Macquarie Equipment Trading on behalf of Micron Technology Taiwan, Inc. (F11)

Tokyo Electron Ltd. TELINDY Plus ALD High-K

Asset ID: 7210

Print spec sheet

Tokyo Electron Ltd.

TELINDY Plus ALD High-K

Vertical Furnace

Furnaces/Diffusion Systems

Equipment details:

Date of Manufacture: 2010

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan City, Taiwan

Available date: Currently Available

Process: ALDZROX

Original PO Configuration. Audit to verify.

2.2- General Specification
Safety Specification:S2-0706/CE
Heater Model: Low-Temp VMM-56-201 4zone/150-600C without  RCU
Process Condition: LP
Process Temperature (C):300C
ART Control:None
N2 Load Lock:Yes
Wafer Type: 300mm-Si SEMI STD-Notch
Qty. of Production Wafers: 100wfr
Boat Operation: 2 Boat Type / 2 Boat Operation (B/S)
Software Version (WAVES): Ver. 6.07

3.1.1- Furnace Spec, Furnace
Dewpoint Meter for N2 LL: None
Loading Area Light: White (LED)
RCU Duct Length FNC - RCU: None
Ionizer (maker/model): None
Chemical PreFilter-Acid:None
Chemical PreFilter-Alkali: None
Chemical PreFilter-Hydrocarb: Yes
Chemical PreFilter-Location: Side FFU
Side Maintenance: None
O2 Density Control for N2 LL: Yes
O2 ANALYZER Maker: NGK, Model: SH-304 STANDARD
N2 Boat Shower Wafer Cooling: Yes
Furnace Temperature Controller: Model 560A

3.1.2- Furnace Spec, Wafer/Carrier Handling
Carrier Type: FOUP/25slots, SEMI STD
FOUP Maker/Model: Entegris/Spectra
Carrier Stage Capacity: 18 FOUP
Info Pad A,B: Pin
Info Pad C,D: Pin
Fork Material: Al2O3+PEEK
W/T Type: 1+4 Edge Grip
W/T Type A/T: None

3.1.3- Furnace Spec, Furnace Facilities
Furnace Exhaust Connection Poi: Top Connection
Cooling Water Connection Point:Bottom Connection
RCU DUCT Connection Point:N/A

3.2.1- Gas Spec,  Gas Distribution System
IGS Type: IGS 1.125"W-seal rail-mount        
IGS Maker:Fujikin    
Tubing Bends:Bend (Less than 90deg)                
IGS Final Filter:PALL                
IGS Regulator: CKD                
IGS MFC (Maker/Type):AE / Digital        
Water Vapor Generator(WVG):N/A            
IGS Press. Transducer: NAGANO            
Liquid Source Delivery- 3DMASi: AS-102S-B5/3DMASi 300sccm MCAC./ADVANCED ENERGY
Auto Refill System- 3DMASi:Customer Provided - Bulk 3DMASi delivery system CG325/CG400 GEN II or  CG325 GEN II    Scumacher-Chemguard
Auto Refill System Provider: Provided by customer                
Refill System Tubing interconn: Provided by customer                
Ozone Delivery System (Maker/M:"Maker: MKS
Model: AX 8575-29"        
Ozone Delivery System: Provider    customer        0        
Liquid Source Delivery- Zr:Onboard Zr bubbler, ergonomic version        
Liquid Source Delivery- X precursor: Onboard Ti bubbler, ergonomic version        
Liquid Source Delivery- TMA: Onboard TMA bubbler, ergonomic version        
HTR9.1,FLAT,AMPOULE,0DP0: Insulation, Ampoule, Top/9399-0975/MKS
HTR,INS,NBV,MAN KNOB:Insulation, Valve Knob,9599-0665/MKS
HTR2.5,STR6.21,SPEC,1EP0:Insulation, bypass,9525-0060/MKS
HTR2.0,STR5.5,SPEC,1EP0:Insulation, outlet,9520-0839/MKS
HTR2.0,STR5.5,SPEC,1EP0:Insulation, inlet,9520-0840/MKS
Wrap around valve heater (MKS):Valves heated by wrap around heaters supplied by Supplier        

3.2.2- Gas Spec,  Gas Facilities
Wrap around ampoule heater (GL:    Ampoule heated by wrap around heaters supplied by Supplier    
Incoming Gas Connection Point: Bottom Connection OPT: Ordering Fab must verify facility requirements and note any special requirements within the PO.
Gas VENT Connection Point: Bottom Connection OPT: Ordering Fab must verify facility requirements and note any special requirements within the PO.
Exhaust VENT Connection Point: Bottom Connection OPT: Ordering Fab must verify facility requirements and note any special requirements within the PO.
Gas Unit Exh Connection Point: Top Connection    
Process Gas Exhaust Connection    Bottom Connection: OPT: Ordering Fab must verify facility requirements and note any special requirements within the PO.

3.3.1- Exhaust Specification
Exhaust Pressure Control (AP): N/A
Exhaust Pressure Controller (A: N/A
Vacuum Exhaust System: 3inch Pipe
Trap: N/A
Vacuum Pressure Controller: CKD-VEC
Burn Out Unit: None

3.3.1- Exhaust Specificationbution
Vacuum Gage - Press Ctrl: MKS (Hot) Capacitance Manometer    
Vacuum Gage - Press Monitor (1: MKS (Hot) Capacitance Manometer    
Vacuum Gage - Pump Monitor:MKS (Hot) Capacitance Manometer    
Main Valve: CKD-Hi-Speed VEC    
Pump Maker/Model: EDWARDS/IXH1820, OPT: Pump is customer Provided. Ordering Fab must verify pump is purchased for all process chambers.
Pump Provided by: Provided by customer    
Abatement System Type: Burning Type    Abatement maybe different based on Fab specification.
Abatement System (Maker/Model): Orient service Co.,Ltd / GDO1862-WA    Abatement maybe different based on Fab specification.
Abatement System Provider: Customer    
N2 Dilution Unit Provided by: Customer    
Pump Power: Customer    
Pump Control Unit Setting Loca: Power Box Top    
Pump-FNC Vacuum Piping Provide: Customer    

3.4.1- Reactor Specification
Quartz Provided by: Optional, OPT: Ordering Fab must verify if Supplier is to provide,  if so QTY= 1. If Customer to provide then set QTY=0, Default = 0 note any special requirements within the PO.
Quartz Vendor Requirement: Must be Customer qualified supplier    
SiC Provided by:N/A    
SiC Vendor Requirement: N/A    
Liner Tube (AP):N/A    
Process Tube (AP, AP+Sub-AP):N/A    
Outer/Inner Tube Material: Quartz / Quartz    
Inner Tube Type (LP): Cross-flow inner tube Type with narrow slit and wider pitch tab is used (slit size 1007 mm)    
Inner T/C: Outer Tube interior wall type (for CVD)    
Tube Sealing: O-Ring    
Manifold Heater: Yes    
Switch Valve for Manifold Cool: Yes    
Soft Backfill Injector: Yes    
Boat Type: 117 slots Ladder (8mm pitch)    
Boat Material: Quartz    
Boat Rotation: Yes    
Pedestal Type: Quartz    
Cap Heater:Yes    
Auto Shutter: No Shutter Purge Type    
Earthquake Countermeasure: Yes,OPT: Ordering Fab must verify seismic requirements and note any special requirements within the PO.


3.5.1- Power Specification, Power dist System
Voltage 3phase: 480VAC
3phase connection type: Star Connection
Voltage Single-phase: 120VAC
Single-phase connection type: Grounded
Frequency: 60Hz 
Wattmeter: None
Control Power UPS provided by: Optional
Control Power UPS type:    Fab-wide system
UPS Input/Output Voltage:N/A

3.5.2- Power Specification, Cable Length
Power Cable Input Entrance Loc: Power Box Top
FNC - Power Box:20m
Power Box - RCU: N/A
Power Box - Pump Unit:20m
Power Box -Refill System (if u: 20m
Power Box - WVG CTRL Unit (if: N/A
FNC - WVG CTRL Unit (if used): N/A
Power Box -Scrubber System (if: N/A
Power Box - Ozone Delivery sys: 30m
Power Box - UPS (if used):N/A
Wiring by: Customer
Conduit/Raceways provided by:Customer

3.6.1- Interface Specification, Factory Automation System
Host Communications: Comply with GJG    
Equipment Host I/F Connection:Gas Box TOP HSMS (10Base-T/100Base-TX), OPT: Ordering Fab to verify  connection point as follows:  QTY=1 is Bottom connection, QTY=2 is Top connection,  Default = 1, and note any special requirements within the PO.
Ingenio:Yes, OPT: Ordering Fab must specify Ingenio included or not, default is Yes (QTY=1). Set QTY=0 if excluded
Group Controller Connection: Yes    
OHT Capability: Yes    
AGV Capability: None    
RGV Capability: None    
PGV Capability: None    
Load Port Operation: Upper    
PIO I/F Location: FNC Top    
PIO Provided by:TEL    
PIO Maker/Model: HOKUYO / DMS-HB1-Z series(Head-On)    
Carrier ID Reader Writer Type: RF    
CIDRW Lower Load Port: Read    
CIDRW Upper Load Port: Read    
CIDRW FIMS: Read/ Write,OPT: Ordering Fab must verify if Write or Read Write. Write only QTY= 1.Read/Write QTY= 2. Default = 1 . Note any special requirements within the PO.
CIDRW Maker/Model:"Controller is V700-L22-6.
ID READER(HEAD) is V640-HAM11-V2.
ANTENNA is V640-HS61."    
CIDRW Provided by: TEL    
EEC (Equipment Engineering Cap:    FDC(Fault Detection and Classification)    "OPT: Ordering Fab must specify if FDC is included or not, Include = QTY=1,  Set QTY= 0 if excluded.
Default = 1"
Customized Management Signals: PT / WATER    
"INTERFACE PT/WATER: Interface A Option    "OPT: Ordering Fab must specify Interface A included or not, Include = QTY=1,  Set QTY= 0 if excluded.
Default = 0"

3.6.2- Interface Specification, User Interface
Signal Tower Model: LOUGWB-24-4,OPT: Ordering Fab to verify VAC  signal tower as follows:  QTY=1 is LOUGWB-24-4, QTY=2 is LOUGWB-24-3, Defualt = 1 and note any special requirements within the PO.
Signal Tower Colors: Red/Yellow/Green/Blue, OPT: Ordering Fab to verify signal tower as follows:  QTY=1 is Red/Yellow/Green/Blue , QTY=2 is Red/Yellow/Green, Defualt = 1 and note any special requirements within the PO.
Signal Tower Location: Front    
Front Operation Panel: Yes    
MMI and Gas FlowChart: Gas Box & Front Operation Panel Installed    
Indicator Type: Superset    
Operator Switch: Operator Access/Orange (STD)    
Pressure Display Unit: MPa / Torr    
Cabinet Exh Pressure Display: Pa    
Warning Label: English    

3.7.1- Other Specification, Unit Location
Furnace (Exh/Box,Gas/Box inclu:Main-Fab
Power Box:Sub-Fab
Pump:Sub-Fab
RCU:N/A
Step Up Transformer:N/A
Step Down Transformer:N/A
Ozone Delivery System:Sub-Fab
WVG Controller:N/A
Auto-Refill System:Sub-Fab
UPS:None

3.7.2 -  Other Specification, Gas Leak Detector
Condenser:N/A
Gas Leak Detector:YES
Gas Leak Detector Provided By:TEL
Gas Leak Detector Maker:RiKen / GD-K77D-A
Gas Detector Power:Power is provided by Machine
Detected Gas 1 / Location:Optional
Detected Gas 2 / Location:N/A
Detected Gas 3 / Location:N/A
Detected Gas 4 / Location:N/A
Detected Gas 5 / Location:N/A
Detected Gas 6 / Location:N/A
Detected Gas 7 / Location:N/A
Furnace Detection Port:4 points (2 pairs)
Gas Box Detection Port:4 points (2 pairs)

4.0.1- Fixture List, Furnace
Tube Cart: 1 per 4 tools recommended
BACKDOOR REMOVAL FIXTURE:1 per 4 tools recommended
HEATER SET FIXTURE FIXTURE (SL:    3 per fab recommended
HEATER SET FIXTURE (RACK):3 per fab recommended
Mylar floor cutout template: Supplier to deliver 10 weeks prior to ODD

4.0.2- Fixture List, Auto Mechanism
FOUP DOOR OPENER ADJUSTMENT FI:    1 per 4 tools recommended
FIMS DOOR REMOVER:1 per 4 tools recommended
C/S TEACHING FIXTURE: 1 per 4 tools recommended
FORK GAUGE:1 per 4 tools recommended
FORK CLEARANCE CONFIRMATION FI:    1 per tool
BOAT ALIGNMENT FIXTURE (B/S):1 per 4 tools recommended - (Load Port Foup Teaching Fixture)

4.0.3 - Fixture List, Gas
IGS maintenance Jig: 1 per 4 tools recommended

4.0.4 - Fixture List, Interface Tool
HCT:HCT (Robot Cal. Terminal, Grip SW)= 1 per tool recommended
INTERCOM (INTERPHONE): 1 per 4 tools recommended

4.04 - Fixture List Reactor
INNER TUBE SET FIXTURE:1 per 4 tools recommended
Outer Tube Set Fixture: 1 per 4 tools recommended
SINGLE T/C: 1 per 4 tools recommended
PROTECTION TUBE FOR SINGLE T/C: 1 per 4 tools recommended
EXTENSION CABLE FOR SINGLE T/C: 1 per 4 tools recommended
AUTO PROFILE T/C: 1 per 4 tools recommended
PROTECTION TUBE FOR AUTO PROFI: 1 per 4 tools recommended
EXTENSION CABLE FOR AUTO PROFI: 1 per 4 tools recommended
TEMP MEASUREMENT FIXTURE (T/C: 1 per 4 tools recommended

Damage/Missing parts list
None reported, please inspect tool to reconfirm







 

Enquire about this product

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.

Product Images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


Related products

No results message:
Displayed when filters returns no results.

We couldn't find any items that match your criteria.

Please try a different keyword.

Service unavailable:
Displayed when filter service cannot be reached.

Sorry, this service is currently unavailable.

Please try again later.

Get in touch

Have a question for our team?

Ask about our equipment solutions, ranging from Macquarie equipment inventory sales, sourcing programs, surplus disposition options, and direct equipment purchases.

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.