Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Ulvac Corporation Entron-EX: Cu Barrier Seed

Asset ID: 13769

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Ulvac Corporation

Entron-EX: Cu Barrier Seed

PVD (Physical Vapor Deposition)

Deposition Equipment

Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: 8/6/2021

Process: CUSEED
Supplier: ULVAC Technology
Item Description: ULVAC Technology
HARDWARE CONFIGURATION: PVDD202
Software Revision: 3.22R17
Basic System : 
FX Transfer chamber: Keytran-9Z EX
RX Transfer chamber: Keytran-9Z EX
LA Load/unload: Yes
LB Load/unload: Yes
Turbo Pump (load/unload chamber): TMP-403LM(100064510)
Main Pump (FX/RX Tandem Core)": CRYO-U8HLH
Pressure Monitoring: na
Ion Gauge: BPG402-SD (100343760-02)
Pirani Gague: BPG402-SD (100343760-02)
User interface
Operator Interface: ULV2800X-500 Pentium4 2.8GHz Window XP
Platform controller: MS-IV A
Process Controller: MSH -IV A
Utility Controller: MS -IV A
Communication type: Device net and MS-4A
Micron host interface: Follow IMI TAS
Binary Recipe Download: Yes
Recipe format: Supplier to provide binary or hex format of recipes.
USB Ports: Minimum of 2 Capable of recipe storage and retrival
FOUP Station
Manufactor: Rorze fors-300
FOUP / Cassette - Part Number: Entegris- F300 Auto-pod  (01-018675)
Wafer Diameter: Wafer Diameter : 300 ± 0.25mm
Number of FOUP: 3 load ports
Wafer Mapping capability:
E84 Parallel I/O Sensors
E99 Carrier ID Reader
3 RF tag readers
AMHS: OHT
Process Chamber Options: 
Position r1: SIS Copper
Chamber Description: SIS Copper
Shutter: 101421991
Magnet: 1224(100257703)
Pedestal: 100100808
Process Kit: as below
Ion Refractor: 101421987
Shield Ring: 101421993
Shield Ring: 101421995
Shield Ring: 101421988
Ring: 101421994
Power Supplies
DC:
(2) Kyosan HPK15ZI
MASTER(100708328)/SLAVE(100708329)
IR:
Lambda EMI 
ESS200-50-2-D-GBV(100705392)
RF: MKS GHW-12(101414445)
Gas
Line 1MFC: SEC-Z514MGXCS3(101308355)
RGA: Manual Valve(100377244)
Vacuum Gauge: BPG402-SD (100343760)
Position r4: 
Chamber Description: SIS Copper
Shutter: 101421991
Magnet: 1224
Pedestal: Silicone-290-TCA-NT-02(100904333)
Process Kit: as below
Ion Refractor: 101421987
Shield Ring: 101421993
Shield Ring: 101421995
Shield Ring: 101421988
Ring: 101421994
Power Supplies
DC:
(2) Kyosan HPK15ZI
MASTER(100708328)/SLAVE(100708329)
IR:
Lambda EMI 
ESS200-50-2-D-GBV(100705392)
RF: MKS GHW-12(101414445)
Gas
Line 1 MFC : SEC-Z514MGXCS3(101308355)
RGA
Vacuum Gauge: BPG402-SD (100343760)
Position r2: 
Chamber Description: SIS Ta
Magnet: 1229(100266154)
Pedestal: Silicone-290-TCA-NT-02(100904333)
Process Kit: LSA130.7 Al Arc-spray Process
Ion Refractor: 101422088
Shield Ring: 101422089
Shield Ring: 101422092
Shield Ring: 101422090
Ring: 101422091
Dummy wafer: 101421990
Power Supplies 
DC: Pinnacle 20K 208 AFP HH Ring-lug(100880299)
RF: MKS GHW-12(101414445)
Gas
Line 1: SEC-Z514MGXCS3(101308355)
Line 2: SEC-Z514MGXCS3(101308360)
Shutter: Yes
RGA: Manual Valve(100377244)
Vacuum Gauge: BPG402-SD (100343760)
Position r3: 
Chamber Description: SIS Ta
Magnet: 1229(100266154)
Pedestal: Silicone-290-TCA-NT-02(100904333)
Process Kit: LSA130.7 Al Arc-spray Process
Ion Refractor: 101422088
Shield Ring: 101422089
Shield Ring: 101422092
Shield Ring: 101422090
Ring: 101422091
Dummy wafer: 101421990
Power Supplies
DC: (2) Pinnacle (p/n 3152420-122L)
RF: MKS GHW-12(101414445)
Gas
Line 1: SEC-Z514MGXCS3(101308355)
Line 2: SEC-Z514MGXCS3(101308360)
Shutter: Yes
RGA: Manual Valve(100377244)
Vacuum Gauge: BPG402-SD (100343760)
Position f1: 
Chamber Description: H2 plasma/RF Etch
Pedestal: KTMS-300N-A-1 (100253659)
Kit information: as below
Shield Ring: 101421997
Shield Ring Lower: 101421996
Conductance Hex Plate: 101421992
Electrode Quarts Ring: 101421985
Quartz Ring: 101421986
Power Supplies
RF:
MKS GHW-25(101414443)/
MKS GHW-12(101414445)
Gas
Line 1: SEC-Z514MGXCS3(101308366)
Line 2: SEC-Z514MGXCS3(101308355)
RGA: Manual Valve(100377244)
Position f4: 
Chamber Description: H2 plasma/RF Etch
Pedestal: KTMS-300N-A-1 (100253659)
Kit information: as below
Shield Ring: 101421997
Shield Ring Lower: 101421996
Conductance Hex Plate: 101421992
Electrode Quarts Ring: 101421985
Quartz Ring: 101421986
Power Supplies
RF:
MKS GHW-25(101414443)/
MKS GHW-12(101414445)
Gas
Line 1: SEC-Z514MGXCS3(101308366)
Line 2: SEC-Z514MGXCS3(101308355)
RGA: Manual Valve(100377244)
Position f2: 
Chamber Description: Sputtering Chambers
Vacuum Inverter: ZSE80F-A2L-B-M
Pedestal: CIP
Pumps
Turbo: TMP-403 LM(100064510)
Pressure Monitoring
Ion Gauge: BPG402-SD (100343760)
Pirani Gague: BPG402-SD (100343760)
Kit information: N/A
Heater: Halogen Heater
Gas: N/A
RGA: N/A
Position f3: Existu Degas
Chamber Description: Sputtering Chambers
Vacuum Inverter: ZSE80F-A2L-B-M
Pedestal: CIP
Pumps: N/A
Turbo: TMP-403 LM(100064510)
Pressure Monitoring
Ion Gauge: BPG402-SD (100343760)
Pirani Gague: BPG402-SD (100343760)
Kit information: N/A
Heater: Halogen Heater
RGA: N/A
Position B1: 
Pumps: N/A
Turbo: TMP-403 LM(100064510)
Vacuum Gauge: BPG402-SD (100343760)
Position B2: 
Pumps: N/A
Turbo: TMP-403 LM(100064510)
Vacuum Gauge: BPG402-SD (100343760)
Remote Options: 
Equipment Rack: All cables enclosed within the rack
Heat Exchanger: (2) Risshi FL-111 Chiller(100645821)
Additional Monitor for service area: 2
Facilites Options: 
CTC Rack : Not external to main foot print of tool.
Electrical Requirements: 208V AC  60 Hz
Electrical runways : Covered and enclosed
RF,DC,AC, and Communication: Cables to be segregated into and throughout tool.
Safety lables: English & Chinese
Additional Options: 
System Manuals
Standard Option Manual: Included
Cleanroom Option Manual: Included
One manual set in CD-ROM.: Included
4 Signal Light Tower: Included
EMO: Turn to release
System water leak and smoke detectors.: Water Yes
Smoke Yes
Mechanical/electrical switches on H2 gas covers: Included
FI Alignment and Leveling Tool Kit: N/A
Pumps: Edwards iH80 
Baratrons: MKS (100061990)
Cryo Compressor: Ulvac[C30PZ](100326271)
Lines: 75 Feet Lines
Missing/Damaged Parts List:
None report, please inspect tool to reconfirm

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