Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
Etch/Ash/Clean - Plasma Processing
Date of Manufacture: 2012
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: Currently Available
Tool config is based on original PO, please verify tool details at tool inspection
Tool Model: KIYO E series (V2 platform)
Process: Poly
Software Version (include revision #): 1.8.4 SP11-HF5
System Power Rating: 208 AC 3-Phase
Loading Configuration: 3 Load ports
Chm/Unit Position 1: Versys Kiyo E Serie; SiCl4, Cl2, HBr, CF4, He, Ar, CH2F2, 30%He/O2, NF3, N2, SO2, SF6, CHF3, O2
Chm/Unit Position 2: Versys Kiyo E Serie; SiCl4, Cl2, HBr, CF4, He, Ar, CH2F2, 30%He/O2, NF3, N2, SO2, SF6, CHF3, O2
Chm/Unit Position 3: Versys Kiyo E Serie; SiCl4, Cl2, HBr, CF4, He, Ar, CH2F2, 30%He/O2, NF3, N2, SO2, SF6, CHF3, O2
Chm/Unit Position 4: Versys Kiyo E Serie; SiCl4, Cl2, HBr, CF4, He, Ar, CH2F2, 30%He/O2, NF3, N2, SO2, SF6, CHF3, O2
2300 System
2300 E4: 2300 e4
Wafer Size: 300 mm wafers
Wafer Config: SEMI
Cassette Type: 25 Slot Cassette
Process Module Position and Quantity: 2300 Versys Kiyo E Series (PM1,2,3,4)
Gas Box Type: IGS
2300 Process Module
Chamber Type: Versys Kiyo E Series
2300 Versys Kiyo E Series
Chamber Options: PTK
Window: Temperature Controlled Window
Window Type: HP Crystal Window (-868)
Injector : Coated Ceramic Injector (-213)
Injector Shield : Standard Bayonet Style
Gas Weldment: Coated (-807)
Injector Shield: Standard Injector Shield
Plasma Screen: Enhanced (-035)
Gas Weldment: Original (-103)
Liner: SRC Enhanced Grounded (-866)
Gas Feed: Top & Side
TCP Source: Continuous Plasma 2000W
TCP Coil Support: Enhanced
Bias Match: 1.5kW HVBP Sync
Electrostatic Chuck: EPX ERMZ (-611) - ESC
ESC Facility Plate: Comp Fac Pl With Routing
ESC Hose Kit: Low Temp
Wafer Lift Mechanism: Prime Movers
Voltage Control Interface: 1200V Pulsed Compatible
High Bias Kit: Yes
Edge Ring: Single Piece Quartz
300MM Turbo Pump: 2700 L/s BOCE
Endpoint Detection: OES2 Sync
Chamber Viewport Window: Standard
High Speed Data Acquisition: No
Heated Foreline Clamp Cover: Yes
Chamber Isolation Valve: Barrier Seal Door
Vacuum Valve: Viton
Lower Isolation Valve: Valqua (-009)
Chamber Manometer: Alternate (-011)
Chamber Manometer Filter: None
He UPC: Enhanced
Water Control: Passive RF PCW Control
PCW Hoses: Chemical Resistant
Exhaust Duct: Reduced Profile (-402)
Service Covers: Standard
Pump to TCU: Pump to TCU, 50ft
TCU to PM: TCU to PM, 100ft
PM to Pump Interconnect: Pump to PM, 100ft
TCU to RPDB: TCU to RPDB, 25ft
Pump to RPDB: Pump to RPDB, 25ft
Non-Standard PM Feature: NSR101590,Replace -658 ring w/-662 Combo; NSR101555, Replace Crystal window w/-833; NSR101260,Add 4ea,-111e-seals f-611 esc; NSR102453,Replace-009VIOPIIIPCBw-010EX
Gas System (JetStream)
Mounting Location: Transport Module
Door: Window
Primary Valve Options: Lock-Out Tag-out Manual Valve
Facility Box Connection: Top Gas Connection
Facility Box Containment: Standard Containment
Facility Box Regulation: Regulated with Filter
Facility Box Filter: Standard Filter
Future PM: Position 1, 2, 3, 4
2302 Kiyo E Series JetStream Gas Box Options
Heated Gas Lines: Heated Lines, Pos 1 & 2
Gas Line 1: MFC, SiCl4 100 SCCM
Gas Line 2: MFC, Cl2 500 SCCM
Gas Line 3: MFC, HBr 500 SCCM
Gas Line 4: MFC, CF4 400 SCCM
Gas Line 5: MFC, BCl3,200 SCCM
Gas Line 6: MFC, He 500 SCCM
Gas Line 7: MFC, CH2F2 200 SCCM
Gas Line 8: MFC, Ar 1000 SCCM
Gas Line 9: MFC, 30%O2/He 50 SCCM
Gas Line 10: MFC, NF3 1000 SCCM
Gas Line 11: MFC, N2 (Process Grade) 250 SCCM
Gas Line 12: MFC,SO2,200 SCCM
Gas Line 13: MFC, SF6 200 SCCM
Gas Line 14: MFC,CHF3,200 SCCM
Gas Line 15: MFC, O2 500 SCCM
Gas Line 16: not use
Tuning Gas1: not use
Side He Ballast: MFC, He 200 SCCM
Gas Box Configuration
Gas Box Inlet Option: Regulated Inlet Gas Panel
2300 Platform
ATM, Factory Automation: OHT PIO Sensor
ATM Input Buffer Station: 25 Slot
ATM, CTC Computer, Storage: Hard Disk Drive - Mirrored
VTM Loadlock A: Standard
VTM Loadlock B: Standard
Subpanel: RPDB
Signal Tower: R-O-G-B Signal Tower
Pre-Facilities
RPDB: Backing Pump CB Sizes: 40A
RPDB: TCU CB Sizes: 40A
Damage/Missing parts list
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sales
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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