30psi

Process N2 Supply Pressure: 30

Cryo Regen N2 pressure: 90

Vent Ar pressure: 40

Optional Gas (He): na

O2 (Ch. F): n/a

H2(Ch. E): n/a

H2(Ch. C): n/a

CDA: 88

SLIT VALVE CDA: 82

Cooling Water Flow (GPM): 8.9


Process Type: HT Al

Chamber position: 3,4

Shutter option: yes

chamber body (Al or SST): SST

chamber body part number: 0040-98657

Slit valve seal (bonded or o-ring): bonded

Slit Valve door part number: 0040-84391

Target vendor: Tosoh

Target No.: TAG113

Bakeout/idle power (%): n/a

E-Mag Power Supply: n/a

E-Mag Supply Vendor/Type: n/a

OEM Part Number: n/a

DC Power supply(AE-MDX????): MKS DCG-200Z OPTIMA

AMAT Part number Master: 0190-26920-001

OEM Part Number Master: 3152412-243C

AMAT Part number Slave: 0190-28664-001

OEM Part Number Slave: 3152412-243C

Generator Size : 20kw

Total DC (12 kwh,24kwh, etc): 40kw

Bias Generator : n/a

AMAT Part number : n/a

OEM Part Number: n/a

Bias Generator Size: n/a

Bias Generator Frequency: n/a

Rf coil generator: n/a

Rf Match Box: n/a

AMAT Part number : n/a

OEM Part Number: n/a

DC Coil Power Supply: n/a

AMAT Part Number: n/a

OEM Part Number: n/a

Magnet rotation speed (rpm): 95

Magnet shim thickness: Ch3:0.5mm Ch4:0.5mm

Magnet type: WP

Magnet part number: 0010-03485

Magnet Serial Number (man. Date): no need

Target to magnet spacing(mm): 1.1mm

adaptor p/n: 0040-69768

Kit spacer upper p/n: n/a

Kit spacer lower p/n: n/a

upper shield p/n: 0021-24752

Treatment (Arc spray/Bead Blast): Bead Blast

Treatment roughness (RA): n/a

lower shield p/n: 0020-29711

Treatment (Arc spray/Bead Blast): Bead Blast

Treatment roughness (RA): n/a

inner(or mid) shield p/n: n/a

Treatment (Arc spray/Bead Blast): n/a

Treatment roughness (RA): n/a

shield clamp p/n: n/a

Treatment (Arc spray/Bead Blast): n/a

Treatment roughness (RA): n/a

inner(or mid) shield clamp p/n: n/a

Treatment (Arc spray/Bead Blast): n/a

Treatment roughness (RA): n/a

lower shield clamp p/n: n/a

Treatment (Arc spray/Bead Blast): n/a

Treatment roughness (RA): n/a

pedestal cover p/n: n/a

Treatment (Arc spray/Bead Blast): n/a

Treatment roughness (RA): n/a

dep ring p/n: 0200-07118

Treatment (Arc spray/Bead Blast): n/a

Treatment roughness (RA): n/a

cover ring p/n: 0200-06864

Treatment (Arc spray/Bead Blast): n/a

Treatment roughness (RA): n/a

insulator bushing p/n: n/a

Treatment (Arc spray/Bead Blast): n/a

Treatment roughness (RA): n/a

Shutter: 0021-26565

Treatment (Arc spray/Bead Blast): Bead Blast

Treatment roughness (RA): n/a

pedestal type: HT ECHUCK

pedestal p/n: 0010-27430

heater spacing in mm: No Data

heater spacing in steps: Ch3:-52840 Ch4:-52840

min heater spacing in mm: No Data

min heater spacing in steps: No Data

max heater spacing in mm: No Data

max heater spacing in steps: No Data

Lift fingers p/n: 0020-46828

Lift hoop p/n: 0020-75465

Cryo restrictor(Y/N): n/a

Cryo restrictor Part Number: n/a

Max Cryo regen gas load (L): 980

Cryo gate valve (2/3 pos): 3 Positon

MFC 1 Gas: n/a

MFC 1 Cal Factor: n/a

MFC 1 Size: n/a

MFC 1 Type: n/a

MFC 1 Part Number: n/a

MFC 2 Gas: n/a

MFC 2 Cal Factor: n/a

MFC 2 Size: n/a

MFC 2 Type: n/a

MFC 2 Part Number: n/a

MFC 3 Gas: Ar

MFC 3 Cal Factor: 1

MFC 3 Size: 200

MFC 3 Type: AE

MFC 3 Part Number: 0015-02988

MFC 4 Gas: ArH

MFC 4 Cal Factor: 1

MFC 4 Size: 20

MFC 4 Type: Ar

MFC 4 Part Number: AE 0015-02990

Chamber base pressure (T): 5.00E-8 Torr

Chamber Rate-of-Rise(nTorr/min): 5000nTorr/min

"Press. and ROR at Startup: Ch2 Press:1.30E-8Torr ROR:1100nT/min

Ch3 Press:2.0E-8Torr ROR:947nT/min"

Pressure Rise 1 min: not necessary

Pressure Rise 5 min: not necessary

Pressure Rise 10 min: not necessary

Pressure vs. Gas Flow table: not necessary

Process Ar Supply Pressure: 30psi

Process N2 Supply Pressure: 93.5

Cryo Regen N2 pressure: 47.7

Vent Ar pressure: 37.9

Optional Gas (He): n/a

O2 (Ch. F): n/a

H2(Ch. E): n/a

H2(Ch. C): 95.7

CDA: 85

SLIT VALVE CDA: 86

Cooling Water Flow (GPM): CH2:8.5 CH3:9.0


Process Type: (RT DSTTN)

Chamber position: D

Shutter option: yes

chamber body (Al or SST): SST

chamber body part number: 0242-33289

Slit valve seal (bonded or o-ring): Bonded

Slit Valve door part number: 0040-84391

Target vendor: Nikko/Tosoh

Target No.: TAG72

Bakeout/idle power (%): 0

E-Mag Power Supply: n/a

E-Mag Supply Vendor/Type: n/a

OEM Part Number: n/a

DC Power supply(AE-MDX????): ENI

AMAT Part number Master: 0190-22931

OEM Part Number Master: DCG200Z

AMAT Part number Slave: n/a

OEM Part Number Slave: n/a

Generator Size : 20kw

Total DC (12 kwh,24kwh, etc): 20kw

Bias Generator : n/a

AMAT Part number : n/a

OEM Part Number: n/a

Bias Generator Size: n/a

Bias Generator Frequency: n/a

Rf coil generator: n/a

Rf Match Box: n/a

AMAT Part number : n/a

OEM Part Number: n/a

DC Coil Power Supply: n/a

AMAT Part Number: n/a

OEM Part Number: n/a

Magnet rotation speed (rpm): 95

Magnet shim thickness: na

Magnet type: TTN

Magnet part number: 0010-03487

Magnet Serial Number (man. Date): no need

Target to magnet spacing(mm): 1.1mm

adaptor p/n: 0040-69768

Kit spacer upper p/n: n/a

Kit spacer lower p/n: n/a

upper shield p/n: 0021-21234

Treatment (Arc spray/Bead Blast): Bead Blast

Treatment roughness (RA): n/a

lower shield p/n: 0021-22065

Treatment (Arc spray/Bead Blast): n/a

Treatment roughness (RA): n/a

inner(or mid) shield p/n: n/a

Treatment (Arc spray/Bead Blast): n/a

Treatment roughness (RA): n/a

shield clamp p/n: n/a

Treatment (Arc spray/Bead Blast): n/a

Treatment roughness (RA): n/a

inner(or mid) shield clamp p/n: n/a

Treatment (Arc spray/Bead Blast): n/a

Treatment roughness (RA): n/a

lower shield clamp p/n: n/a

Treatment (Arc spray/Bead Blast): n/a

Treatment roughness (RA): n/a

pedestal cover p/n: n/a

Treatment (Arc spray/Bead Blast): n/a

Treatment roughness (RA): n/a

dep ring p/n: 0040-07291

Treatment (Arc spray/Bead Blast): n/a

Treatment roughness (RA): n/a

cover ring p/n: 0021-22064

Treatment (Arc spray/Bead Blast): n/a

Treatment roughness (RA): n/a

insulator bushing p/n: n/a

Treatment (Arc spray/Bead Blast): n/a

Treatment roughness (RA): n/a

Shutter: 0021-26609

Treatment (Arc spray/Bead Blast): n/a

Treatment roughness (RA): n/a

pedestal type: ADVANCED A101

pedestal p/n: 0010-27432

heater spacing in mm: 55mm

heater spacing in steps: -51000

min heater spacing in mm: 32

min heater spacing in steps: -69000

max heater spacing in mm: 55

max heater spacing in steps: -51000

Lift fingers p/n: na

Lift hoop p/n: na

Cryo restrictor(Y/N): n/a

Cryo restrictor Part Number: n/a

Max Cryo regen gas load (L): na

Cryo gate valve (2/3 pos): 3 Positon

MFC 1 Gas: N2 process

MFC 1 Cal Factor: 0

MFC 1 Size: 200

MFC 1 Type: N2

MFC 1 Part Number: 0015-02992

MFC 2 Gas: none

MFC 2 Cal Factor: n/a

MFC 2 Size: na

MFC 2 Type: na

MFC 2 Part Number: na

MFC 3 Gas: Ar process

MFC 3 Cal Factor: 0

MFC 3 Size: 150

MFC 3 Type: Ar

MFC 3 Part Number: 0015-02992

MFC 4 Gas: n/a

MFC 4 Cal Factor: n/a

MFC 4 Size: n/a

MFC 4 Type: n/a

MFC 4 Part Number: n/a

Chamber base pressure (T): 3-E8

Chamber Rate-of-Rise(nTorr/min): 650

Press. and ROR at Startup: na

Pressure Rise 1 min: not necessary

Pressure Rise 5 min: not necessary

Pressure Rise 10 min: not necessary

Pressure vs. Gas Flow table: not necessary

Process Ar Supply Pressure: 34.7

Process N2 Supply Pressure: 33.9

Cryo Regen N2 pressure: na

Vent Ar pressure: 47.7

Optional Gas (He): 37.9

O2 (Ch. F): n/a

H2(Ch. E): n/a

H2(Ch. C): n/a

CDA: 95.7

SLIT VALVE CDA: 85

Cooling Water Flow (GPM): 11.2


Damage/Missing parts list

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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