Macquarie Semiconductor and Technology on behalf of Macquarie (Asia) Pte Ltd. - UMC
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PECVD (Chemical Vapor Deposition)
Date of Manufacture: 2006
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Singapore, Singapore
Available date: Currently Available
Inspect to confirm configuration and condition.
General System Info
Equipment ID: SINCUR-01
Date of Audit: 11-Feb-2022
Serial Number: D12149A
Original Ship Date from Novellus: 2006
System Software Version: 5.33B24
Date of Last PM: 7-Feb-2022
Is System On-Line?: Yes
Off-Line Date (if applicable): NA
CD-ROM Manuals: No
OEM Audit Available?: Yes
Decontamination Report Exists?: No
Can Produce Wafers AS IS?: Yes
Any Known Field Modifications?: No
All Cables Present?: No
Model: Vector SOLA
Mainframe Items
Front-End Interface: 3 LPs
Wafer Size: 12"
Factory Automation: OHT
Robot Type: Brooks ATR8
Facilities Configuration: Bottom
Remote Interconnect Cable Length: 75”
Primary User Interface Loc.: Left
Chamber Items
Chamber Type and Position: Sola type / N.A
High Frequency Generator: NA
Low Frequency Generator: NA
Cooling Shroud Kit: No
Pressure Display Package: No
Spindle: Pneumatic
LL Pedestal: Pneumatic
Helium Reduction Kit: No
Lift Pin: Pneumatic
Pedestal Type: Standard pedestal
Gate Valve Type: L-TYP PM
Heated Manometer: No
Heated Top Plate: No
Heated Chamber: No
Leak-Check Shutoff Valve: Yes
Remote Plasma Clean: No
RF Switching Plasma Treatment Hardware: No
Optional Processing Kit: NA
Number of Precursors: 1
ILDS Channels and Gaslines: NA
AccuFlo: No
Active Wafer Monitoring: No
Station 1 Gas Isolation: No
Four View Port: No
Dep Chamber Roughing Pumps
Manufacturer: Edwards
Model: iH1800
Quantity Required: 1
Included With System: Yes
Load Lock Pump
Manufacturer: Edwards
Model: EPX180L
Included With System: Yes
Gas Panel Configuration
Gas Pallet Type: Standard gas box
Gas Configuration
Gas Line # : Gas | Flow (sccm) | MFC Mfgr. | MFC Model
Gas Line #1 : Ar | 50K ________ | Aera ______ | FC-D980C
Gas Line #2 : O2 | 100K ______ | Aera ______ | FC-D980C
Gas Line #3 : He | 100K ______ | Aera ______ | FC-D980C
Damage/Missing parts list
Please inspect tool to reconfirm
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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