Macquarie Semiconductor and Technology on behalf of Macquarie (Asia) Pte Ltd. - UMC
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Endura SL Front-End Metallization
PVD (Physical Vapor Deposition)
Date of Manufacture: November 2002
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Singapore, Singapore
Available date: Currently Available
Four (4) chamber WCVD
Inspect to confirm configuration and condition.
| General System Info | |
| Date of Audit | 19-Apr-22 |
| Fab Equipment ID | WCVD-01 |
| Manufacturer (Make) | Applied Materials |
| Model | ENDURA SL |
| Serial Number | 402931 |
| Wafer Size (inches) | 12 |
| OEM MFG Date | 2002/11 |
| Install Date | 2003/11 |
| Date of Last PM | 19-Apr-22 |
| Is System On-Line? | No |
| Off-Line Date (if applicable) | Not Applicable |
| Can Produce Wafers As-Is ? | Yes |
| CE Mark Certified ? | Yes / No |
| Are any Manuals included ? | Std / CR |
| OEM Audit Available? | Yes |
| 3rd Party Audit Available ? | Yes |
| Decontamination Report Exists? | No |
| Overall Tool Condition | |
| Any Field Modifications ? | No |
| All Cables present? | Yes |
| Any Corrosion visible on modules ? | No |
| Any Missing / Damaged Parts ? | No |
| Shipping Brackets Included ? | No |
| Wafer Handler | Yes |
| Handler Type | FI & Transfer |
| # of Cassette / FOUP Loaders | 3 |
| Robot Type | FI: Yaskawa FI 5.3 |
| Transfer: VHP robot | |
| End-Effecter Type | Ceramic |
| Pre-Aligner ? | Yes |
| Mini-Environment | Yes |
| Handler Options ? | NA |
| System Software | |
| System SW (OS) version | Windows NT 4.0 |
| System SW (App) version | B3929 |
| Log-In User Name | AMAT |
| Log-In Password | 5989 |
| Any SW Options ? | NA |
| SEMI Std Options (E84, E99, etc..) | E84 |
| Communication Interface | |
| GEM / SECS ? | Yes |
| HSMS | Yes |
| Serial | Yes |
| Ethernet | Yes |
| Other ? | NA |
| Supporting Equipment | |
| Power Supply | Yes |
| AC Dist Box | Yes |
| Ext Transformer | No |
| UPS | Yes |
| Heat Exchanger / Chiller | H2000X2EA |
| Backing Pump(s) | IH1000X4EA, IXL12LX2EA |
| Facility Requirements | |
| CDA | Yes |
| DIW | No |
| Vacuum | Yes |
| Gas | Yes |
| Power | Yes |
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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