Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
Date of Manufacture: 2015
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: Currently Available
2.2- General Specification
Safety Specification - S2-0703 - PartQty1
Heater Model - Mid-Temp. VCM-50-012L - PartQty1
Compatible with Atmoshpheric Process - None - PartQty0
Maximum Operating Temperature (C) - 300 - PartQty1
ART Control - Yes - PartQty1"
N2 Load Lock - Yes - PartQty1"
Wafer Type - 300mm-Si SEMI STD-Notch - PartQty1"
Qty. of Production Wafers - 50 - PartQty1"
Software Version (WAVES) - Ver.2.12 R006 - PartQty1"
Seismic Isolation Configuration - None - PartQty0"
3.1.1- Furnace Spec, Furnace
Dewpoint Meter for N2 LL - None - PartQty0"
Loading Area Light - White (LED) - PartQty1"
RCU Duct Length FNC - RCU - 20m - PartQty0"
Chemical PreFilter-Hydrocarbon - Yes
Chemical PreFilter-Location - FNC Top
3.1.2- Furnace Spec, Wafer/Carrier Handling
Carrier Type - FOUP/25slots, SEMI STD - PartQty1"
FOUP Maker/Model - Entegris / A300 - PartQty1"
Carrier Stage Capacity - 10 - PartQty1"
Info Pad A,B - Pin - PartQty0"
Info Pad C,D - Pin - PartQty0"
Fork Material - Al2O3 - PartQty1"
3.1.3- Furnace Spec, Furnace Facilities
Furnace Exhaust Connection Point - Top Connection - PartQty1"
Cooling Water Connection Point - Bottom Connection - PartQty1"
Electric Fan Exhaust Facility Connection - Not Installed
Air Intake Point - Top - PartQty1"
3.2.1- Gas Spec, Gas Distribution System
IGS Type - IGS 1.5""W-Seal rail-mount - PartQty1"
IGS Maker - Fujikin - PartQty1"
Tubing Bends - Bend (Less than 90deg) - PartQty1"
IGS Final Filter - N2 50L line:Entegris(Ni),
The other N2 line and Process gas line:PALL(SUS) - PartQty1"
IGS Regulator - CKD - PartQty1"
IGS MFC (Maker/Type) - HORIBA STEC / Digital - PartQty1"
IGS MFC for low flow N2 purge when cleaning - HORIBA STEC / SEC-G111 - PartQty1"
IGS Press. Transducer - Nagano - PartQty1"
Liquid Source Vapor System Maker / Model - For TMA HORIBA STEC / LSC-F530
For ZAC(OCTANE) STEC / TL-2013 - PartQty1"
Auto-Refill System- TMA - Air Liquid / CANDI - PartQty1 - Model : CALEN - Japan Air Gases"
Auto Refill System- ZAC - Air Liquid / CANDI - PartQty1 - Model : AQUARIUS - Japan Air Gases"
Ozone Delivery System - Toshiba Mitsubishi / OP-500H-RE1 - PartQty1"
Water Vapor Generator (WVG) - None - PartQty0"
3.2.2- Gas Spec, Gas Facilities
Incoming Gas Connection Point - Bottom Connection - PartQty1"
Gas VENT Connection Point - Bottom Connection - PartQty1"
Exhaust VENT Connection Point - Bottom Connection - PartQty1"
Gas Unit Exh Connection Point - Bottom Connection - PartQty1"
3.3.1- Exhaust Specification button
Vacuum Gage - Press Ctrl - MKS (Hot) Capacitance Manometer - PartQty1"
Vacuum Gage - Press Monitor (133kPa) - MKS (Hot) Capacitance Manometer - PartQty1"
Vacuum Gage - Pump Monitor - MKS (Hot) Capacitance Manometer - PartQty1"
Main Valve - CKD-VEC 3"" - PartQty1"
Pump Maker/Model - EDWARDS / iXH1820 - PartQty1"
Abatement System Type - Burning Type - PartQty1"
Abatement System (Maker/Model) - EDWARDS / Atlas-TPU2 - PartQty1"
Pump Control Unit Setting Location - None - PartQty1"
3.3.1- Exhaust Specification
Exhaust Box - Wide Type (1200mmW) - PartQty1"
3.4.1- Reactor Specification
Cap Type - Quartz - PartQty1"
Cap Heater - Yes - PartQty1"
Cooling Water for Cap Rotation - Yes - PartQty1"
Heat Shield Type - HS Plate - PartQty1"
3.5.1- Power Specification, Power dist System
Voltage 3phase - 480VAC - 200VAC is Ozonizer power - PartQty1"
3phase connection type - Star Connection - PartQty1"
Voltage Single-phase - 200VAC
Frequency - 60Hz
3.5.2- Power Specification, Cable Length
Power Cable Input Entrance Loc - Power Box Top -
FNC - Power Box - 30m
FNC - RCU
Power Box - Pump Unit - 30m
Power Box - Refill System - 30m
Power Box - Ozonizer - 20m - PartQty1"
Ozonizer control rack - Ozonizer - 20m - PartQty1"
Ozonizer control rack - Power Box - 20m - PartQty1"
Ozonizer conrol rack - RCU - 20m - PartQty1"
Ozonizer control rack - Floor Box - 20m - PartQty1"
3.6.1- Interface Specification, Factory Automation System
Host Communications - Comply with GJG - PartQty1"
Equipment Host I/F Connection - Power Box Top
Ingenio - Yes
OHT Capability - Yes - PartQty1"
AGV Capability - None - PartQty1"
RGV Capability - None - PartQty0"
PGV Capability - None - PartQty0"
Load Port Operation - Lower + Upper - PartQty1"
PIO I/F Location - FNC Top - PartQty1"
3.6.1- Interface Specification, Factory
PIO Provided by - TEL - PartQty0"
PIO Maker/Model - Hokuyo / DMS-HB1-Z - PartQty0"
Carrier ID Reader Writer Type - RF - PartQty1"
CIDRW Lower L/P - Read - PartQty1"
CIDRW Upper L/P - Read - PartQty1"
CIDRW FIMS - Read/Write - PartQty1"
CIDRW Maker/Model - HOKUYO DMS-HB1-Z series (Head-On) -
Read/Write QTY= 2.
CIDRW Provided by - TEL - PartQty0"
CIDRW Tag Orientation - Vertical - PartQty0"
"
3.6.2- Interface Specification, User Interface
Signal Tower Model - LCE Series - PartQty1"
Signal Tower Colors - RED / BLUE / YELLOW GREEN
Signal Tower Location - Front for 10 Stocker (Left) - PartQty1"
Front Operation Panel - Yes - PartQty1"
MMI and Gas FlowChart - Gas Box & Front Operation Panel Installed - PartQty1"
Light Curtain - None - PartQty1"
Indicator Type - Selete - PartQty1"
Operator Switch - Operator Access / White Cover with Orange Light - PartQty1"
Pressure Display Unit - MPa / Torr - PartQty1"
Cabinet Exh Pressure Display - Pa - PartQty1"
3.7.1- Other Specification, Unit Location
Furnace (Exh/Box,Gas/Box inclu - Main-Fab - PartQty1"
3.7.2 - Other Specification, Gas Leak Detector
Gas Leak Detector - YES - PartQty1"
Detected Gas 1 / Location - Detected Gas 1 / Location - Gas box - PartQty1"
Detected Gas 2 / Location - Detected Gas 2 / Location - Gas box - PartQty1"
Detected Gas 3 / Location - Detected Gas 3 / Location - N/A - PartQty0"
Detected Gas 4 / Location - Detected Gas 4 / Location - Gas box - PartQty1"
Detected Gas 5 / Location - Detected Gas 5 / Location - N/A - PartQty0"
Detected Gas 6 / Location - Detected Gas 6 / Location - N/A - PartQty0"
Detected Gas 7 / Location - Detected Gas 7 / Location - N/A - PartQty0"
Gas Box Detection Port - 8 point (4pairs) - OPT: Ordering Fab must verify Port number,
8 Port (4 Pair) = 1, 10 Port (5 Pair ) = 2, Default = 1 note any special requirements within the PO. - PartQty2"
7.0- Attached List
Facility List - Rev.1 - PartQty1"
System layout drawing - 3892-128274-11 - PartQty1 - 3892-128274011"
Electrical System Diagram - Design in progress - PartQty1 - 3892-128213-11"
Cooling Water System Diagram - Design in progress - PartQty1 - 3893-C20822-13"
Conducting (Wire-Way) Work Among Boxes - Design in progress - PartQty1"
Gas System Diagram - 3892-226546-11 - GFC - PartQty1 - 3892-226398-11"
Gas Parts List - 3898-B22513-12 - GPL - PartQty1 - 3898-B22513-12"
Valve Interlock - Design in progress - PartQty1"
Safety Interlock - Rev.1 - PartQty1"
External Input / Output Table - Rev.1 - PartQty1"
Signal Tower Special Sequence - Rev.1 - PartQty1"
Missing/Damaged Parts List
None report, please inspect tool to reconfirm
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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