Macquarie Semiconductor and Technology on behalf of Macquarie Electronics USA Inc.
PECVD (Chemical Vapor Deposition)
Date of Manufacture: 2014
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: San Jose, United States
Available date: TBD
CVD 15-3AMAT_PRGT_FCVDO3_02 AMAT PRODGT FCVDO3
Missing or damaged parts: Fab15 confirmed there were no missing or damaged parts.
Configuration & Photos Available. For further details of the configuration, please ask your sales person.
| Vendor Chm Model | Chemicals / Gases Used (not to use Micron Proprietary names) | ||||
| Chm/Unit Position 1 | ETERNA FCVD Twin | N2,NF3,Ar,O2,TSA,He,NH3,H2O | |||
| Chm/Unit Position 2 | SACVD Twin | N2,NF3,Ar,O3,O2,H2O,TEOS,He | |||
| Chm/Unit Position 3 | ETERNA FCVD Twin | N2,NF3,Ar,O2,TSA,He,NH3,H2O | |||
| Chm/Unit Position ___ | _______________________ | __________________________________ | |||
| Chm/Unit Position ___ | _______________________ | __________________________________ | |||
| Chm/Unit Position ___ | _______________________ | __________________________________ | |||
| Chm/Unit Position ___ | _______________________ | __________________________________ | |||
| Refer to ADCS to extract the Doc 2 to update the Tool/System Configuration accordingly. | |||||
| (Tool owners require to ensure the physical tool configuration tally to what is listed) | |||||
| System Configuration | |||||
| Description | |||||
| Tool: | |||||
| Process Unit: | Model: | Remark | |||
| Controller: | N/A | ||||
| MFC/Pressure Unit: | STEC（Z700series） | ||||
| Drive Mechanisms: | N/A | ||||
| FOUP Opener: | Sinfonia | ||||
| Gas System: | N/A | ||||
| Exhuast System: | N/A | ||||
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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