Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, K.K. (F15)

Applied Materials (AMAT) Endura II Front-End Metallization

Asset ID: 207037

Print spec sheet

Applied Materials (AMAT)

Endura II Front-End Metallization

PVD (Physical Vapor Deposition)

Deposition Equipment

Equipment details:

Date of Manufacture: 2015

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: 8/19/2022

PVD - 15-3AMAT_END_VXLRW - ENDURA2 -


OEM  AMAT
Tool Model  ENDURA
Process  Metal  (tungsten)
Software Version (include revision #) 15-3AMAT_ENDURA2_XLRW_01
System Power Rating  enB2.5-1.8
Loading Configuration  400/440/480VAC  3phase STAR   and
200/208VAC 3phase STAR  
   3 Load Ports
   Vendor Chm ModelChemicals / Gases Used (not to use Micron Proprietary names)
Chm/Unit Position   1  XLR-W_______________________PAr and PN2__________________________________
Chm/Unit Position   3  XLR-W_______________________PAr and PN2__________________________________
Chm/Unit Position   4  XLR-W_______________________PAr and PN2__________________________________
Chm/Unit Position   E  DMD_______________________ PAr__________________________________
Chm/Unit Position   F  DMD_______________________ PAr__________________________________
Tool:    
Process Unit:  Model:Remark
Controller:  FES (CGA) 
MFC/Pressure Unit:  Brooks GF-125C 150SCCM AR/200SCCM N2/20SCCM AR
Drive Mechanisms:  NA 
FOUP Opener:  SINFONIA (SELOP12F25-S7A0021) 
Gas System:  NA 
Exhuast System:  NA 


Fab15 confirmed there were no missing or damaged parts.



Enquire about this product

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.

Product Images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


Related products

No results message:
Displayed when filters returns no results.

We couldn't find any items that match your criteria.

Please try a different keyword.

Service unavailable:
Displayed when filter service cannot be reached.

Sorry, this service is currently unavailable.

Please try again later.

Get in touch

Have a question for our team?

Ask about our equipment solutions, ranging from Macquarie equipment inventory sales, sourcing programs, surplus disposition options, and direct equipment purchases.

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.