Macquarie Semiconductor and Technology on behalf of Micron Technology, Inc. (VA)

Cascade S300

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Asset ID: 209938

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Cascade

S300

Engineering Wafer Prober

Wafer Prober

Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Manassas, United States

Available date: Currently Available

Tool ModelS300-973-HT/ERS SP72 300
ProcessProbe
Software VersionNucleus 3.3.6
System Power Rating110 AC
Loading Configuration1 for temp controller and 5 for bench and controller
Any equipment manuals available?  No
System configuration
main prober with microscope/ key board/joy stick
controller PC for nucleus software
1 external display
air cooler system (ERS air cool system, temperature range is from 0 to 300C)
 4 micro manipulator and probe card holder are included
Probe Station Performance 
X-Y Stage 
Travel: 301mm x 301mm (11.9 in. x 11.9 in.)
Resolution: 0.1 µm (0.004 mils)
Repeatability: ≤ 2 µm (0.08 mils) Speed: > 51mm/sec (2 in./sec.)
Accuracy: ≤ 4 µm (0.16 mils)
Bearings: Precision ball
Z Stage 
Travel: 10.0mm (395 mils)
Resolution: 1 µm (0.04 mils)
Repeatability: ≤ 3 µm (0.12 mils)
Speed: >15mm/sec (0.6 in./sec.)
Lifting capacity: ≤ 15kg (33 lb.) *
*Measured at edge of 300mm chuck
Theta Stage 
Travel: ± 7.5 degrees
Resolution: 0.5 µm (0.02 mils)*
Repeatability: ≤ 3 µm (0.12 mils)*
*Measured at edge of 300mm chuck
Chuck 
Size: 304mm (12 in.) diameter
2 integrated auxiliary stages: Multi-Zone vacuum controls
Flatness: thermal chuck < 30 µm; non-thermal 15 µm
Platen 
Z lift range: 3mm (0.12 in.)
Z lift type: Precision 4-point Linear
Repeatability: ≤ 3 µm (0.12 mils)
Facility Requirements 
Vacuum: 400mm (15 in.) of Hg min.
Dry air purge: (thermal systems only) 3 liters per sec.
(6 SCFM) with dew point of <-65ºC Compressed air : 0.5 litres/sec (1-CFM @85 psi. min.)
Power: 115 V @ 2 A, 230 V @ 1 A 50/60Hz
Dimensions 
Station: 132cm (W) x 113cm (D) x 108cm (H) (52 in. x 44 x 41 in.)
Net weight: 780 kg (1,720 lb.) including optics bridgemount
Regulatory Compliance 
All S300 series stations conform to CE mark and are ETL listed.


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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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