Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Aviza Technology, Inc. RVP-300

Asset ID: 10714

Print spec sheet

Aviza Technology, Inc.

RVP-300

Vertical Furnace

Furnaces/Diffusion Systems

Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

Process: ATMOXANNL


Tool config is based on original PO, please verify tool details at tool inspection



System, General Specification

Heater element Model: FURNACE,ATM –APL

Process Condition: AP

Maximum Operating Temperature: 1200c

N2 Load Lock: Yes

Wafer Type: 300 SEMI STD-Notch

Qty. of Production Wafers: 120 slots Ladder

Boat Operation: 2 Boat Type

Software Version: AVP 2.7.1 V


System, Furnace

Loading Area Light: White

Force Air Cooling system: installed

Side Maintenance: None

O2 Density control: 0-100ppm

N2 Boat shower wafer cooling: None

Furnace Temperature Controller: SSPC control


System, Wafer/Carrier Handling

Carrier Type: 12" FOUP

Carrier Stage Capacity: 16 FOUP

WTU Type: GenMark

WTU alignment: GenMark

WTU Teaching method: Pre-aligner / dual beam


System, Gas Distribution

IGS Maker / Type: Fujikin- None

IGS MFC Maker / Type: AERA- None

IGS Press Transducer Maker / Type: Mykrolis- None


System, Exhaust Specification

Vacuum Gage - 2 torr: AP tool - None

Vacuum Gage - 10 torr: AP tool - None

Vacuum Gage - 100 torr: AP tool – None

Vacuum Gage - 1000 torr: AP tool – None

Main Valve: AP tool – None

Pump Maker/Model: AP tool – None

Low vacuum valve: AP tool – None

Trap: AP tool – None

Vacuum Pressure Controller: AP tool – None


System, Reactor

Process Tube (LP): None

Outer/Inner Tube Material (LP): None

Inner Tube Type (AP): Quartz Single

Inner T/C: 12FT/HONEYWELL

Boat Materail/Type: Sic

Boat Rotation: None

Pedestal Materail/Type: Quartz

Auto Shutter: installed

System, Power Distribution

Voltage 3phase: 480VAC

Voltage Single-phase: None

Frequency: 60Hz


System, User Interface:

Operation Panel: Keyboard & Screen

Indicator Type: Mouse

Operation software type: Linux


Gas Leak Detector

Gas Leak Detector Materail/Type: GasTech


System, Fixture List, Gas

IGS maintenance Fixture: None

Vacuum Gauge: one


Missing/Damaged Parts List

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales

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Product Images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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