Macquarie Semiconductor and Technology on behalf of Macquarie (Asia) Pte Ltd. - UMC

Novellus Systems Inc. VECTOR SOLA UV Cure

Asset ID: 210200

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Novellus Systems Inc.

VECTOR SOLA UV Cure

PECVD (Chemical Vapor Deposition)

Deposition Equipment

Equipment details:

Date of Manufacture: 2006

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Singapore, Singapore

Available date: Currently Available



Inspect to confirm configuration and condition.


General System Info

Equipment ID: SINCUR-01

Date of Audit: 11-Feb-2022

Serial Number: D12149A

Original Ship Date from Novellus: 2006

System Software Version: 5.33B24

Date of Last PM: 7-Feb-2022

Is System On-Line?: Yes

Off-Line Date (if applicable): NA

CD-ROM Manuals: No

OEM Audit Available?: Yes

Decontamination Report Exists?: No

Can Produce Wafers AS IS?: Yes

Any Known Field Modifications?: No

All Cables Present?: No


Model: Vector SOLA


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Mainframe Items

Front-End Interface: 3 LPs

Wafer Size: 12"

Factory Automation: OHT

Robot Type: Brooks ATR8

Facilities Configuration: Bottom

Remote Interconnect Cable Length: 75”

Primary User Interface Loc.: Left


Chamber Items

Chamber Type and Position: Sola type / N.A

High Frequency Generator: NA

Low Frequency Generator: NA

Cooling Shroud Kit: No

Pressure Display Package: No

Spindle: Pneumatic

LL Pedestal: Pneumatic

Helium Reduction Kit: No

Lift Pin: Pneumatic

Pedestal Type: Standard pedestal

Gate Valve Type: L-TYP PM 

Heated Manometer: No

Heated Top Plate: No

Heated Chamber: No

Leak-Check Shutoff Valve: Yes

Remote Plasma Clean: No

RF Switching Plasma Treatment Hardware: No

Optional Processing Kit: NA

   Number of Precursors: 1

   ILDS Channels and Gaslines: NA

   AccuFlo: No

Active Wafer Monitoring: No

Station 1 Gas Isolation: No

Four View Port: No


Dep Chamber Roughing Pumps

Manufacturer: Edwards

Model: iH1800

 Quantity Required: 1

Included With System: Yes


Load Lock Pump

Manufacturer: Edwards

Model: EPX180L

Included With System: Yes


Gas Panel Configuration

Gas Pallet Type: Standard gas box 


Gas Configuration

Gas Line # : Gas | Flow (sccm) | MFC Mfgr. | MFC Model

Gas Line #1 : Ar | 50K ________ | Aera ______ | FC-D980C

Gas Line #2 : O2 | 100K ______ | Aera ______ | FC-D980C

Gas Line #3 : He | 100K ______ | Aera ______ | FC-D980C



Damage/Missing parts list

Please inspect tool to reconfirm

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Product Images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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