Macquarie Semiconductor and Technology on behalf of Micron Memory Taiwan Co., Ltd. (F16)

Tokyo Electron Ltd. (TEL) Cellesta+

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Asset ID: 211090

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Tokyo Electron Ltd. (TEL)

Cellesta+

Single Wafer Processing

Etch/Clean - Wet Processing

Equipment details:

Date of Manufacture: 2013-07-15

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taichung City, Taiwan

Available date: Currently Available

Process
DHF
Software VersionVer.3.04.238Na
System Power Rating 208VAC-3P for main power , 208VAC-1P for exhaust sensor
Loading Configuration4 load ports
Any equipment manuals available?   No 
Tool under OEM service contract?  No 
 
DescriptionChemicals / Gases Used
Tank Position   1LSU49%HF / DHF
Tank Position   2CH 2-1~2-12N2/DIW/DHF/IPA
 
System Configuration    
 Description   Qty
 Tool    
1Load Port   4
2SPIN Unit   12
3Liquid Supply Unit   1
4CO2 Bubbler Unit   2
5Power Box   1
6HOT DIW GENERATOR   1


Product images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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