Macquarie Semiconductor and Technology on behalf of Macquarie (Asia) Pte Ltd. - UMC
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Date of Manufacture: 11/2003
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Singapore, Singapore
Available date: Currently Available
Inspect to confirm configuration and condition.
General System Info
Date of Audit: 14-Feb-22
Serial Number: 1-05-VSD-1341-BR-06
Original Ship Date: 2003
Wafer Size (inches): 12
Loading Configuration: FOUP
Operating System Software Version: OS2
Rudolph Software Version: 7.51
User ID: RTIENG
Login: RUDENG
Date of Last PM: 2018
CE Mark Certified? No
Electrical Requirements: 200/220V Single phase
OEM Audit Available? No
Can Produce Wafers AS IS? No
Any Known Field Modifications? No
All Cables Present? No
Shipping Brackets Installed upon Deinstall: No
GEM/SECS Interface: Yes
3.5” Floppy Drive: Yes
Hard Disk Size: unknown
System Configuration
Matrix Series: S-300
Key Common Options
Clean Room Manuals: No
Standard Manuals: No
CD-ROM Manuals: No
Calibration Standards: No
Matrix Series
Loading Configuration: Dual FOUP
Lasers: 633nm HeNe / 458nm Ar / 780/905nm Solid State
Operating Wavelengths:
DUV: 190-470nm
OMA: 470-905nm
Pattern Recognition Hardware: No
COGNEX Type
Spot Optic Sizes (um): 100,30,15
Damage/Missing parts list
Please inspect tool to reconfirm
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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