Macquarie Semiconductor and Technology on behalf of Micron Memory Taiwan Co., Ltd. (F16)

Edwards Atlas Etch

Asset ID: 209435

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Atlas Etch

Abatement - Scrubber

Support Equipment (Fab)

Equipment details:

Date of Manufacture:

Currently Configured for: N/A

Current Equipment Status: Available

Location of Equipment: Taichung City, Taiwan

Available date: Currently Available

Excess itemsVendorModelQty
AbatementEDWARDSAtlas Kronis MK3B10
AbatementEDWARDSAtlas TCS MK31
AbatementEDWARDSAtlas TPU MK3B4
AbatementEDWARDSAtlas TPU2S MK21
AbatementEDWARDSHelios4 +s/m2
AbatementEDWARDSLegacy TPU2S + WRU5
AbatementEDWARDSLegacy TPU2S + SM + WESP1


Atlas™ from Edwards: the range of combustion gas abatement solutions that offers semiconductor, flat panel display, Solar and MOCVD manufacturers reduced operating costs and enhanced ease-of-use. Atlas abatement technology specific to your process:

• Atlas TCS for common CVD gases (NF3/F2)

• Atlas TPU for PFC gases (ClF3, C2F6, C3F8) in CVD processes

• Atlas Kronis for the low-k CVD gases in next-generation processes

• Atlas Etch for semicon etch and flat panel display processes (CF4, SF6 and high flow PFC’s)

• Atlas Helios for safe treatment of hydrogen processes in epitaxy and MOCVD

Features and Benefits

• Low cost of ownership —— Low fuel consumption & Reduced running costs

• Excellent powder handling

• Excellent corrosion resistance

• Outstanding reliability, even on the harshest applications

• Ease of maintenance

• Third party certification —— SEMI® S2, CE marked, ETL listed

• Unrivalled abatement performance for deposition and clean gases

• Flame retardant plastic used in wet stage —— No corrosion from acidic by-products & Lower risk of thermal discharge

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.

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