Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Edwards iH1000SC

Asset ID: 209426

Print spec sheet

Edwards

iH1000SC

Dry Pump

Support Equipment (Fab)

Equipment details:

Date of Manufacture:

Currently Configured for: N/A

Current Equipment Status: Available

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

Qty 1- Not overhaul (pump controller is not included)


AreaAsset descriptionoverhaulFixed Asset No.S/NLocationFAB
FSIH1000SCN3DJY40207700106429993A12-1.5FAB B


Technical data

60 Hz Peak speed (m3 /h) : 1000

60 Hz Ultimate vacuum (torr) : 7.5 x 10-4

50 Hz Peak speed (m3 /h) : 950

50 Hz Ultimate pressure (torr) : 1.5 x 10-3

Typical shaft seal nitrogen flow (slm) : 4

Cooling typical water flow at 15psi drop: 4 l/mn

Inlet connection : ISO100

Outlet connection : NW40

Noise Level : <69 dB(A)

Weight : 430 kg

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