Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
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Etch/Ash/Clean - Plasma Processing
Date of Manufacture: 2010
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: Currently Available
Tool config is based on original PO, please verify tool details at tool inspection
Model No. 2300
FI SN: 1017439-10-06-0510
Model No. 2300 EXELAN/ 2300 EXELAN FLEX
Ch1 SN: R23EX0318(F125758-PM1)
Ch2 SN: R23EX0319(F125758-PM2)
Ch3 SN: R23EX0818(F125758-PM3)
Ch4 SN: R23EX0649(F125758-PM3)
Tool Model: EXELAN
System Power Rating: 208 AC 3-Phase
Loading Configuration: 3 load ports
Chamber PM1: EXELAN, Chamber Chemicals Gases Used: C4F8, C4F6, CHF3, CF4, O2, CH2F2, O2/He, H2, Ar, N2
Chamber PM2: EXELAN, Chamber Chemicals Gases Used: C4F8, C4F6, CHF3, CF4, O2, CH2F2, O2/He, H2, Ar, N2
Chamber PM3: EXELAN, Chamber Chemicals Gases Used: C4F8, C4F6, CHF3, CF4, O2, CH2F2, O2/He, H2, Ar, N2
Chamber PM4: EXELAN, Chamber Chemicals Gases Used: C4F8, C4F6, CHF3, CF4, O2, CH2F2, O2/He, H2, Ar, N2
Optional Gas Custom Gas Lines TOR
#1: C4F8, 50sccm
#2: C4F6, 100sccm
#3: CHF3, 150sccm
#4: CF4, 300sccm
#5: CF4, 1000sccm
#6: O2, 150sccm
#7: CH2F2, 100sccm
#8: 30%O2/He, 100sccm
#9: H2, 500sccm
#10: Ar, 1000sccm
#11: N2, 1500sccm
#12: O2, 3000sccm
#13: Not used
#14: Not used
#15: Not used
#16: Not used
#Tunning Gas: 30%O2/He, 50sccm
Damage/Missing parts list
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sales
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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