Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, K.K. (F15)

Tokyo Electron Ltd. (TEL) ALPHA-303i Anneal

Asset ID: 16238

Print spec sheet

Tokyo Electron Ltd. (TEL)

ALPHA-303i Anneal

Vertical Furnace

Furnaces/Diffusion Systems

Equipment details:

Date of Manufacture: September, 2006

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: 8/4/2022

Tool is currently operating in clean room.
Missing or damaged parts: Not reported. Inspection is recommended to confirm.
Shipping brackets and kits will be required to be supplied by the buyer.

Tube Material:Quartz
Boat Material:SIC
Production wafes:100
Process Gas:Ar(F.S:30slm),O2(F.S:30slm),N2(F.S:30slm),DCE(F.S:1slm)
MFC Maker:STEC
MFC Model:Z500series
Process Temp:700-1100deg

Enquire about this product

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


Related products

No results message:
Displayed when filters returns no results.

We couldn't find any items that match your criteria.

Please try a different keyword.

Service unavailable:
Displayed when filter service cannot be reached.

Sorry, this service is currently unavailable.

Please try again later.

Get in touch

Have a question for our team?

Ask about our equipment solutions, ranging from Macquarie equipment inventory sales, sourcing programs, surplus disposition options, and direct equipment purchases.

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.