Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, K.K. (F15)

LAM Research 2300 Coronus

Asset ID: 209925

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LAM Research

2300 Coronus

Wafer Edge Cleaning - Plasma

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture:

Currently Configured for: To be determined

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: Currently Available

OEM  LAM Research
Tool Model  2300CORO
Process  Clean(Plasma Bevel Etcher)
Software Version (include revision #) Ver.1.8.4
System Power Rating  200 AC 3-Phase for System
Loading Configuration  3 Load Port
Indicate all modification/conversion/retrofit parts and high cost part replacement history (e.g robots, ESC, Heaters, etc)
Part Type  Part Description :Part number:Date of Change:QtyRemark
PM2 Gap driver   685-083999-002Nov-201PM1/3 isn't exchange.
PM2 Gap stepping motor   676-052057-012Nov-201PM1/3 isn't exchange.
Connect Cable  driver~stepping motor853-052857-083Nov-201PM1/3 isn't exchange.
mounting plate  used to drive714-A00346-001Nov-201PM1/3 isn't exchange.
Connect Cable  mother borad~driver853-348904-002Nov-201PM1/3 isn't exchange.
   Vendor Chm ModelChemicals / Gases Used (not to use Micron Proprietary names)
Chm/Unit Position   1  Clean(Plasma Bevel Etcher)N2/O2/Ar/CF4/SF6
Chm/Unit Position   2  Clean(Plasma Bevel Etcher)N2/O2/Ar/CF4/SF6
Chm/Unit Position   3  Clean(Plasma Bevel Etcher)N2/O2/Ar/CF4/SF6
DescriptionLP, ATM, VTM, AL, PM1/2/3, RPDB   Qty
Process Unit:PM1/2/3 Model:2300CORORemark  
MFC/Pressure Unit:STEC SEC-Z313[N2(200), O2(1000), CF4(200), Ar(500), SF6(200)]   
Drive Mechanisms:Brooks ATM robot / Brooks MagnaTran7   
FOUP Opener:Brooks Load Port     
Gas System:Onborad gas line     
Exhuast System:NA     
*All OEM cable connecting between FAB to SubFab are require to be list out (Include length in mm)   
Process Modules     3
Load Port     3
ATM     1
VTM     1
RPDB     1

Missing or damaged parts: Looks like some parts are missing. Fab15 is checking now.

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.

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