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Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

DAS ESCAPE DUO

Asset ID: 209458

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DAS

ESCAPE DUO

Chemical/Gas Treatment System

Support Equipment (Fab)

Equipment details:

Date of Manufacture:

Currently Configured for: N/A

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

Qty 29- Not overhaul (controller is not included)


AreaAsset descriptionoverhaul資產序號S/Nlocation
FSESCAPE DUON3DJY037Q1500-003/10/52141A13.5-10.5
FSESCAPE DUON3C53DA014300-003/08/51663A12-3
FSESCAPE DUON3C53DA011200-003/07/51610　
FSESCAPE DUON　03/04/5880A13-4
FSESCAPE DUON3C53DA010100-003/07/51602A14.5-10
FSESCAPE TWINN　03/03/5783A8.5-5.5
FSESCAPE TWINN　03/03/5780A10-5.5
FSESCAPE DUON3A53DA013100-003/04/5920A9-4
FSESCAPE DUON3A53DA016600-003/06/51144A10-3.5
FSESCAPE DUON　03/04/5883A7.5-9
FSESCAPE DUON　03/05/51046A8-9.5
FSESCAPE DUON3A53DA016500-003/06/51162A10-10.5
FSESCAPE DUON3D53DA012700-003/10/52035A21-7
FSESCAPE DUON3D53DA013200-003/10/52041A10.5-4.5
FSESCAPE DUON3HJR037Q3800-0AD3-14-3405A10.5-4.5
FSESCAPE DUON3C53DA014800-003/08/51652A15.5-8.5
FSESCAPE DUON3D53DA013800-003/10/52138A12.5-4
FSESCAPE DUON3B53DA014600-003/06/51285A3.5-4.5
FSESCAPE DUON3B53DA01B500-003/07/51436A4.5-4
FSESCAPE DUON3C53DA012100-003/08/51685A2.5-3.5
FSESCAPE DUON3B53DA01A200-003/07/51431A1.5-8
FSESCAPE DUON3B53DA017700-003/07/51379A1.5-7.5
FSESCAPE DUON3B53DA013800-003/06/51241A1.5-5.5
FSESCAPE DUON3B53DA016400-003/06/51243A4-7.5
FSESCAPE DUON3D53DA010300-003/09/51981A2-5
FSESCAPE DUON3B53DA016300-003/06/51267A1.5-6
FSESCAPE DUON3B53DA018300-003/07/51371A8.5-11.5
FSESCAPE DUON3C53DA012900-003/08/51683　
FSESCAPE DUON3D53DA012800-003/09/52032　



Technical Data

  • Dimensions (W x D x H): 1650 mm x 675 mm x 1800/2070 mm
  • Access to maintenance area on front and back side
  • Gas entry: max. 4x DN25 or DN40
  • Gas outlet: max. 2 x DN100

Specifications

  • Up to 2 independent waste gas and backup lines per reactor
  • Operation time > 99% through backup function
  • Second reactor allows uninterrupted operation during maintenance
  • Runs with different fuel gases and scrubber liquids
  • Low water consumption through closed-loop design
  • Available in two sizes


Product images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.

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