Macquarie Semiconductor and Technology on behalf of Analog Devices, Inc.

Accurate Gas Control Systems, Inc AGT354

Asset ID: 209784

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Accurate Gas Control Systems, Inc

AGT354

Chiller/Heat Exchanger

Support Equipment (Fab)

Equipment details:

Date of Manufacture:

Currently Configured for: To be determined

Current Equipment Status: Available

Location of Equipment: Milpitas, United States

Available date: Currently Available

Unit 4ea


AGT Recirculator

The AGT Recirculator contains an environmentally friendly non-CFC refrigeration system, a high output heater, and positive displacement pump.

Accurate and stable (1C) temperature control is achieved by modulating the net cooling power via a digitally controlled heater and a large reservoir serving as a thermal flywheel. The reservoir is easily accessible for filling purposes and checking circulation.

The AGT-Series Recirculators

The AGT-Series Recirculators are capable of removing or adding heat to a remote source by regulating and controlling a wide range of temperatures of a Closed-Loop circulating liquid. Wasting of water is eliminated with use of the AGT Recirculators when connected to Cylinder Gas Sources. Common applications include Temperature Control for Etch and CVD Process Gases, Vacuum Pumps, Reactor Flanges, MFC’s, Power Supplies, Condensers, and Turn-Key Gas Delivery Systems.

The AGT-Series Recirculators in conjunction with the AG-J Heat Exchange Jackets regulate and control temperatures of Gases contained in any size or type Cylinder.

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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