Macquarie Semiconductor and Technology on behalf of Micron Technology Utah, LLC
WCVD (Chemical Vapor Deposition)
Date of Manufacture: 2017
Currently Configured for: 300mm
Current Equipment Status: Incoming
Asset HDD not included
Location of Equipment: Lehi, United States
Available date: 1/1/2022
| Vendor Tool Serial # | 1000269-17-22-0013 | |
| Date of Tool Move-In | 13-Sep-17 | |
| OEM | Novellus | |
| Tool Model | DirectFill WN Max | |
| Process | WNx | |
| Software Version | 7.1B5P3 | |
| System Power Rating | 208 AC 3-Phase 60 Hz | |
| Loading Configuration | 2 Load Ports | |
| Description | Chemicals / Gases Used | |
| Chm Position 1 | WN Module 1 | Ar, NF3, WF6, NH3, B2H6 |
| Chm Position 2 | WN Module 2 | Ar, NF3, WF6, NH3, B2H6 |
| Chm Position 3 | Pre Clean Max Module 1 | Ar, N2, H2 |
| Chm Position 4 | Pre Clean Max Module 2 | Ar, N2, H2 |
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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