Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, K.K. (F15)

Accretech/TSK UF3000

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Asset ID: 40094

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Accretech/TSK

UF3000

Production Wafer Prober

Wafer Prober

Equipment details:

Date of Manufacture: 2006-01-11

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: Currently Available

Tool is operating in clean room.

Missing or damaged parts: Fab15 confirmed there were no missing or damaged parts.


UPDATED CONFIGURATION:


Connected with an Agilent 4073B tester.

Temperature range: 40℃~150℃

Configured for Ambient/Hot temperatures. 

To operate up to 150℃.

Chuck Type: Low Noise Chuck.

Chuck MFG: NOV-06.

Tester Interface: Connected on GP-IB between Prober and Tester.

Tool corresponds with Tester on GP-IB.



============= OEM Feature as below for reference ================

Overall Accuracy Within 2 µm

X,Y Stage Accuracy:±1.0µm

Stage Durability:200kgf

Wafer Size 8", 12"

X/Y axis Probing Area ±170 mm (X/Y axis Probing Area)

X/Y axis Maximum Speed X axis 300 mm/s Y axis 230 mm/s

Z axis Full Stroke 37 mm

Z axis Maximum Speed 30 mm/s

θ axis Rotation Range ±5 deg.

Fine Alignment CCD ITV Image Processing

Loader Cassette Mounts 1 (2nd cassette with option)

Loader Wafer Handling Robot Arm / Backside Holding

Hard Disk 3.5" 20GB (1 unit standard)

Floppy Disk 3.5" 2HD / 2DD (1 unit standard)

MO 230 / 540MB (1 unit standard)

Display 12.1" TFT Color LCD

Power Consumption Less than 2kVA

Air Supply Source Pressure 0.6 MPa or more

Air Supply Consumption Approximately 0.1 liters / wafer

Vacuum Supply Less than -80 kPa, 30 liters / minute

Dimensions 1508W × 1587D × 987 H mm

Weight 1500 kg (Standard)

Product images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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