Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

KLA-Tencor Corp. Archer 300 AIM

Asset ID: 51905

Print spec sheet

KLA-Tencor Corp.

Archer 300 AIM

Overlay Measurement System

Metrology Equipment

Equipment details:

Date of Manufacture: 2012

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

Process: REGSO


Tool config is based on original PO, please verify tool details at tool inspection


Operating System: Windows XP

Archer Software: 12.00.18.30200


Handler info:: 

Handler Software version:: V11.308.2.30825

AMHS Cmd:: FALSE

Cassette Load Cmd:: FALSE

Interactive Safety Shield:: FALSE

Ionizer:: FALSE

Manual Button:: TRUE

Mini Env:: FALSE

Notify Port Load Events:: TRUE

Notify Wafer Events:: TRUE

Quad FIMS:: FALSE

S3 Load Ports:: TRUE

Load ports:: 3

Fingers:: 2

Aligners:: 1

Stages:: 1

Garage slotes:: 0

Cassette mapper:: Door


STANDARD SPECIFICATIONS

Basic System : Archer300 Triple FOUP

Fully automated overlay measurement module : yes

Software: yes

19" LCD screen: yes

3.5 inch floppy drive: USB Port

CD ROM drive: DVD

Tape Drive back up system (DAT): N/A

Video Hard Copy Printer: yes

Network ready: yes


Tool Options

Electrical Wiring, US : yes

Electrical Wiring, Japan : no

Electrical Wiring, Europe : no

15 meters machine power cable : 40 meters

EMO Shield: yes

Archer 02S & 03 Painted Skins: yes

Light Curtain with Saftey Skirt Double FOUP: yes

CMP Measurment (CPM+ANRA): yes

Signal tower- 4 Lamps 40mm: yes

GEM/SECS and HSMS: yes

E84 enabled for OHT & AGV/RGV: yes

Two PIO devices for OHT: yes

E87 (Based on E39): yes

E40/E94/E90: yes

Three Hermos SingleWire CID, G4: yes

RDM Machine Client SW & Lic: yes

AA & RDM install on AU Server/Need One per Fab : yes

AA On-Tool Client CD & License: yes


Damage/Missing parts list

optical column (FRM) damage- illumination lens element damage,wait replace FRM 

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales 

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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